[Scan]
initial_time=2016-01-28T21:28:20
final_time=2016-01-28T21:28:39
ip_count=19
run=1026
dataset=8
scan=608
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.39469E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.0324E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=2.66194E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-2.87116E-10
mult1=-9.30517E-9
mult2=-2.7283E-9
rf_tmon=-5.25628E-3
rf_agc=3.23873E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.73917E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.98333E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05203E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5347E1
cs_ef1b_imon=3.18721E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04713E2
lens23_imon=1.0239E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04587E1
cs_ea1_imon=1.08503E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45102E0
lens1_imon=2.745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.644E1
os_ef1alow_imon=2.96688E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.39225E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=3.04681E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.12783E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11361E1
os_restr1_imon=4.31354E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15335E1
os_ea1_imon=2.48061E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63774E1
os_ef1bup_imon=3.0972E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22319E0
cs_ionrep_imon=9.44511E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01549E1
cs_anode1_imon=1.96462E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.09807E-8
tplens_vset=1.4E-1
tplens_vmon=1.65795E0
tplens_imon=-1.28996E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2624E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26632E1
iondef2_imon=1.57559E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=3.95045E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23794E0
ionrepsh_imon=8.55671E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75196E1
cs_ef2b_imon=3.14516E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41432E0
os_ea2_imon=-4.22766E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71009E1
cs_ef2a_imon=3.19486E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05688E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93176E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1088E1
os_restr2_imon=3.3714E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01693E1
cs_anode2_imon=2.09564E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73253E1
iondef1_imon=1.08078E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68005E1
iondef4_imon=1.09407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.74857E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82904E-1
olens1_imon=7.08571E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1174E0
cs_ionaccel_imon=-8.61283E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=2.22319E-1
window_imon=-1.0837E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86877E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92592E3
multa_neg_imon=8.60627E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93683E3
defgrida_imon=6.26318E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.48073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33195E1
os_fil1_imon=9.40735E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07845E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59965E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31826E1
cs_fil1_imon=7.08469E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40732E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61454E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05368E-2
os_fil2_imon=-2.45488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.173E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.67046E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.29849E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38528E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.66736E-1
res40_imon=-2.32089E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16274E-1	-7.98607E-1	-9.13167E0	-9.14195E0	4.8399E-3	9.39131E-2	2.72264E1	-3.26753E1	-3.25834E1	2.67944E1	1.20192E-7	2.51919E-3	2.51919E-3	6.3074E-3	2.99845E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.1625E-1	-7.98345E-1	-9.13131E0	-9.1419E0	4.74453E-3	9.38892E-2	2.72865E1	-3.265E1	-3.26224E1	2.67674E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16083E-1	-7.98655E-1	-9.13148E0	-9.14161E0	4.88758E-3	9.38177E-2	2.74962E1	-3.26732E1	-3.26213E1	2.68064E1	1.19713E-7	2.51581E-3	2.51581E-3	6.33538E-3	2.98554E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16131E-1	-7.98512E-1	-9.13157E0	-9.14152E0	4.79221E-3	9.37223E-2	2.74633E1	-3.26419E1	-3.26289E1	2.68065E1	1.20042E-7	2.51919E-3	2.51919E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16131E-1	-7.97987E-1	-9.13115E0	-9.14168E0	4.98295E-3	9.38654E-2	2.72751E1	-3.26728E1	-3.26179E1	2.68026E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16298E-1	-7.98535E-1	-9.13122E0	-9.14218E0	4.88758E-3	9.38177E-2	2.72528E1	-3.26639E1	-3.26074E1	2.68058E1	1.20154E-7	2.52179E-3	2.52179E-3	6.28468E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16274E-1	-7.98559E-1	-9.13143E0	-9.14197E0	4.95911E-3	9.36985E-2	2.73916E1	-3.26699E1	-3.26338E1	2.68094E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16226E-1	-7.98297E-1	-9.13155E0	-9.14204E0	4.76837E-3	9.36985E-2	2.72527E1	-3.26448E1	-3.26311E1	2.68328E1	1.19809E-7	2.51116E-3	2.51116E-3	6.28552E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16655E-1	-7.98488E-1	-9.13134E0	-9.14202E0	4.88758E-3	9.36985E-2	2.73623E1	-3.26726E1	-3.26101E1	2.67878E1	1.19732E-7	2.51162E-3	2.51162E-3	6.323E-3	3.01485E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16488E-1	-7.98297E-1	-9.13141E0	-9.14209E0	5.17368E-3	9.35793E-2	2.73565E1	-3.26872E1	-3.27093E1	2.68313E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01609E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16393E-1	-7.98368E-1	-9.13129E0	-9.14202E0	4.81606E-3	9.32932E-2	2.71559E1	-3.26472E1	-3.26018E1	2.67984E1	1.19809E-7	2.50898E-3	2.50898E-3	6.31837E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16369E-1	-7.98416E-1	-9.13124E0	-9.14183E0	4.8399E-3	9.34601E-2	2.71789E1	-3.26461E1	-3.26467E1	2.6807E1	1.20226E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16417E-1	-7.98631E-1	-9.13124E0	-9.14209E0	4.72069E-3	9.37939E-2	2.71994E1	-3.2641E1	-3.26344E1	2.6819E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.97901E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16345E-1	-7.9875E-1	-9.13103E0	-9.1418E0	4.48227E-3	9.38892E-2	2.71147E1	-3.26634E1	-3.26278E1	2.67782E1	1.19653E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16274E-1	-7.98726E-1	-9.13091E0	-9.14154E0	4.62532E-3	9.36508E-2	2.7121E1	-3.2629E1	-3.26054E1	2.67932E1	1.19653E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.01085E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.16441E-1	-7.98488E-1	-9.13122E0	-9.14171E0	4.91142E-3	9.37939E-2	2.73198E1	-3.2675E1	-3.26278E1	2.67804E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16441E-1	-7.98512E-1	-9.13122E0	-9.1418E0	4.86374E-3	9.39131E-2	2.74181E1	-3.26747E1	-3.26272E1	2.68076E1	1.20209E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16059E-1	-7.98512E-1	-9.13138E0	-9.14159E0	5.00679E-3	9.40084E-2	2.73794E1	-3.26608E1	-3.2603E1	2.68016E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16321E-1	-7.98416E-1	-9.13162E0	-9.14159E0	4.79221E-3	9.39369E-2	2.75172E1	-3.26506E1	-3.26356E1	2.68215E1	1.19809E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16226E-1	-7.9844E-1	-9.13131E0	-9.14218E0	4.98295E-3	9.41277E-2	2.73253E1	-3.26632E1	-3.2624E1	2.68005E1	1.19953E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.00453E-1
