[Scan]
initial_time=2016-01-28T21:42:06
final_time=2016-01-28T21:42:26
ip_count=19
run=1026
dataset=8
scan=639
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.15582E-1
ql1_imon=1.38452E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.06809E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=2.22063E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.40958E-10
mult1=-9.43752E-9
mult2=-2.76061E-9
rf_tmon=-4.99909E-3
rf_agc=3.30983E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.72718E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64218E0
bslens_imon=2.60917E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19823E1
lens5a_imon=1.98942E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05221E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.18524E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02341E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04939E1
cs_ea1_imon=1.09285E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42276E0
lens1_imon=2.66427E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03568E1
cs_ea2_imon=1.39991E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.04793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.14584E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14938E1
os_ea1_imon=2.4625E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25332E0
cs_ionrep_imon=9.5768E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93457E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=1.96458E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.12532E-8
tplens_vset=1.4E-1
tplens_vmon=1.63715E0
tplens_imon=-2.99822E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26229E1
iondef3_imon=1.50312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26235E1
iondef2_imon=1.59163E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98309E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.02268E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23679E0
ionrepsh_imon=8.51531E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33725E1
lens5b_imon=2.18482E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.14055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45472E0
os_ea2_imon=-6.37735E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.19822E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0918E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.68592E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.37589E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.31361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01623E1
cs_anode2_imon=2.09829E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72471E1
iondef1_imon=1.1079E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68194E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.85974E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=7.17863E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.3356E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86758E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.63747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.58333E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50165E3
multb_neg_imon=7.09387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38516E0
defgridb_imon=6.34826E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.40912E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07696E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60573E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31795E1
cs_fil1_imon=7.10679E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.28118E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62796E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02788E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.14607E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41853E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2192E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=3.00989E-1
chamber_ion_pmon=1.20325E-7
chamber_cvt_pmon=2.51783E-3
foreline_cvt_pmon=2.51783E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17556E-1
res40_imon=-2.30596E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=191
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.15749E-1	-7.98583E-1	-9.13155E0	-9.14228E0	4.81606E-3	9.35793E-2	2.71688E1	-3.26467E1	-3.26213E1	2.68022E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.03185E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.15821E-1	-7.98464E-1	-9.13177E0	-9.14214E0	5.10216E-3	9.36985E-2	2.70954E1	-3.26825E1	-3.26086E1	2.6795E1	1.19653E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.15725E-1	-7.98392E-1	-9.13169E0	-9.14197E0	5.19753E-3	9.36031E-2	2.72356E1	-3.26782E1	-3.2597E1	2.67914E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.99E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16226E-1	-7.98321E-1	-9.13215E0	-9.14187E0	4.76837E-3	9.38416E-2	2.71261E1	-3.26609E1	-3.25966E1	2.6768E1	1.1979E-7	2.52025E-3	2.52025E-3	6.2863E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16107E-1	-7.9813E-1	-9.13177E0	-9.14199E0	4.673E-3	9.38177E-2	2.71453E1	-3.26705E1	-3.26368E1	2.6804E1	1.20122E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16274E-1	-7.98011E-1	-9.13172E0	-9.14204E0	4.91142E-3	9.37462E-2	2.72186E1	-3.26597E1	-3.26044E1	2.67986E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16464E-1	-7.98249E-1	-9.13188E0	-9.1419E0	5.07832E-3	9.37462E-2	2.74319E1	-3.26783E1	-3.26464E1	2.68064E1	1.19757E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16059E-1	-7.98464E-1	-9.1316E0	-9.14161E0	4.86374E-3	9.36747E-2	2.7358E1	-3.26573E1	-3.26368E1	2.67938E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16083E-1	-7.98559E-1	-9.13162E0	-9.14192E0	4.79221E-3	9.36985E-2	2.71258E1	-3.26732E1	-3.26154E1	2.67956E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.15821E-1	-7.9844E-1	-9.13143E0	-9.14195E0	4.62532E-3	9.39131E-2	2.71248E1	-3.26831E1	-3.25852E1	2.68036E1	1.19697E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99686E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.15582E-1	-7.98202E-1	-9.13126E0	-9.1419E0	4.74453E-3	9.35555E-2	2.73285E1	-3.26669E1	-3.26218E1	2.68016E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.15725E-1	-7.98082E-1	-9.13126E0	-9.14204E0	4.62532E-3	9.35555E-2	2.73523E1	-3.26555E1	-3.26478E1	2.6834E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.15439E-1	-7.98106E-1	-9.13167E0	-9.14199E0	4.45843E-3	9.377E-2	2.72132E1	-3.26627E1	-3.26374E1	2.68004E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9841E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.15511E-1	-7.98106E-1	-9.13184E0	-9.14176E0	4.81606E-3	9.37939E-2	2.71252E1	-3.26596E1	-3.26124E1	2.67938E1	1.19965E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9874E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.15582E-1	-7.98202E-1	-9.13134E0	-9.14185E0	4.43459E-3	9.38177E-2	2.73718E1	-3.265E1	-3.2629E1	2.67972E1	1.198E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.15463E-1	-7.98082E-1	-9.13134E0	-9.14207E0	4.673E-3	9.36985E-2	2.71933E1	-3.27227E1	-3.25557E1	2.68016E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.15725E-1	-7.9813E-1	-9.13126E0	-9.14214E0	4.48227E-3	9.377E-2	2.72479E1	-3.26826E1	-3.26095E1	2.6828E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.15606E-1	-7.98416E-1	-9.13146E0	-9.14221E0	4.50611E-3	9.38177E-2	2.73616E1	-3.2626E1	-3.26482E1	2.68052E1	1.19749E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09688E0	-8.15606E-1	-7.98178E-1	-9.13136E0	-9.14207E0	4.57764E-3	9.377E-2	2.73694E1	-3.26522E1	-3.26311E1	2.68009E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.15582E-1	-7.98178E-1	-9.13136E0	-9.14204E0	4.3869E-3	9.35078E-2	2.72471E1	-3.26235E1	-3.26229E1	2.68194E1	1.20325E-7	2.51783E-3	2.51783E-3	6.3126E-3	3.00989E-1
