[Scan]
initial_time=2016-01-28T21:39:54
final_time=2016-01-28T21:40:13
ip_count=19
run=1026
dataset=8
scan=634
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=1.39077E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.98538E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=2.57182E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-2.67422E-10
mult1=-9.49958E-9
mult2=-2.73059E-9
rf_tmon=-6.08058E-3
rf_agc=3.23182E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.65012E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67388E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.98333E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1244E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.17443E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=1.07653E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3938E0
lens1_imon=2.80517E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03478E1
cs_ea2_imon=1.388E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.03532E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.14032E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.31473E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15046E1
os_ea1_imon=2.46716E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=9.37078E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93275E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=1.97827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.10603E-8
tplens_vset=1.4E-1
tplens_vmon=1.68096E0
tplens_imon=-6.17468E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.99784E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=8.55317E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.20737E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4562E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00541E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.20651E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10501E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.37445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73616E1
iondef1_imon=1.10626E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.78493E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.15304E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86933E1
mask2_imon=-4.28292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.20112E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.75162E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.3073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=6.2561E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.41753E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07978E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60271E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31713E1
cs_fil1_imon=8.19999E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.119E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62255E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.2114E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40343E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.86902E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21838E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.99536E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.15916E-1	-7.98321E-1	-9.13138E0	-9.14211E0	4.8399E-3	9.40561E-2	2.73243E1	-3.26663E1	-3.26254E1	2.68227E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.15821E-1	-7.98416E-1	-9.13134E0	-9.14218E0	4.79221E-3	9.39608E-2	2.71846E1	-3.26758E1	-3.26492E1	2.68076E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.15797E-1	-7.98583E-1	-9.13143E0	-9.14211E0	4.88758E-3	9.38416E-2	2.73981E1	-3.26425E1	-3.26248E1	2.67939E1	1.1979E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.00348E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.15797E-1	-7.98392E-1	-9.13129E0	-9.14192E0	4.48227E-3	9.40323E-2	2.72745E1	-3.26493E1	-3.26107E1	2.68052E1	1.19883E-7	2.51725E-3	2.51725E-3	6.3074E-3	3.01881E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.1594E-1	-7.98368E-1	-9.13122E0	-9.14168E0	4.76837E-3	9.36031E-2	2.71724E1	-3.26384E1	-3.26413E1	2.68184E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.15797E-1	-7.98225E-1	-9.13126E0	-9.14183E0	4.60148E-3	9.36747E-2	2.73729E1	-3.26325E1	-3.26296E1	2.6789E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.15773E-1	-7.98082E-1	-9.13138E0	-9.14195E0	4.36306E-3	9.37462E-2	2.71429E1	-3.26456E1	-3.26407E1	2.67914E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.15821E-1	-7.98035E-1	-9.13129E0	-9.14195E0	4.74453E-3	9.37223E-2	2.74272E1	-3.26638E1	-3.26195E1	2.68279E1	1.20174E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.9874E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.15916E-1	-7.98059E-1	-9.13146E0	-9.14216E0	4.8399E-3	9.36508E-2	2.73358E1	-3.26626E1	-3.26579E1	2.68232E1	1.20106E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16059E-1	-7.98202E-1	-9.13138E0	-9.14185E0	4.76837E-3	9.38177E-2	2.73321E1	-3.26603E1	-3.26849E1	2.67884E1	1.19913E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.1594E-1	-7.97868E-1	-9.13115E0	-9.14197E0	4.673E-3	9.36031E-2	2.72606E1	-3.26488E1	-3.25936E1	2.68274E1	1.19856E-7	2.51484E-3	2.51484E-3	6.31827E-3	3.00249E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.1594E-1	-7.98082E-1	-9.13148E0	-9.14178E0	4.62532E-3	9.34601E-2	2.71915E1	-3.26681E1	-3.2608E1	2.68064E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.15821E-1	-7.97987E-1	-9.13122E0	-9.1423E0	4.31538E-3	9.35793E-2	2.72502E1	-3.26496E1	-3.26443E1	2.67914E1	1.20122E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.15868E-1	-7.97868E-1	-9.13131E0	-9.14211E0	4.3869E-3	9.37223E-2	2.74555E1	-3.2652E1	-3.26024E1	2.67986E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16035E-1	-7.98225E-1	-9.13141E0	-9.14187E0	4.33922E-3	9.38654E-2	2.72799E1	-3.26873E1	-3.26014E1	2.68394E1	1.19749E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0148E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.16011E-1	-7.98106E-1	-9.13134E0	-9.1419E0	4.43459E-3	9.37939E-2	2.72877E1	-3.25671E1	-3.25864E1	2.6813E1	1.19913E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.02133E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.15773E-1	-7.98416E-1	-9.13124E0	-9.1419E0	4.72069E-3	9.35555E-2	2.71543E1	-3.26687E1	-3.26338E1	2.68136E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.15725E-1	-7.98392E-1	-9.13141E0	-9.14209E0	4.57764E-3	9.38892E-2	2.74201E1	-3.26296E1	-3.26461E1	2.68178E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.15701E-1	-7.98392E-1	-9.13136E0	-9.14202E0	4.69685E-3	9.36747E-2	2.75104E1	-3.27003E1	-3.26248E1	2.68157E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3514E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-8.1594E-1	-7.98035E-1	-9.13141E0	-9.14199E0	4.8399E-3	9.37462E-2	2.73616E1	-3.2647E1	-3.26074E1	2.68076E1	1.20092E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.00852E-1
