[Scan]
initial_time=2016-01-28T21:18:33
final_time=2016-01-28T21:18:53
ip_count=19
run=1026
dataset=8
scan=586
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.39736E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.05944E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.38886E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-2.56896E-10
mult1=-9.10224E-9
mult2=-2.81642E-9
rf_tmon=-5.56988E-3
rf_agc=3.25104E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.75455E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70219E0
bslens_imon=2.62788E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=1.97911E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05255E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02402E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05349E1
cs_ea1_imon=1.09878E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=2.718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.39222E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.04757E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.12481E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.50471E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=9.33309E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91834E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=1.96999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.08504E-8
tplens_vset=1.4E-1
tplens_vmon=1.68469E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.48306E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26873E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98724E-4
ql6_vset=1.0E-1
ql6_vmon=9.40561E-2
ql6_imon=3.95391E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23828E0
ionrepsh_imon=8.63733E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.19576E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.14344E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44136E0
os_ea2_imon=-5.37273E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00926E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.37409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73442E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.76475E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.06524E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-9.90511E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86933E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=8.12904E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=5.93001E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33196E1
os_fil1_imon=9.40234E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08693E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59903E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31775E1
cs_fil1_imon=7.34705E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.32323E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61408E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22341E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62645E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40651E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21735E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32402E-3
inlet_lpb_pmon=3.00487E-1
chamber_ion_pmon=1.19866E-7
chamber_cvt_pmon=2.51291E-3
foreline_cvt_pmon=2.51291E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.89635E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.17347E-1	-7.98321E-1	-9.13107E0	-9.14178E0	4.57764E-3	9.35078E-2	2.72727E1	-3.27068E1	-3.26065E1	2.68094E1	1.19757E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01609E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09665E0	-8.17084E-1	-7.98392E-1	-9.13093E0	-9.1419E0	4.3869E-3	9.3627E-2	2.73284E1	-3.2675E1	-3.2626E1	2.67992E1	1.19953E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.1718E-1	-7.98726E-1	-9.1311E0	-9.1418E0	4.60148E-3	9.37939E-2	2.72939E1	-3.26626E1	-3.26136E1	2.68034E1	1.20031E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.0201E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09696E0	-8.17156E-1	-7.98559E-1	-9.1311E0	-9.14209E0	4.72069E-3	9.38416E-2	2.72791E1	-3.26443E1	-3.26219E1	2.68244E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.1718E-1	-7.98512E-1	-9.13115E0	-9.14199E0	4.74453E-3	9.40323E-2	2.72751E1	-3.26717E1	-3.26242E1	2.67962E1	1.19851E-7	2.52599E-3	2.52599E-3	6.32896E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17013E-1	-7.98488E-1	-9.13093E0	-9.14202E0	4.45843E-3	9.39608E-2	2.723E1	-3.26651E1	-3.2617E1	2.6852E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.1706E-1	-7.98345E-1	-9.13134E0	-9.14211E0	4.69685E-3	9.37939E-2	2.72883E1	-3.26374E1	-3.26603E1	2.68076E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16941E-1	-7.98631E-1	-9.13129E0	-9.14197E0	4.79221E-3	9.39846E-2	2.73418E1	-3.26597E1	-3.26107E1	2.67752E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16751E-1	-7.98512E-1	-9.13126E0	-9.14226E0	4.673E-3	9.36508E-2	2.72856E1	-3.26537E1	-3.26461E1	2.6807E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16751E-1	-7.98559E-1	-9.13131E0	-9.14185E0	5.14984E-3	9.37939E-2	2.72907E1	-3.26825E1	-3.26524E1	2.68436E1	1.19965E-7	2.52647E-3	2.52647E-3	6.34588E-3	3.01609E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16631E-1	-7.98988E-1	-9.13153E0	-9.14211E0	4.91142E-3	9.377E-2	2.73175E1	-3.26478E1	-3.26195E1	2.67938E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16679E-1	-7.98512E-1	-9.13134E0	-9.14223E0	4.673E-3	9.40084E-2	2.72618E1	-3.26536E1	-3.2635E1	2.67806E1	1.19749E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16369E-1	-7.98535E-1	-9.13146E0	-9.14207E0	4.88758E-3	9.37939E-2	2.72606E1	-3.26699E1	-3.26236E1	2.68184E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.03712E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16607E-1	-7.98512E-1	-9.13129E0	-9.1419E0	4.76837E-3	9.37462E-2	2.73039E1	-3.26741E1	-3.26164E1	2.6798E1	1.19653E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.02133E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16655E-1	-7.98154E-1	-9.13148E0	-9.14214E0	5.17368E-3	9.38177E-2	2.72626E1	-3.26661E1	-3.26449E1	2.68024E1	1.20122E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.1687E-1	-7.98249E-1	-9.13157E0	-9.14195E0	5.36442E-3	9.3627E-2	2.73808E1	-3.26987E1	-3.25821E1	2.67998E1	1.19749E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.0071E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16751E-1	-7.98225E-1	-9.13157E0	-9.14164E0	5.14984E-3	9.36985E-2	2.72408E1	-3.26591E1	-3.26723E1	2.67968E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16679E-1	-7.98154E-1	-9.13143E0	-9.14156E0	5.22137E-3	9.35555E-2	2.739E1	-3.26219E1	-3.26207E1	2.68022E1	1.19549E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16584E-1	-7.98464E-1	-9.13093E0	-9.1418E0	5.126E-3	9.37939E-2	2.72234E1	-3.26729E1	-3.25954E1	2.67944E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16631E-1	-7.98225E-1	-9.13129E0	-9.14187E0	5.29289E-3	9.40561E-2	2.73442E1	-3.26873E1	-3.26164E1	2.67944E1	1.19866E-7	2.51291E-3	2.51291E-3	6.32402E-3	3.00487E-1
