[Scan]
initial_time=2016-01-28T21:25:13
final_time=2016-01-28T21:25:33
ip_count=19
run=1026
dataset=8
scan=601
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08872E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.39381E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.03711E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=3.04365E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=-2.65729E-10
mult1=-1.03623E-8
mult2=-2.63899E-9
rf_tmon=-4.03755E-3
rf_agc=3.384E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.76002E-9
bslens_vset=-6.2E0
bslens_vmon=-6.73764E0
bslens_imon=2.82254E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1958E1
lens5a_imon=1.95567E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12386E2
lens4a_imon=2.05147E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.18344E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02618E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=1.0411E-5
lens1_vset=-5.0E0
lens1_vmon=-5.29145E0
lens1_imon=2.24575E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04087E1
cs_ea2_imon=1.47009E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.12477E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.31473E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16243E1
os_ea1_imon=2.4719E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20463E0
cs_ionrep_imon=8.99783E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93763E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=1.97071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.09708E-8
tplens_vset=1.4E-1
tplens_vmon=1.74898E0
tplens_imon=2.12557E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26531E1
iondef3_imon=1.45422E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26378E1
iondef2_imon=1.58905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.9884E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.05592E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25991E0
ionrepsh_imon=8.21195E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32943E1
lens5b_imon=2.16404E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74874E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48041E0
os_ea2_imon=-2.38062E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06165E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.20002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.37445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22972E2
cs_ionfoca_imon=6.25746E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.08567E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73476E1
iondef1_imon=1.13122E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67848E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.77899E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.08146E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.72003E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=8.15066E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93667E3
defgrida_imon=5.88675E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50197E3
multb_neg_imon=7.41525E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27224E0
defgridb_imon=6.34819E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33183E1
os_fil1_imon=9.4084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07882E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59987E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31779E1
cs_fil1_imon=7.29299E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.86983E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61495E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00233E-2
os_fil2_imon=-2.31158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.29549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57875E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21659E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.37068E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.15868E-1	-7.98392E-1	-9.13143E0	-9.14147E0	4.81606E-3	9.34362E-2	2.72835E1	-3.26585E1	-3.27179E1	2.68004E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.15892E-1	-7.98321E-1	-9.13131E0	-9.1419E0	4.88758E-3	9.377E-2	2.72799E1	-3.26615E1	-3.26386E1	2.67782E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.97963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.15821E-1	-7.98297E-1	-9.13143E0	-9.14171E0	4.98295E-3	9.37223E-2	2.74059E1	-3.26283E1	-3.26411E1	2.67926E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.97445E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16083E-1	-7.98273E-1	-9.13143E0	-9.14171E0	4.72069E-3	9.34362E-2	2.72534E1	-3.26224E1	-3.26206E1	2.67938E1	1.19933E-7	2.51593E-3	2.51593E-3	6.31555E-3	2.99732E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.15964E-1	-7.98321E-1	-9.13146E0	-9.14183E0	4.69685E-3	9.3627E-2	2.73916E1	-3.26494E1	-3.26224E1	2.6786E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16393E-1	-7.98249E-1	-9.13131E0	-9.14166E0	4.62532E-3	9.34839E-2	2.72983E1	-3.26505E1	-3.26522E1	2.67914E1	1.198E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16321E-1	-7.98154E-1	-9.13112E0	-9.1419E0	4.72069E-3	9.35078E-2	2.74126E1	-3.26332E1	-3.25852E1	2.6828E1	1.20127E-7	2.51679E-3	2.51679E-3	6.33341E-3	3.0223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16298E-1	-7.98154E-1	-9.13119E0	-9.14168E0	4.79221E-3	9.38654E-2	2.72255E1	-3.26652E1	-3.26272E1	2.67776E1	1.20226E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.16107E-1	-7.98535E-1	-9.13117E0	-9.14183E0	4.88758E-3	9.34601E-2	2.74095E1	-3.26644E1	-3.26602E1	2.681E1	1.20137E-7	2.51248E-3	2.51248E-3	6.32978E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16107E-1	-7.98488E-1	-9.13124E0	-9.14197E0	5.17368E-3	9.35555E-2	2.72532E1	-3.26585E1	-3.26048E1	2.67902E1	1.19953E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16178E-1	-7.98655E-1	-9.13124E0	-9.14197E0	4.69685E-3	9.3627E-2	2.73039E1	-3.26747E1	-3.26506E1	2.68184E1	1.19697E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16107E-1	-7.98368E-1	-9.13146E0	-9.14204E0	4.88758E-3	9.37939E-2	2.73135E1	-3.26687E1	-3.26074E1	2.6813E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.15988E-1	-7.98321E-1	-9.13122E0	-9.14197E0	4.8399E-3	9.36985E-2	2.71688E1	-3.26962E1	-3.26266E1	2.68208E1	1.20174E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16178E-1	-7.98321E-1	-9.13126E0	-9.14192E0	4.74453E-3	9.35555E-2	2.73586E1	-3.26585E1	-3.26194E1	2.67856E1	1.198E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.15988E-1	-7.98273E-1	-9.13126E0	-9.1419E0	4.673E-3	9.37462E-2	2.7216E1	-3.2662E1	-3.26419E1	2.67986E1	1.19757E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.15964E-1	-7.98011E-1	-9.13165E0	-9.14199E0	4.79221E-3	9.40084E-2	2.72862E1	-3.26602E1	-3.26354E1	2.67896E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0148E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.15916E-1	-7.98225E-1	-9.13138E0	-9.14202E0	4.76837E-3	9.36508E-2	2.74962E1	-3.26771E1	-3.26212E1	2.6819E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.15964E-1	-7.98559E-1	-9.13126E0	-9.14202E0	5.03063E-3	9.37223E-2	2.72927E1	-3.26767E1	-3.26142E1	2.68123E1	1.19705E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16011E-1	-7.98869E-1	-9.13122E0	-9.14192E0	5.00679E-3	9.37462E-2	2.71591E1	-3.26639E1	-3.26122E1	2.68082E1	1.19851E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16298E-1	-7.98249E-1	-9.13105E0	-9.14216E0	5.14984E-3	9.34601E-2	2.73476E1	-3.26378E1	-3.26531E1	2.67848E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00563E-1
