[Scan]
initial_time=2016-01-28T21:23:53
final_time=2016-01-28T21:24:13
ip_count=19
run=1026
dataset=8
scan=598
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08833E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.39795E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.06606E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=3.7477E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-2.85339E-10
mult1=-1.08842E-8
mult2=-2.83039E-9
rf_tmon=-3.83349E-3
rf_agc=3.38503E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.69545E-9
bslens_vset=-6.2E0
bslens_vmon=-6.73703E0
bslens_imon=3.93647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21233E1
lens5a_imon=1.95459E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1225E2
lens4a_imon=2.03957E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.1838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.03213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06754E1
cs_ea1_imon=1.13699E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34012E0
lens1_imon=1.24718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6405E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0223E1
cs_ea2_imon=1.46324E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.12572E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11081E1
os_restr1_imon=4.31184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.17397E1
os_ea1_imon=2.54905E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27974E0
cs_ionrep_imon=9.00504E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91726E2
cs_nozzle_imon=1.92832E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=1.97251E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.08824E-8
tplens_vset=1.4E-1
tplens_vmon=1.6895E0
tplens_imon=9.11918E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26452E1
iondef3_imon=1.45783E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.53065E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02882E2
lens6_imon=2.99027E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.96461E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.45578E0
ionrepsh_imon=9.27902E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3257E1
lens5b_imon=2.06923E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37467E0
os_ea2_imon=-2.56087E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06287E2
lens4b_imon=2.01178E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.37049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.2416E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.0584E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.74907E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.097E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-9.00411E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.58478E-1
window_imon=-1.05178E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86867E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92546E3
multa_neg_imon=7.33594E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=5.69209E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50203E3
multb_neg_imon=8.08578E-5
defgridb_vset=0.0E0
defgridb_vmon=-7.60953E-1
defgridb_imon=5.38206E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33183E1
os_fil1_imon=9.40732E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07587E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60039E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3177E1
cs_fil1_imon=7.82758E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77973E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61544E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19579E-2
os_fil2_imon=-2.34762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.7141E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2172E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.0041E-1
chamber_ion_pmon=1.19607E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27167E-1
res40_imon=-2.28433E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16321E-1	-7.9844E-1	-9.13153E0	-9.14161E0	4.45843E-3	9.37223E-2	2.71348E1	-3.24893E1	-3.27587E1	2.67839E1	1.19861E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.98481E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16441E-1	-7.98345E-1	-9.13165E0	-9.14164E0	4.55379E-3	9.35793E-2	2.72625E1	-3.26807E1	-3.26076E1	2.68057E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16607E-1	-7.98559E-1	-9.13143E0	-9.14192E0	4.43459E-3	9.36985E-2	2.74065E1	-3.26978E1	-3.26028E1	2.67935E1	1.19829E-7	2.52179E-3	2.52179E-3	6.33021E-3	3.00251E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16584E-1	-7.98631E-1	-9.13146E0	-9.14164E0	4.43459E-3	9.35555E-2	2.73116E1	-3.26785E1	-3.26231E1	2.6803E1	1.19941E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16202E-1	-7.98559E-1	-9.13157E0	-9.14173E0	4.22001E-3	9.35078E-2	2.72606E1	-3.26855E1	-3.26603E1	2.68016E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16107E-1	-7.98583E-1	-9.13134E0	-9.14185E0	4.62532E-3	9.38416E-2	2.74493E1	-3.26488E1	-3.26104E1	2.68484E1	1.20055E-7	2.52599E-3	2.52599E-3	6.3074E-3	3.03286E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16417E-1	-7.98559E-1	-9.13155E0	-9.14161E0	4.60148E-3	9.37939E-2	2.72168E1	-3.26434E1	-3.26464E1	2.67944E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16464E-1	-7.98702E-1	-9.13148E0	-9.14195E0	4.64916E-3	9.37223E-2	2.73942E1	-3.26449E1	-3.26567E1	2.6801E1	1.19809E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.03449E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16417E-1	-7.9844E-1	-9.13162E0	-9.14166E0	4.76837E-3	9.36031E-2	2.731E1	-3.26719E1	-3.26187E1	2.6804E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0148E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16536E-1	-7.98488E-1	-9.13157E0	-9.14156E0	5.00679E-3	9.36508E-2	2.72438E1	-3.26621E1	-3.26326E1	2.68262E1	1.20031E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.01475E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16202E-1	-7.98488E-1	-9.13155E0	-9.14195E0	4.55379E-3	9.36985E-2	2.73934E1	-3.26543E1	-3.26392E1	2.68154E1	1.19913E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16274E-1	-7.98416E-1	-9.1316E0	-9.14209E0	4.62532E-3	9.3627E-2	2.72931E1	-3.26368E1	-3.26242E1	2.68328E1	1.19809E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16488E-1	-7.98273E-1	-9.13174E0	-9.14197E0	4.673E-3	9.377E-2	2.73141E1	-3.26759E1	-3.26266E1	2.68244E1	1.19757E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16083E-1	-7.98464E-1	-9.13179E0	-9.14178E0	4.31538E-3	9.34601E-2	2.73363E1	-3.26657E1	-3.26212E1	2.67854E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16345E-1	-7.98321E-1	-9.13179E0	-9.14176E0	4.43459E-3	9.37462E-2	2.73165E1	-3.2647E1	-3.26326E1	2.67884E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16345E-1	-7.98392E-1	-9.1315E0	-9.14197E0	4.48227E-3	9.35316E-2	2.72871E1	-3.26687E1	-3.26296E1	2.67968E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9926E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16131E-1	-7.98416E-1	-9.13146E0	-9.14195E0	4.45843E-3	9.37223E-2	2.73357E1	-3.26645E1	-3.26651E1	2.68334E1	1.20084E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.0041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16107E-1	-7.9844E-1	-9.13162E0	-9.14173E0	4.64916E-3	9.35316E-2	2.73145E1	-3.26567E1	-3.26166E1	2.67852E1	1.19902E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0071E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16154E-1	-7.98392E-1	-9.13141E0	-9.14171E0	4.69685E-3	9.36747E-2	2.73151E1	-3.2636E1	-3.26413E1	2.68041E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31548E-3	3.02511E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-8.16464E-1	-7.98607E-1	-9.13138E0	-9.14183E0	4.86374E-3	9.33886E-2	2.73147E1	-3.26753E1	-3.26452E1	2.68082E1	1.19607E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.0041E-1
