[Scan]
initial_time=2016-01-28T21:39:00
final_time=2016-01-28T21:39:19
ip_count=19
run=1026
dataset=8
scan=632
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.15678E-1
ql1_imon=1.39256E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.98683E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=3.05367E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=-2.67267E-10
mult1=-9.8065E-9
mult2=-2.73006E-9
rf_tmon=-5.1705E-3
rf_agc=3.35916E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.7982E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6556E0
bslens_imon=2.69899E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12424E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.17948E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02372E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04758E1
cs_ea1_imon=1.08007E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38318E0
lens1_imon=2.86534E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04581E1
cs_ea2_imon=1.40393E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.03856E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.1362E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.30391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15465E1
os_ea1_imon=2.48168E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.10415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21906E0
cs_ionrep_imon=9.53359E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=1.96782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.10873E-8
tplens_vset=1.4E-1
tplens_vmon=1.66621E0
tplens_imon=-1.85626E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26523E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26389E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=4.03928E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=8.58149E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33469E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7485E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46328E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00456E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08219E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.36869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.31521E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73143E1
iondef1_imon=1.08007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.83565E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.15245E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-8.03104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.22749E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86783E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=6.87903E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.8224E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26382E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33173E1
os_fil1_imon=9.41549E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08008E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60153E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31789E1
cs_fil1_imon=7.32903E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77372E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6214E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44646E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21763E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.15845E-1	-7.98488E-1	-9.13181E0	-9.14173E0	4.98295E-3	9.38654E-2	2.73128E1	-3.26649E1	-3.26024E1	2.68175E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.15725E-1	-7.98202E-1	-9.13196E0	-9.1419E0	4.95911E-3	9.37462E-2	2.74949E1	-3.26793E1	-3.26425E1	2.68088E1	1.19941E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.02115E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.15701E-1	-7.98297E-1	-9.1316E0	-9.14204E0	4.95911E-3	9.37939E-2	2.74199E1	-3.2644E1	-3.26404E1	2.6795E1	1.19819E-7	2.52362E-3	2.52362E-3	6.3074E-3	3.02277E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.15535E-1	-7.9844E-1	-9.1316E0	-9.14195E0	4.76837E-3	9.41277E-2	2.71694E1	-3.26732E1	-3.26107E1	2.6804E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.15773E-1	-7.98368E-1	-9.13227E0	-9.1419E0	4.91142E-3	9.39608E-2	2.72671E1	-3.26499E1	-3.26119E1	2.6786E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.15845E-1	-7.98583E-1	-9.13174E0	-9.14192E0	4.72069E-3	9.36508E-2	2.74829E1	-3.26554E1	-3.26296E1	2.6807E1	1.19978E-7	2.5147E-3	2.5147E-3	6.34661E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.15749E-1	-7.98368E-1	-9.13196E0	-9.14171E0	4.673E-3	9.39608E-2	2.74289E1	-3.2644E1	-3.2614E1	2.6813E1	1.198E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.03027E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.15678E-1	-7.98488E-1	-9.13174E0	-9.14199E0	4.81606E-3	9.38416E-2	2.71677E1	-3.26461E1	-3.26284E1	2.68166E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.15582E-1	-7.98178E-1	-9.13191E0	-9.14202E0	4.673E-3	9.35555E-2	2.72943E1	-3.26621E1	-3.26128E1	2.67984E1	1.19965E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.15988E-1	-7.98202E-1	-9.13198E0	-9.14216E0	4.74453E-3	9.3627E-2	2.75094E1	-3.26464E1	-3.25545E1	2.68269E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.15701E-1	-7.98249E-1	-9.13186E0	-9.14197E0	4.64916E-3	9.38654E-2	2.74225E1	-3.26614E1	-3.26142E1	2.67879E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.15773E-1	-7.98368E-1	-9.13169E0	-9.14207E0	5.05447E-3	9.38177E-2	2.72314E1	-3.26502E1	-3.25942E1	2.68059E1	1.20092E-7	2.52131E-3	2.52131E-3	6.31269E-3	2.99343E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.15725E-1	-7.9813E-1	-9.13172E0	-9.14192E0	4.91142E-3	9.38654E-2	2.73808E1	-3.26717E1	-3.26188E1	2.68076E1	1.20122E-7	2.52867E-3	2.52867E-3	6.31288E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.15606E-1	-7.98392E-1	-9.13169E0	-9.14249E0	5.03063E-3	9.36747E-2	2.71591E1	-3.26404E1	-3.26182E1	2.68106E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.98156E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.15749E-1	-7.98249E-1	-9.13174E0	-9.14214E0	4.8399E-3	9.38416E-2	2.74163E1	-3.26573E1	-3.2623E1	2.67926E1	1.20069E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.15916E-1	-7.9813E-1	-9.13188E0	-9.14233E0	4.95911E-3	9.35555E-2	2.75039E1	-3.26585E1	-3.25977E1	2.67908E1	1.20191E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.00676E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16083E-1	-7.98082E-1	-9.13177E0	-9.14223E0	4.95911E-3	9.36747E-2	2.75122E1	-3.26537E1	-3.26413E1	2.67978E1	1.198E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.03286E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.15797E-1	-7.97987E-1	-9.13179E0	-9.1423E0	4.93526E-3	9.34362E-2	2.75346E1	-3.26597E1	-3.26206E1	2.68022E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.03545E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.15845E-1	-7.98011E-1	-9.13191E0	-9.14214E0	4.76837E-3	9.36508E-2	2.74738E1	-3.26773E1	-3.26136E1	2.68166E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.15678E-1	-7.98082E-1	-9.13146E0	-9.14226E0	4.79221E-3	9.38654E-2	2.73143E1	-3.26389E1	-3.26523E1	2.68136E1	1.19757E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9978E-1
