[Scan]
initial_time=2016-01-28T21:29:13
final_time=2016-01-28T21:29:32
ip_count=19
run=1026
dataset=8
scan=610
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.15845E-1
ql1_imon=1.39266E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=2.02128E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=2.81584E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-2.55358E-10
mult1=-1.04451E-8
mult2=-2.95451E-9
rf_tmon=-3.51254E-3
rf_agc=3.33976E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.72859E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68059E0
bslens_imon=2.70054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19792E1
lens5a_imon=1.99986E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.05066E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53591E1
cs_ef1b_imon=3.17529E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04535E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04834E1
cs_ea1_imon=1.10473E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42663E0
lens1_imon=2.64249E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64541E1
os_ef1alow_imon=2.99745E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03548E1
cs_ea2_imon=1.37522E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8445E1
cs_ef1a_imon=3.03067E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.12365E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.30841E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15277E1
os_ea1_imon=2.50088E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63893E1
os_ef1bup_imon=3.07194E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27828E0
cs_ionrep_imon=9.54123E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93447E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0181E1
cs_anode1_imon=1.97539E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.09281E-8
tplens_vset=1.4E-1
tplens_vmon=1.61639E0
tplens_imon=-1.17011E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.51729E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26354E1
iondef2_imon=1.56715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.98186E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2891E0
ionrepsh_imon=8.63278E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.19385E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74457E1
cs_ef2b_imon=3.13234E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42514E0
os_ea2_imon=-7.93225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.0049E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71073E1
cs_ef2a_imon=3.22294E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04953E0
os_ef2alow_imon=-2.62336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71326E-1
os_ef2bup_imon=-5.11308E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1067E1
os_restr2_imon=3.37561E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23105E2
cs_ionfoca_imon=6.29997E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.10256E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.09141E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.0795E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.76609E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.09308E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13294E0
cs_ionaccel_imon=-8.24852E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.4729E-4
einzel_vset=-2.1E1
einzel_vmon=-2.564E1
einzel_imon=7.93614E-6
window_vset=0.0E0
window_vmon=2.53797E-1
window_imon=-1.03624E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39218E-4
mask2_vset=0.0E0
mask2_vmon=-1.86948E1
mask2_imon=-6.36949E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.53649E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.59048E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.07885E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39602E0
defgridb_imon=5.96208E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.42314E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08308E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59881E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31745E1
cs_fil1_imon=6.90753E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.22733E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61376E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05324E-2
os_fil2_imon=-2.27512E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45956E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27844E-1
cs_fil2_imon=-2.47086E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3711E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2163E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.2033E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.95373E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.15916E-1	-7.98512E-1	-9.13115E0	-9.14149E0	4.64916E-3	9.38892E-2	2.71765E1	-3.26661E1	-3.25853E1	2.68024E1	1.19831E-7	2.51575E-3	2.51575E-3	6.323E-3	3.00741E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.15845E-1	-7.98416E-1	-9.13103E0	-9.14161E0	4.62532E-3	9.37223E-2	2.7351E1	-3.26376E1	-3.26223E1	2.68176E1	1.19902E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.15725E-1	-7.98273E-1	-9.13134E0	-9.14202E0	4.55379E-3	9.39369E-2	2.71811E1	-3.26839E1	-3.26173E1	2.68146E1	1.20137E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.99879E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.15773E-1	-7.98464E-1	-9.13134E0	-9.1419E0	4.48227E-3	9.38177E-2	2.73586E1	-3.26675E1	-3.26206E1	2.67956E1	1.20142E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.15773E-1	-7.98202E-1	-9.13117E0	-9.14178E0	4.52995E-3	9.37462E-2	2.72847E1	-3.26663E1	-3.2599E1	2.6789E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.03449E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.15749E-1	-7.98321E-1	-9.13124E0	-9.14185E0	4.673E-3	9.377E-2	2.72933E1	-3.26679E1	-3.26113E1	2.6783E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9952E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.15558E-1	-7.98321E-1	-9.13105E0	-9.14183E0	4.48227E-3	9.36508E-2	2.74579E1	-3.26762E1	-3.26048E1	2.67885E1	1.19851E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.97901E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.15868E-1	-7.98321E-1	-9.13124E0	-9.14161E0	4.45843E-3	9.40323E-2	2.7412E1	-3.26476E1	-3.26146E1	2.67974E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98222E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.15845E-1	-7.98512E-1	-9.13122E0	-9.14221E0	5.00679E-3	9.37939E-2	2.74626E1	-3.26767E1	-3.26626E1	2.681E1	1.20055E-7	2.52815E-3	2.52815E-3	6.30202E-3	2.98665E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16107E-1	-7.98392E-1	-9.13124E0	-9.14226E0	4.93526E-3	9.3627E-2	2.74757E1	-3.26476E1	-3.26194E1	2.6807E1	1.20158E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.01738E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16011E-1	-7.98106E-1	-9.13119E0	-9.14195E0	4.76837E-3	9.377E-2	2.73964E1	-3.26386E1	-3.26254E1	2.68051E1	1.19757E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.16131E-1	-7.98297E-1	-9.13103E0	-9.14197E0	4.76837E-3	9.36747E-2	2.71933E1	-3.26729E1	-3.26086E1	2.6804E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16083E-1	-7.98583E-1	-9.1311E0	-9.14197E0	4.55379E-3	9.36031E-2	2.72184E1	-3.26443E1	-3.2636E1	2.68088E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16083E-1	-7.98821E-1	-9.13134E0	-9.14176E0	4.76837E-3	9.37939E-2	2.74235E1	-3.26693E1	-3.26092E1	2.68214E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16059E-1	-7.98512E-1	-9.13126E0	-9.14178E0	4.79221E-3	9.40084E-2	2.72426E1	-3.26366E1	-3.2626E1	2.68094E1	1.20158E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16202E-1	-7.98416E-1	-9.13122E0	-9.14173E0	4.55379E-3	9.39369E-2	2.71248E1	-3.26663E1	-3.26128E1	2.68232E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01609E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16011E-1	-7.98464E-1	-9.13115E0	-9.14149E0	4.55379E-3	9.37462E-2	2.7263E1	-3.26651E1	-3.25846E1	2.68208E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16393E-1	-7.9844E-1	-9.13112E0	-9.14178E0	4.8399E-3	9.36031E-2	2.73488E1	-3.26543E1	-3.26467E1	2.68117E1	1.20226E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.15916E-1	-7.98321E-1	-9.13131E0	-9.14195E0	4.86374E-3	9.35793E-2	2.74523E1	-3.26476E1	-3.26338E1	2.68232E1	1.20092E-7	2.51287E-3	2.51287E-3	6.30212E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.15845E-1	-7.98202E-1	-9.13138E0	-9.14173E0	4.72069E-3	9.34839E-2	2.73405E1	-3.26354E1	-3.2616E1	2.67974E1	1.2033E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9874E-1
