[Scan]
initial_time=2016-01-28T21:17:13
final_time=2016-01-28T21:17:33
ip_count=19
run=1026
dataset=8
scan=583
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.41257E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.01823E-9
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=4.97472E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=-2.5332E-10
mult1=-9.72835E-9
mult2=-2.84237E-9
rf_tmon=-4.67465E-3
rf_agc=3.3616E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.69238E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60604E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=2.00527E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1243E2
lens4a_imon=2.05238E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.1784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02252E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=1.08113E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39734E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03413E1
cs_ea2_imon=1.39437E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.04433E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.12372E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.45478E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=9.5796E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91852E2
cs_nozzle_imon=1.93509E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02139E1
cs_anode1_imon=1.96206E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.08581E-8
tplens_vset=1.4E-1
tplens_vmon=1.66444E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.58656E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98505E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.0754E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=8.71953E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.19888E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44972E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.3658E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.323E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.08711E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74138E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.72507E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.07322E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-8.13916E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56051E1
einzel_imon=7.85723E-6
window_vset=0.0E0
window_vmon=2.31158E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39329E-4
mask2_vset=0.0E0
mask2_vmon=-1.86704E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92595E3
multa_neg_imon=8.16738E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93763E3
defgrida_imon=6.67375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.14095E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33167E1
os_fil1_imon=9.41261E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0781E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59914E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31771E1
cs_fil1_imon=7.92369E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.81577E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61398E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62237E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21768E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77312E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.17084E-1	-7.98607E-1	-9.13124E0	-9.14185E0	4.81606E-3	9.3627E-2	2.73009E1	-3.26302E1	-3.2635E1	2.67872E1	1.198E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.01223E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.16774E-1	-7.98726E-1	-9.13119E0	-9.14207E0	5.00679E-3	9.35078E-2	2.73063E1	-3.26705E1	-3.26356E1	2.68166E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01609E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16751E-1	-7.98726E-1	-9.13117E0	-9.14178E0	4.86374E-3	9.35793E-2	2.72825E1	-3.26457E1	-3.26289E1	2.67908E1	1.19653E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16441E-1	-7.98535E-1	-9.13117E0	-9.14192E0	4.74453E-3	9.36985E-2	2.737E1	-3.26603E1	-3.26194E1	2.68118E1	1.19646E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16941E-1	-7.98559E-1	-9.13107E0	-9.14185E0	4.50611E-3	9.33647E-2	2.72811E1	-3.26645E1	-3.26374E1	2.68148E1	1.2033E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16488E-1	-7.98845E-1	-9.13119E0	-9.14202E0	4.76837E-3	9.31978E-2	2.72925E1	-3.26386E1	-3.26344E1	2.67764E1	1.19749E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16464E-1	-7.98678E-1	-9.13086E0	-9.14176E0	4.76837E-3	9.37939E-2	2.72892E1	-3.26526E1	-3.2616E1	2.67911E1	1.20244E-7	2.50914E-3	2.50914E-3	6.3074E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16679E-1	-7.98869E-1	-9.13088E0	-9.14145E0	4.95911E-3	9.37462E-2	2.73284E1	-3.26321E1	-3.2626E1	2.68192E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16441E-1	-7.98607E-1	-9.13091E0	-9.14178E0	4.72069E-3	9.37462E-2	2.72925E1	-3.26549E1	-3.25834E1	2.67716E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.16703E-1	-7.98821E-1	-9.13148E0	-9.1418E0	4.74453E-3	9.38416E-2	2.73139E1	-3.2682E1	-3.26366E1	2.67624E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16607E-1	-7.98607E-1	-9.131E0	-9.14176E0	4.98295E-3	9.36031E-2	2.72829E1	-3.26434E1	-3.2617E1	2.68292E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16393E-1	-7.98512E-1	-9.13126E0	-9.14195E0	5.10216E-3	9.38416E-2	2.73004E1	-3.26868E1	-3.26172E1	2.67842E1	1.2026E-7	2.52599E-3	2.52599E-3	6.32356E-3	3.02769E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16131E-1	-7.98416E-1	-9.13088E0	-9.14176E0	4.74453E-3	9.3627E-2	2.72624E1	-3.2653E1	-3.26008E1	2.67932E1	1.19601E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16274E-1	-7.98273E-1	-9.13091E0	-9.14187E0	4.88758E-3	9.3627E-2	2.72955E1	-3.26705E1	-3.26146E1	2.68022E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16536E-1	-7.98464E-1	-9.13122E0	-9.1419E0	5.126E-3	9.33647E-2	2.72564E1	-3.26879E1	-3.2608E1	2.6834E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.97901E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16655E-1	-7.98392E-1	-9.13124E0	-9.14209E0	4.60148E-3	9.36985E-2	2.73063E1	-3.26825E1	-3.26176E1	2.68034E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.97704E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16536E-1	-7.98798E-1	-9.13122E0	-9.14187E0	5.10216E-3	9.39846E-2	2.73472E1	-3.26254E1	-3.26188E1	2.68016E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16727E-1	-7.98321E-1	-9.13115E0	-9.14223E0	4.91142E-3	9.37462E-2	2.73285E1	-3.26795E1	-3.26356E1	2.68232E1	1.19809E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9874E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.16607E-1	-7.98392E-1	-9.13095E0	-9.14216E0	5.05447E-3	9.36985E-2	2.72909E1	-3.26472E1	-3.26331E1	2.6796E1	1.20017E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.16703E-1	-7.98225E-1	-9.13076E0	-9.14209E0	5.05447E-3	9.377E-2	2.74138E1	-3.26849E1	-3.26032E1	2.6813E1	1.20106E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00966E-1
