[Scan]
initial_time=2016-01-28T21:20:47
final_time=2016-01-28T21:21:06
ip_count=19
run=1026
dataset=8
scan=591
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.39823E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=1.98185E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=4.16219E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.86543E-10
mult1=-1.09106E-8
mult2=-2.93954E-9
rf_tmon=-3.73804E-3
rf_agc=3.37201E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.70062E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62949E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12436E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=3.17047E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04802E1
cs_ea1_imon=1.09625E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43805E0
lens1_imon=2.68195E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.39546E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.05154E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.1203E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11069E1
os_restr1_imon=4.31437E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.46109E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64356E1
os_ef1bup_imon=3.11064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=9.59986E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=1.97395E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.08538E-8
tplens_vset=1.4E-1
tplens_vmon=1.66366E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.48342E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26505E1
iondef2_imon=1.59157E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.97904E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22386E0
ionrepsh_imon=8.51116E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33453E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75366E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45638E0
os_ea2_imon=-6.23792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00489E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70903E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28058E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.38238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01605E1
cs_anode2_imon=2.09865E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7242E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.7771E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.06688E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11152E0
cs_ionaccel_imon=-6.2651E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02133E2
cs_ionfocb_imon=1.47486E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56663E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.17943E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82578E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.56666E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.56088E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.19535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33221E1
os_fil1_imon=9.41003E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08506E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59795E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31747E1
cs_fil1_imon=7.305E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.19709E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61351E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20869E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.6896E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21668E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18157E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.16488E-1	-7.98798E-1	-9.13112E0	-9.14197E0	4.93526E-3	9.39131E-2	2.72644E1	-3.26738E1	-3.26555E1	2.68557E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16441E-1	-7.98893E-1	-9.13136E0	-9.1419E0	4.81606E-3	9.38654E-2	2.72629E1	-3.26627E1	-3.26095E1	2.68257E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16369E-1	-7.9875E-1	-9.13138E0	-9.14216E0	4.55379E-3	9.38177E-2	2.74945E1	-3.26626E1	-3.26172E1	2.68273E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02396E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.16393E-1	-7.98965E-1	-9.131E0	-9.14204E0	4.55379E-3	9.39131E-2	2.73488E1	-3.26862E1	-3.26148E1	2.6798E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16345E-1	-7.98821E-1	-9.13126E0	-9.14173E0	4.43459E-3	9.408E-2	2.7111E1	-3.26711E1	-3.26224E1	2.6798E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16441E-1	-7.98965E-1	-9.13124E0	-9.14178E0	4.52995E-3	9.37462E-2	2.71759E1	-3.26446E1	-3.26116E1	2.68358E1	1.19653E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9978E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16345E-1	-7.99227E-1	-9.13167E0	-9.14195E0	4.79221E-3	9.40084E-2	2.73995E1	-3.26561E1	-3.26296E1	2.67908E1	1.19851E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.98156E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.16298E-1	-7.99012E-1	-9.13117E0	-9.1419E0	4.79221E-3	9.37939E-2	2.71411E1	-3.26554E1	-3.26242E1	2.68268E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16083E-1	-7.98845E-1	-9.13134E0	-9.1419E0	4.76837E-3	9.377E-2	2.71276E1	-3.2645E1	-3.26334E1	2.68094E1	1.19705E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16107E-1	-7.98702E-1	-9.13165E0	-9.14178E0	4.8399E-3	9.36985E-2	2.73021E1	-3.26425E1	-3.26048E1	2.67868E1	1.19713E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.00676E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.1625E-1	-7.98821E-1	-9.13155E0	-9.1418E0	4.95911E-3	9.36747E-2	2.74101E1	-3.26543E1	-3.26272E1	2.6807E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16464E-1	-7.98917E-1	-9.13146E0	-9.14178E0	5.07832E-3	9.33647E-2	2.73522E1	-3.26523E1	-3.2607E1	2.68346E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16345E-1	-7.98965E-1	-9.13134E0	-9.14216E0	4.98295E-3	9.35316E-2	2.72739E1	-3.26543E1	-3.2632E1	2.67986E1	1.20031E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.0041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.16202E-1	-7.98678E-1	-9.13138E0	-9.14209E0	5.10216E-3	9.34124E-2	2.72231E1	-3.2682E1	-3.26384E1	2.68034E1	1.19757E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16035E-1	-7.98607E-1	-9.13148E0	-9.14185E0	5.38826E-3	9.377E-2	2.74138E1	-3.26783E1	-3.25912E1	2.68094E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16441E-1	-7.98726E-1	-9.13138E0	-9.1419E0	5.55515E-3	9.36747E-2	2.72006E1	-3.26362E1	-3.26488E1	2.68184E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9874E-1
2.0E1	4.0E0	1.0E0	8.08E2	5.58E2	-2.09619E0	-8.16274E-1	-7.98678E-1	-9.13131E0	-9.14183E0	5.26905E-3	9.35316E-2	2.73556E1	-3.26549E1	-3.26633E1	2.6816E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16488E-1	-7.98678E-1	-9.13124E0	-9.14159E0	5.10216E-3	9.36508E-2	2.73411E1	-3.26644E1	-3.2613E1	2.67665E1	1.19697E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01223E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16345E-1	-7.98821E-1	-9.13157E0	-9.14176E0	4.98295E-3	9.37223E-2	2.73181E1	-3.26431E1	-3.2606E1	2.68004E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16488E-1	-7.98702E-1	-9.13148E0	-9.14202E0	4.8399E-3	9.35793E-2	2.7242E1	-3.26505E1	-3.26419E1	2.6804E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99686E-1
