[Scan]
initial_time=2016-01-28T21:21:13
final_time=2016-01-28T21:21:33
ip_count=19
run=1026
dataset=8
scan=592
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.40185E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.98728E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=4.23825E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=-2.40719E-10
mult1=-9.58568E-9
mult2=-3.01885E-9
rf_tmon=-5.10316E-3
rf_agc=3.30896E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.73417E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6556E0
bslens_imon=2.57511E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12415E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.16775E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02464E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04935E1
cs_ea1_imon=1.10095E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43686E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64185E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03277E1
cs_ea2_imon=1.41242E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=3.05203E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.12095E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.32501E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15518E1
os_ea1_imon=2.47884E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63769E1
os_ef1bup_imon=3.09373E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17482E0
cs_ionrep_imon=9.38494E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02099E1
cs_anode1_imon=1.95767E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.0904E-8
tplens_vset=1.4E-1
tplens_vmon=1.62551E0
tplens_imon=-3.34315E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26107E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2678E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.94222E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25269E0
ionrepsh_imon=8.58503E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.16915E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74426E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40134E0
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7102E1
cs_ef2a_imon=3.19868E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08236E0
os_ef2alow_imon=-2.5155E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94914E-1
os_ef2bup_imon=-5.17407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.37244E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01589E1
cs_anode2_imon=2.09737E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72873E1
iondef1_imon=1.07299E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68126E1
iondef4_imon=1.09685E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.78737E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.05745E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-8.82134E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47299E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56226E1
einzel_imon=7.66004E-6
window_vset=0.0E0
window_vmon=2.11894E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39313E-4
mask2_vset=0.0E0
mask2_vmon=-1.86576E1
mask2_imon=-5.45035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92571E3
multa_neg_imon=8.36912E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.70914E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50174E3
multb_neg_imon=7.30022E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33211E1
os_fil1_imon=9.40323E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07694E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59733E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31777E1
cs_fil1_imon=7.77395E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.52895E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61264E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05368E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0977E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.81346E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-2.06681E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.588E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21764E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21181E-1
res40_imon=-2.40777E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.16107E-1	-7.98726E-1	-9.13117E0	-9.14207E0	4.72069E-3	9.38177E-2	2.73326E1	-3.26799E1	-3.25703E1	2.681E1	1.19749E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.9841E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16059E-1	-7.98893E-1	-9.13141E0	-9.14223E0	4.62532E-3	9.39131E-2	2.72402E1	-3.26783E1	-3.26176E1	2.68308E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.15988E-1	-7.9875E-1	-9.1311E0	-9.14185E0	4.81606E-3	9.36031E-2	2.74181E1	-3.26532E1	-3.26289E1	2.67816E1	1.19872E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.00144E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16107E-1	-7.98988E-1	-9.13134E0	-9.14192E0	4.81606E-3	9.36747E-2	2.72525E1	-3.26658E1	-3.2645E1	2.67962E1	1.19941E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16274E-1	-7.98893E-1	-9.13117E0	-9.1418E0	4.93526E-3	9.34601E-2	2.73417E1	-3.26526E1	-3.26325E1	2.67938E1	1.19925E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.98554E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16321E-1	-7.98702E-1	-9.13131E0	-9.14197E0	4.88758E-3	9.3627E-2	2.73045E1	-3.26496E1	-3.26101E1	2.67891E1	1.1969E-7	2.51603E-3	2.51603E-3	6.31798E-3	2.99594E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16011E-1	-7.98821E-1	-9.13134E0	-9.14168E0	4.86374E-3	9.36985E-2	2.72248E1	-3.26829E1	-3.26038E1	2.67955E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.15988E-1	-7.98678E-1	-9.13148E0	-9.14197E0	4.98295E-3	9.36031E-2	2.73274E1	-3.26553E1	-3.26171E1	2.67945E1	1.19782E-7	2.51575E-3	2.51575E-3	6.3126E-3	2.99506E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16107E-1	-7.98726E-1	-9.13141E0	-9.14166E0	4.95911E-3	9.36031E-2	2.72522E1	-3.26669E1	-3.25761E1	2.68262E1	1.1984E-7	2.51874E-3	2.51874E-3	6.32483E-3	3.02581E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.15964E-1	-7.98702E-1	-9.13112E0	-9.14171E0	5.05447E-3	9.377E-2	2.73435E1	-3.26524E1	-3.26452E1	2.68124E1	1.19653E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16512E-1	-7.98249E-1	-9.13129E0	-9.14159E0	5.03063E-3	9.3627E-2	2.73134E1	-3.26885E1	-3.259E1	2.67992E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.16298E-1	-7.98273E-1	-9.13131E0	-9.14178E0	4.88758E-3	9.40084E-2	2.73087E1	-3.26308E1	-3.26362E1	2.67818E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99686E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16059E-1	-7.98154E-1	-9.13119E0	-9.14147E0	4.93526E-3	9.40084E-2	2.73424E1	-3.26741E1	-3.26603E1	2.68112E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9892E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16131E-1	-7.98225E-1	-9.13124E0	-9.14156E0	5.24521E-3	9.41277E-2	2.723E1	-3.26633E1	-3.2641E1	2.67956E1	1.19978E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.01209E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.15845E-1	-7.98154E-1	-9.13148E0	-9.14185E0	4.95911E-3	9.39369E-2	2.73027E1	-3.26443E1	-3.26225E1	2.67935E1	1.20158E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16059E-1	-7.98464E-1	-9.13119E0	-9.14171E0	4.76837E-3	9.40323E-2	2.7334E1	-3.26685E1	-3.25859E1	2.68058E1	1.19705E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16536E-1	-7.98631E-1	-9.1311E0	-9.14187E0	4.24385E-3	9.38177E-2	2.73015E1	-3.26621E1	-3.26404E1	2.67962E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16512E-1	-7.98535E-1	-9.13124E0	-9.14211E0	4.55379E-3	9.39131E-2	2.73087E1	-3.265E1	-3.26098E1	2.67583E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.1656E-1	-7.98559E-1	-9.13119E0	-9.14185E0	4.57764E-3	9.37939E-2	2.7288E1	-3.26697E1	-3.25959E1	2.68163E1	1.20226E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16727E-1	-7.98607E-1	-9.1311E0	-9.14161E0	4.74453E-3	9.40084E-2	2.72873E1	-3.2678E1	-3.26107E1	2.68126E1	1.198E-7	2.5131E-3	2.5131E-3	6.28592E-3	3.00966E-1
