[Scan]
initial_time=2016-01-28T21:31:00
final_time=2016-01-28T21:31:19
ip_count=19
run=1026
dataset=8
scan=614
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=1.39034E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.00765E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=2.87104E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-2.64788E-10
mult1=-1.02822E-8
mult2=-2.90624E-9
rf_tmon=-3.60518E-3
rf_agc=3.45052E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.74109E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.72023E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20237E1
lens5a_imon=1.97696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.17299E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=1.11086E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39262E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03578E1
cs_ea2_imon=1.41242E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=3.05118E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.12649E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.30788E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15347E1
os_ea1_imon=2.47814E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22142E0
cs_ionrep_imon=9.5796E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93179E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=1.96746E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.09372E-8
tplens_vset=1.4E-1
tplens_vmon=1.65382E0
tplens_imon=-1.85626E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26002E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98381E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.95702E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24797E0
ionrepsh_imon=8.63458E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43143E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.40687E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06434E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.36977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.3237E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.10513E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73544E1
iondef1_imon=1.07724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.73329E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.08835E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-8.49956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02113E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.82052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.47554E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.01542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.40894E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08549E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31815E1
cs_fil1_imon=6.28388E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.71366E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61654E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70705E-1
res40_imon=-2.26271E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.15725E-1	-7.98249E-1	-9.13138E0	-9.14197E0	4.81606E-3	9.35555E-2	2.73759E1	-3.26549E1	-3.26077E1	2.67872E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00966E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.15988E-1	-7.98249E-1	-9.13155E0	-9.14207E0	4.88758E-3	9.3627E-2	2.72589E1	-3.26697E1	-3.26578E1	2.68256E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.16131E-1	-7.98202E-1	-9.1315E0	-9.14173E0	4.86374E-3	9.36508E-2	2.73914E1	-3.26388E1	-3.26434E1	2.68034E1	1.20154E-7	2.52293E-3	2.52293E-3	6.3131E-3	3.0352E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16059E-1	-7.98297E-1	-9.13141E0	-9.14159E0	4.81606E-3	9.38892E-2	2.73664E1	-3.26691E1	-3.26195E1	2.6796E1	1.20092E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.15988E-1	-7.98464E-1	-9.13115E0	-9.14173E0	4.8399E-3	9.36747E-2	2.71747E1	-3.26395E1	-3.26291E1	2.683E1	1.19851E-7	2.50989E-3	2.50989E-3	6.32896E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.15964E-1	-7.98726E-1	-9.13131E0	-9.1423E0	4.95911E-3	9.3627E-2	2.74119E1	-3.26638E1	-3.26543E1	2.68186E1	1.19766E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.99879E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16107E-1	-7.98607E-1	-9.13148E0	-9.14195E0	4.79221E-3	9.36031E-2	2.72101E1	-3.26762E1	-3.26354E1	2.67938E1	1.20055E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16083E-1	-7.98559E-1	-9.13129E0	-9.14164E0	4.8399E-3	9.36747E-2	2.72582E1	-3.26747E1	-3.25828E1	2.68028E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.02769E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16035E-1	-7.98392E-1	-9.13148E0	-9.14214E0	4.64916E-3	9.3627E-2	2.73429E1	-3.26248E1	-3.26356E1	2.68204E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16083E-1	-7.98416E-1	-9.13107E0	-9.14207E0	4.8399E-3	9.37223E-2	2.74526E1	-3.26278E1	-3.26378E1	2.67944E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1594E-1	-7.98368E-1	-9.13146E0	-9.14207E0	4.98295E-3	9.34362E-2	2.71735E1	-3.2659E1	-3.26195E1	2.68262E1	1.20414E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.15988E-1	-7.98535E-1	-9.13134E0	-9.14202E0	4.93526E-3	9.36985E-2	2.73169E1	-3.26549E1	-3.26301E1	2.68111E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00582E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.15916E-1	-7.98368E-1	-9.13103E0	-9.14221E0	4.8399E-3	9.36747E-2	2.74871E1	-3.26554E1	-3.26266E1	2.67974E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.15988E-1	-7.98297E-1	-9.13091E0	-9.14209E0	4.88758E-3	9.33409E-2	2.7248E1	-3.26807E1	-3.25852E1	2.68238E1	1.19965E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.15845E-1	-7.98416E-1	-9.13074E0	-9.14235E0	5.03063E-3	9.34124E-2	2.74066E1	-3.26729E1	-3.26326E1	2.67932E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16107E-1	-7.98106E-1	-9.1311E0	-9.14214E0	4.93526E-3	9.35078E-2	2.73671E1	-3.26767E1	-3.26249E1	2.68076E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.98222E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16226E-1	-7.98297E-1	-9.13138E0	-9.14216E0	4.76837E-3	9.35793E-2	2.71773E1	-3.26753E1	-3.2637E1	2.67795E1	1.20127E-7	2.51886E-3	2.51886E-3	6.33863E-3	2.99014E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16035E-1	-7.98321E-1	-9.13098E0	-9.14218E0	4.60148E-3	9.34839E-2	2.73281E1	-3.27074E1	-3.26024E1	2.681E1	1.19963E-7	2.51793E-3	2.51793E-3	6.31925E-3	2.99073E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16107E-1	-7.98297E-1	-9.13122E0	-9.14192E0	4.60148E-3	9.36985E-2	2.72402E1	-3.26909E1	-3.26188E1	2.67764E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.15821E-1	-7.9844E-1	-9.13122E0	-9.14176E0	4.86374E-3	9.35793E-2	2.73544E1	-3.265E1	-3.26002E1	2.68142E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01609E-1
