[Scan]
initial_time=2016-01-28T21:40:20
final_time=2016-01-28T21:40:40
ip_count=19
run=1026
dataset=8
scan=635
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=1.39162E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=2.00671E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=2.67291E-10
ql4_vset=
ql4_vmon=-9.14245E0
ql4_imon=-2.32434E-10
mult1=-9.89692E-9
mult2=-2.75853E-9
rf_tmon=-3.22065E-3
rf_agc=3.41567E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.77219E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63731E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19771E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05252E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53696E1
cs_ef1b_imon=3.18826E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05047E1
cs_ea1_imon=1.09706E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39675E0
lens1_imon=2.80871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64388E1
os_ef1alow_imon=2.97418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03543E1
cs_ea2_imon=1.37986E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84377E1
cs_ef1a_imon=3.035E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.14197E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1121E1
os_restr1_imon=4.32084E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15016E1
os_ea1_imon=2.46398E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26744E0
cs_ionrep_imon=9.58668E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01682E1
cs_anode1_imon=1.96531E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.11554E-8
tplens_vset=1.4E-1
tplens_vmon=1.62669E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26927E1
iondef3_imon=1.52427E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.56178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98495E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.97991E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30873E0
ionrepsh_imon=8.42576E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33386E1
lens5b_imon=2.20348E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74762E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4621E0
os_ea2_imon=-1.01385E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.19799E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05224E0
os_ef2alow_imon=-2.55373E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88543E-1
os_ef2bup_imon=-5.1984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.37244E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29291E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72348E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.10415E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.85626E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.16661E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-8.02203E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=2.20582E-1
window_imon=-9.89867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.86975E1
mask2_imon=-7.01421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.40287E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.96044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.42003E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0785E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60308E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31747E1
cs_fil1_imon=7.67548E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.22197E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6244E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95238E-2
os_fil2_imon=-2.51859E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18458E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.43254E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.40854E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5127E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21805E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36241E-1
res40_imon=-2.40777E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.15797E-1	-7.98082E-1	-9.13162E0	-9.14176E0	4.76837E-3	9.36985E-2	2.74138E1	-3.26518E1	-3.26296E1	2.67782E1	1.19493E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.02253E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.15678E-1	-7.98106E-1	-9.13165E0	-9.14204E0	4.88758E-3	9.36031E-2	2.74451E1	-3.26663E1	-3.26368E1	2.68046E1	1.19757E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.1594E-1	-7.97939E-1	-9.13136E0	-9.14192E0	4.673E-3	9.36985E-2	2.74159E1	-3.26394E1	-3.26238E1	2.68149E1	1.20122E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.15701E-1	-7.98249E-1	-9.13155E0	-9.14207E0	4.62532E-3	9.39131E-2	2.73428E1	-3.26626E1	-3.26408E1	2.67944E1	1.20064E-7	2.51854E-3	2.51854E-3	6.31251E-3	2.99421E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.15678E-1	-7.97987E-1	-9.13155E0	-9.14183E0	4.69685E-3	9.38892E-2	2.72006E1	-3.26579E1	-3.26062E1	2.68262E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.15511E-1	-7.97963E-1	-9.13181E0	-9.14235E0	5.00679E-3	9.37939E-2	2.72467E1	-3.26815E1	-3.26549E1	2.67896E1	1.19819E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01742E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.15248E-1	-7.98178E-1	-9.13167E0	-9.14214E0	5.14984E-3	9.40084E-2	2.73562E1	-3.26506E1	-3.26176E1	2.68233E1	1.19749E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.15392E-1	-7.98368E-1	-9.13129E0	-9.14207E0	5.126E-3	9.38892E-2	2.71765E1	-3.26152E1	-3.26458E1	2.67968E1	1.19749E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9841E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.1563E-1	-7.98273E-1	-9.13129E0	-9.14214E0	5.05447E-3	9.41515E-2	2.74054E1	-3.26795E1	-3.25864E1	2.68151E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.97704E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.15701E-1	-7.98321E-1	-9.13153E0	-9.14211E0	4.88758E-3	9.39369E-2	2.74331E1	-3.27143E1	-3.26008E1	2.68354E1	1.19766E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.9829E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.15678E-1	-7.98416E-1	-9.13165E0	-9.14214E0	4.76837E-3	9.41992E-2	2.71531E1	-3.26615E1	-3.26609E1	2.67818E1	1.20106E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.15749E-1	-7.98321E-1	-9.13131E0	-9.14218E0	4.81606E-3	9.41992E-2	2.72207E1	-3.26927E1	-3.26372E1	2.6777E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.15582E-1	-7.98321E-1	-9.13136E0	-9.14197E0	4.72069E-3	9.40084E-2	2.7383E1	-3.26809E1	-3.26195E1	2.68036E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.1563E-1	-7.9844E-1	-9.13126E0	-9.14228E0	4.64916E-3	9.35793E-2	2.72769E1	-3.26152E1	-3.26308E1	2.68256E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.15606E-1	-7.98345E-1	-9.13115E0	-9.14214E0	4.74453E-3	9.35078E-2	2.72114E1	-3.26609E1	-3.26374E1	2.68022E1	1.19965E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.15511E-1	-7.98488E-1	-9.13136E0	-9.14223E0	5.03063E-3	9.377E-2	2.72831E1	-3.27604E1	-3.26411E1	2.6814E1	1.19861E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.02133E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.15296E-1	-7.98893E-1	-9.13136E0	-9.14216E0	4.95911E-3	9.39369E-2	2.73553E1	-3.26927E1	-3.25862E1	2.68069E1	1.19841E-7	2.51919E-3	2.51919E-3	6.30212E-3	3.01862E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.15153E-1	-7.98631E-1	-9.13162E0	-9.14211E0	4.72069E-3	9.39131E-2	2.72514E1	-3.26667E1	-3.26632E1	2.6825E1	1.19925E-7	2.52139E-3	2.52139E-3	6.33538E-3	2.99348E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.15582E-1	-7.98321E-1	-9.13153E0	-9.1423E0	4.69685E-3	9.38892E-2	2.74841E1	-3.26579E1	-3.25894E1	2.67986E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.15797E-1	-7.98321E-1	-9.13148E0	-9.14245E0	4.43459E-3	9.37462E-2	2.72348E1	-3.26639E1	-3.26927E1	2.68016E1	1.20174E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.9926E-1
