[Scan]
initial_time=2016-01-28T21:30:06
final_time=2016-01-28T21:30:26
ip_count=19
run=1026
dataset=8
scan=612
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-8.15868E-1
ql1_imon=1.39521E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.07388E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.28732E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-2.91693E-10
mult1=-1.08924E-8
mult2=-2.83745E-9
rf_tmon=-3.65496E-3
rf_agc=3.45312E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.69406E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6427E0
bslens_imon=2.71439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20235E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12412E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.17876E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04732E2
lens23_imon=1.02431E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04916E1
cs_ea1_imon=1.09806E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39058E0
lens1_imon=2.44402E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.40556E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.03892E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.12509E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15768E1
os_ea1_imon=2.47911E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63851E1
os_ef1bup_imon=3.09983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25931E0
cs_ionrep_imon=9.47008E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91838E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=1.97143E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.08878E-8
tplens_vset=1.4E-1
tplens_vmon=1.66186E0
tplens_imon=3.59147E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26214E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26724E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.99477E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29536E0
ionrepsh_imon=8.63012E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75114E1
cs_ef2b_imon=3.14272E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43715E0
os_ea2_imon=-6.56236E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.37517E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.31767E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.09576E-5
iondef1_vset=2.763E1
iondef1_vmon=2.714E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6803E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.72352E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.07652E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-8.03104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-9.29243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.3929E-4
mask2_vset=0.0E0
mask2_vmon=-1.86903E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.70365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.56666E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33172E1
os_fil1_imon=9.4081E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07774E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60071E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31765E1
cs_fil1_imon=6.39801E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.13101E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61477E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62258E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-1.98722E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68882E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21701E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01338E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.15773E-1	-7.98225E-1	-9.13157E0	-9.14216E0	4.79221E-3	9.38177E-2	2.72249E1	-3.26773E1	-3.2626E1	2.68088E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00041E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.15892E-1	-7.98464E-1	-9.13162E0	-9.14192E0	4.93526E-3	9.36985E-2	2.71606E1	-3.2667E1	-3.2626E1	2.6807E1	1.198E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.98156E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16059E-1	-7.98297E-1	-9.13141E0	-9.14209E0	5.03063E-3	9.36508E-2	2.71191E1	-3.26503E1	-3.26312E1	2.68004E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99348E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16035E-1	-7.98488E-1	-9.13117E0	-9.14207E0	4.86374E-3	9.39131E-2	2.73261E1	-3.2632E1	-3.26518E1	2.67956E1	1.19841E-7	2.51709E-3	2.51709E-3	6.30212E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.15916E-1	-7.98583E-1	-9.13138E0	-9.14218E0	4.81606E-3	9.38892E-2	2.72931E1	-3.26777E1	-3.2641E1	2.68124E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16083E-1	-7.98392E-1	-9.1315E0	-9.14211E0	4.88758E-3	9.36985E-2	2.71531E1	-3.26627E1	-3.26098E1	2.68082E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.15916E-1	-7.98535E-1	-9.13138E0	-9.14159E0	4.74453E-3	9.38416E-2	2.7367E1	-3.26478E1	-3.26272E1	2.67986E1	1.19985E-7	2.51538E-3	2.51538E-3	6.31555E-3	3.01155E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.15892E-1	-7.98464E-1	-9.13146E0	-9.14183E0	4.88758E-3	9.38892E-2	2.74962E1	-3.26554E1	-3.26368E1	2.68328E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16011E-1	-7.98225E-1	-9.13138E0	-9.14195E0	4.98295E-3	9.36985E-2	2.74433E1	-3.27041E1	-3.26122E1	2.68136E1	1.19925E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.98026E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.15868E-1	-7.98225E-1	-9.13138E0	-9.14207E0	4.81606E-3	9.39369E-2	2.75208E1	-3.26669E1	-3.26308E1	2.68106E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.15964E-1	-7.98011E-1	-9.13103E0	-9.14197E0	5.126E-3	9.37939E-2	2.74992E1	-3.26753E1	-3.2611E1	2.67884E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16083E-1	-7.98345E-1	-9.131E0	-9.14187E0	4.8399E-3	9.36985E-2	2.72727E1	-3.26554E1	-3.26458E1	2.68058E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.15749E-1	-7.98559E-1	-9.13134E0	-9.14209E0	4.91142E-3	9.39846E-2	2.73293E1	-3.26514E1	-3.26284E1	2.67986E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.15487E-1	-7.98512E-1	-9.13112E0	-9.14202E0	4.69685E-3	9.32693E-2	2.74273E1	-3.26631E1	-3.26283E1	2.67995E1	1.20004E-7	2.52492E-3	2.52492E-3	6.33436E-3	3.01995E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.15678E-1	-7.98655E-1	-9.13138E0	-9.14176E0	4.98295E-3	9.34124E-2	2.71909E1	-3.26693E1	-3.26314E1	2.6813E1	1.20217E-7	2.52189E-3	2.52189E-3	6.34007E-3	2.98445E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.15749E-1	-7.98535E-1	-9.13124E0	-9.14178E0	5.17368E-3	9.35555E-2	2.71974E1	-3.26413E1	-3.26432E1	2.67992E1					
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.15868E-1	-7.98535E-1	-9.131E0	-9.14187E0	4.95911E-3	9.36508E-2	2.73098E1	-3.26514E1	-3.26242E1	2.6792E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00563E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.15868E-1	-7.98607E-1	-9.13122E0	-9.14166E0	4.91142E-3	9.35793E-2	2.74077E1	-3.26531E1	-3.26136E1	2.67949E1	1.20466E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16059E-1	-7.9844E-1	-9.13112E0	-9.14187E0	5.26905E-3	9.3627E-2	2.73135E1	-3.27065E1	-3.2629E1	2.68112E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.15868E-1	-7.9844E-1	-9.1315E0	-9.14176E0	5.07832E-3	9.34362E-2	2.714E1	-3.26724E1	-3.26214E1	2.6803E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
