[Scan]
initial_time=2016-01-28T21:43:00
final_time=2016-01-28T21:43:19
ip_count=19
run=1026
dataset=8
scan=641
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.15487E-1
ql1_imon=1.38613E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.00741E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=2.29001E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.49839E-10
mult1=-1.00151E-8
mult2=-2.59583E-9
rf_tmon=-5.16438E-3
rf_agc=3.31508E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.73073E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6727E0
bslens_imon=2.43708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.18056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02401E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05171E1
cs_ea1_imon=1.08538E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39675E0
lens1_imon=2.90428E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03602E1
cs_ea2_imon=1.39154E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=3.03099E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.14401E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.32013E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.47495E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=9.54775E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=1.96386E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.11592E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-4.617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26413E1
iondef3_imon=1.52568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.58514E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.98415E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=8.60627E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34071E1
lens5b_imon=2.19463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74411E1
cs_ef2b_imon=3.14524E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45797E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00665E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.30235E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.36724E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72567E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.8311E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.16667E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0935E0
cs_ionaccel_imon=-7.41837E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.9221E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.3938E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.40995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.57464E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50162E3
multb_neg_imon=6.79763E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38193E0
defgridb_imon=6.34104E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33209E1
os_fil1_imon=9.41699E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0799E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60387E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31717E1
cs_fil1_imon=8.47629E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.85471E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62372E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34774E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21668E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27767E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.15701E-1	-7.98583E-1	-9.13122E0	-9.14171E0	4.88758E-3	9.36508E-2	2.7239E1	-3.26356E1	-3.26753E1	2.6795E1	1.19902E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.01223E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.15797E-1	-7.98321E-1	-9.13143E0	-9.14171E0	4.8399E-3	9.38177E-2	2.7394E1	-3.26338E1	-3.26609E1	2.68376E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02659E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.1594E-1	-7.98726E-1	-9.13153E0	-9.14199E0	4.79221E-3	9.39369E-2	2.75058E1	-3.26567E1	-3.26314E1	2.68034E1	1.19913E-7	2.52757E-3	2.52757E-3	6.3074E-3	3.00041E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.15797E-1	-7.98607E-1	-9.13162E0	-9.1418E0	4.93526E-3	9.37939E-2	2.73808E1	-3.26723E1	-3.25918E1	2.68064E1	1.20226E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.15773E-1	-7.98607E-1	-9.1316E0	-9.14159E0	4.72069E-3	9.39846E-2	2.72231E1	-3.26614E1	-3.26425E1	2.68212E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.15439E-1	-7.98655E-1	-9.132E0	-9.1419E0	5.126E-3	9.377E-2	2.72745E1	-3.26951E1	-3.25695E1	2.67811E1	1.19646E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.15439E-1	-7.98297E-1	-9.13181E0	-9.14187E0	4.62532E-3	9.39608E-2	2.72666E1	-3.26945E1	-3.25984E1	2.6783E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.15272E-1	-7.98368E-1	-9.13172E0	-9.14192E0	4.79221E-3	9.41992E-2	2.72095E1	-3.26266E1	-3.26306E1	2.68052E1	1.20435E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.15296E-1	-7.98512E-1	-9.13188E0	-9.14176E0	4.60148E-3	9.38177E-2	2.72578E1	-3.26425E1	-3.26348E1	2.68255E1	1.19941E-7	2.51287E-3	2.51287E-3	6.31269E-3	2.98842E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.15558E-1	-7.98512E-1	-9.13138E0	-9.14209E0	4.86374E-3	9.40561E-2	2.72316E1	-3.26187E1	-3.26485E1	2.67829E1	1.19908E-7	2.51723E-3	2.51723E-3	6.3074E-3	3.01249E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.15487E-1	-7.98702E-1	-9.13143E0	-9.14168E0	4.81606E-3	9.39608E-2	2.74036E1	-3.26601E1	-3.26294E1	2.67897E1	1.19805E-7	2.51588E-3	2.51588E-3	6.31344E-3	3.02332E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.15368E-1	-7.98178E-1	-9.13138E0	-9.14183E0	5.00679E-3	9.39131E-2	2.7426E1	-3.26769E1	-3.26171E1	2.67712E1	1.20016E-7	2.51244E-3	2.51244E-3	6.29211E-3	3.01365E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.15248E-1	-7.98368E-1	-9.13157E0	-9.14211E0	4.91142E-3	9.39131E-2	2.74667E1	-3.26738E1	-3.26148E1	2.67848E1	1.19785E-7	2.5199E-3	2.5199E-3	6.31902E-3	3.02025E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.15153E-1	-7.98082E-1	-9.13134E0	-9.14197E0	4.91142E-3	9.39608E-2	2.74661E1	-3.26759E1	-3.2626E1	2.68065E1	1.20363E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.02253E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.15248E-1	-7.98011E-1	-9.13131E0	-9.14204E0	4.8399E-3	9.36508E-2	2.72078E1	-3.26644E1	-3.26596E1	2.67908E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.15463E-1	-7.98225E-1	-9.13148E0	-9.14197E0	4.95911E-3	9.35078E-2	2.71212E1	-3.26254E1	-3.26458E1	2.67878E1	1.20363E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.03545E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.15535E-1	-7.98225E-1	-9.1311E0	-9.14202E0	4.45843E-3	9.37223E-2	2.71194E1	-3.26476E1	-3.26338E1	2.68514E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.15487E-1	-7.9844E-1	-9.1315E0	-9.14199E0	4.81606E-3	9.38177E-2	2.71471E1	-3.26777E1	-3.26308E1	2.67601E1	1.19757E-7	2.50789E-3	2.50789E-3	6.32386E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.15511E-1	-7.98512E-1	-9.13115E0	-9.14197E0	5.26905E-3	9.37462E-2	2.71836E1	-3.26785E1	-3.26095E1	2.68028E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.15487E-1	-7.98273E-1	-9.13138E0	-9.14185E0	5.22137E-3	9.36985E-2	2.72567E1	-3.26554E1	-3.26413E1	2.68094E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9892E-1
