[Scan]
initial_time=2016-01-28T21:23:00
final_time=2016-01-28T21:23:20
ip_count=19
run=1026
dataset=8
scan=596
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.38999E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.01461E-9
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=3.60739E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-2.77913E-10
mult1=-9.9812E-9
mult2=-2.76053E-9
rf_tmon=-4.06181E-3
rf_agc=3.33696E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.68843E-9
bslens_vset=-6.2E0
bslens_vmon=-6.57596E0
bslens_imon=2.45477E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19541E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.18304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=1.07688E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40146E0
lens1_imon=2.9963E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.98391E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.36889E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84139E1
cs_ef1a_imon=3.03361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.12114E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11564E1
os_restr1_imon=4.32084E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.47424E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63751E1
os_ef1bup_imon=3.09234E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23676E0
cs_ionrep_imon=9.6964E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01473E1
cs_anode1_imon=1.97782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.08774E-8
tplens_vset=1.4E-1
tplens_vmon=1.62551E0
tplens_imon=-2.56414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.49241E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.60815E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.99204E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=8.45407E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.20065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47862E0
os_ea2_imon=-7.55471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.004E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71067E1
cs_ef2a_imon=3.20702E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06962E0
os_ef2alow_imon=-2.61629E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1229E-1
os_ef2bup_imon=-5.33046E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.37001E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73658E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68352E1
iondef4_imon=1.09024E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.73692E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=7.07659E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10176E0
cs_ionaccel_imon=-8.68233E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47431E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.64614E-6
window_vset=0.0E0
window_vmon=1.69611E-1
window_imon=-9.48164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-5.65886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92575E3
multa_neg_imon=7.37809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93668E3
defgrida_imon=6.63481E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.18342E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.72151E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.40208E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07856E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60086E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3178E1
cs_fil1_imon=8.71806E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.054E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61514E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19617E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.75019E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.53018E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.48374E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21747E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.928E-1
res40_imon=-2.31394E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.1594E-1	-7.98512E-1	-9.13155E0	-9.14159E0	4.8399E-3	9.39608E-2	2.72892E1	-3.26909E1	-3.26915E1	2.68202E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16321E-1	-7.9844E-1	-9.13143E0	-9.14185E0	4.76837E-3	9.37462E-2	2.73039E1	-3.26578E1	-3.26529E1	2.67716E1	1.20092E-7	2.52236E-3	2.52236E-3	6.32328E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16107E-1	-7.98631E-1	-9.13138E0	-9.14197E0	4.95911E-3	9.36985E-2	2.72196E1	-3.26726E1	-3.2613E1	2.68142E1	1.20262E-7	2.51838E-3	2.51838E-3	6.27335E-3	2.989E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16059E-1	-7.9844E-1	-9.13134E0	-9.14173E0	5.03063E-3	9.377E-2	2.73222E1	-3.26413E1	-3.26319E1	2.68128E1	1.19941E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16345E-1	-7.98321E-1	-9.13141E0	-9.14199E0	4.93526E-3	9.37462E-2	2.72949E1	-3.26645E1	-3.26314E1	2.6801E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16035E-1	-7.98583E-1	-9.13136E0	-9.14156E0	4.81606E-3	9.36747E-2	2.73141E1	-3.26368E1	-3.26218E1	2.6777E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.1625E-1	-7.98559E-1	-9.13122E0	-9.14183E0	4.72069E-3	9.37223E-2	2.73676E1	-3.26561E1	-3.26332E1	2.67932E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16345E-1	-7.98726E-1	-9.13112E0	-9.14183E0	4.98295E-3	9.36985E-2	2.71681E1	-3.26446E1	-3.26218E1	2.6825E1	1.20096E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00171E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16584E-1	-7.98774E-1	-9.13143E0	-9.14178E0	4.8399E-3	9.37939E-2	2.74661E1	-3.26596E1	-3.26213E1	2.68022E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.16798E-1	-7.98607E-1	-9.13146E0	-9.14159E0	4.93526E-3	9.38177E-2	2.73381E1	-3.26434E1	-3.26386E1	2.68088E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98481E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09704E0	-8.16464E-1	-7.98607E-1	-9.13134E0	-9.14145E0	5.126E-3	9.39608E-2	2.72498E1	-3.26669E1	-3.26182E1	2.67944E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.16703E-1	-7.98869E-1	-9.13138E0	-9.14218E0	4.95911E-3	9.39846E-2	2.72951E1	-3.26284E1	-3.26231E1	2.67995E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16464E-1	-7.98631E-1	-9.13122E0	-9.14187E0	4.95911E-3	9.38892E-2	2.73039E1	-3.26615E1	-3.26158E1	2.68022E1	1.19757E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16464E-1	-7.9844E-1	-9.131E0	-9.1419E0	4.88758E-3	9.36747E-2	2.72732E1	-3.26644E1	-3.26372E1	2.68046E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9874E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16488E-1	-7.98488E-1	-9.13105E0	-9.14204E0	5.00679E-3	9.36747E-2	2.72889E1	-3.2653E1	-3.26374E1	2.67968E1	1.20055E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.98665E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16464E-1	-7.98273E-1	-9.13112E0	-9.14202E0	5.07832E-3	9.3627E-2	2.73393E1	-3.26597E1	-3.26242E1	2.68034E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16512E-1	-7.9844E-1	-9.13131E0	-9.14161E0	4.88758E-3	9.3627E-2	2.73442E1	-3.26675E1	-3.26032E1	2.68136E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16226E-1	-7.98464E-1	-9.13167E0	-9.14178E0	4.98295E-3	9.37223E-2	2.72903E1	-3.26809E1	-3.26467E1	2.6792E1	1.19697E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.16059E-1	-7.98368E-1	-9.13134E0	-9.14197E0	5.10216E-3	9.41038E-2	2.73021E1	-3.26573E1	-3.26225E1	2.67583E1	1.20209E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16226E-1	-7.98392E-1	-9.13172E0	-9.14199E0	4.86374E-3	9.39369E-2	2.73658E1	-3.26603E1	-3.26104E1	2.68352E1	1.20055E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.00966E-1
