[Scan]
initial_time=2016-01-28T21:44:30
final_time=2016-01-28T21:44:49
ip_count=19
run=1026
dataset=9
scan=644
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.82618E-6
ql1_vset=
ql1_vmon=-8.79971E1
ql1_imon=-3.16119E-9
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.61741E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-8.83777E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.70446E-8
mult1=-6.50147E-9
mult2=-2.27548E-9
rf_tmon=-7.94915E-3
rf_agc=2.78661E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=6.42085E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62226E0
bslens_imon=2.65981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19955E1
lens5a_imon=1.99261E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=3.17331E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05133E1
cs_ea1_imon=1.09714E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0493E0
lens1_imon=1.54394E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03789E1
cs_ea2_imon=1.41209E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84533E1
cs_ef1a_imon=3.04473E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.13713E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1117E1
os_restr1_imon=4.31146E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1505E1
os_ea1_imon=2.47198E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.09095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24978E0
cs_ionrep_imon=9.30283E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93531E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01769E1
cs_anode1_imon=1.96358E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.90902E-8
tplens_vset=1.4E-1
tplens_vmon=1.6704E0
tplens_imon=-2.28921E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24968E1
iondef3_imon=1.5042E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.57616E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=9.77659E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28686E0
ionrepsh_imon=8.65626E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33571E1
lens5b_imon=2.18276E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7453E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46704E0
os_ea2_imon=-4.47922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00647E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71385E1
cs_ef2a_imon=3.19521E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09163E0
os_ef2alow_imon=-2.54331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02444E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11065E1
os_restr2_imon=3.36306E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.3111E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.09147E-5
iondef1_vset=2.763E1
iondef1_vmon=2.76049E1
iondef1_imon=1.10305E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.09024E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.81455E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.15132E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12087E0
cs_ionaccel_imon=-7.95253E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56173E1
einzel_imon=7.70522E-6
window_vset=0.0E0
window_vmon=2.2174E-1
window_imon=-8.82134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39223E-4
mask2_vset=0.0E0
mask2_vmon=-1.86888E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.87411E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.86949E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.47783E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4036E0
defgridb_imon=6.33068E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.41853E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07862E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60333E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3174E1
cs_fil1_imon=7.12524E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.48262E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62222E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.11564E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12666E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47301E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28653E-1
cs_fil2_imon=-2.28112E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21705E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.03449E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.53993E-1
res40_imon=-2.42515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=188
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.7997E1	-4.29153E-4	-8.80012E1	1.19209E-4	4.673E-3	9.37462E-2	2.73446E1	-3.26537E1	-3.26236E1	2.67949E1	1.1974E-7	2.52131E-3	2.52131E-3	6.32858E-3	3.02621E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.79971E1	-5.48363E-4	-8.80012E1	1.90735E-4	4.8399E-3	9.38177E-2	2.72843E1	-3.26701E1	-3.26327E1	2.68069E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.79971E1	-5.72205E-4	-8.80012E1	4.52995E-4	4.76837E-3	9.40323E-2	2.72178E1	-3.26903E1	-3.26301E1	2.68192E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9874E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.44059E-2	-8.79971E1	-4.52995E-4	-8.80012E1	5.00679E-4	4.93526E-3	9.36031E-2	2.73364E1	-3.26502E1	-3.26107E1	2.68082E1	1.20158E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.7997E1	-5.96046E-4	-8.80009E1	3.33786E-4	4.74453E-3	9.37462E-2	2.73363E1	-3.26705E1	-3.26302E1	2.68376E1	1.20383E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.79971E1	-3.57628E-4	-8.8001E1	1.19209E-4	4.74453E-3	9.38654E-2	2.73856E1	-3.26446E1	-3.26074E1	2.68178E1	1.19757E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00824E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.45602E-2	-8.79971E1	-6.91414E-4	-8.80013E1	-9.53674E-5	4.76837E-3	9.3627E-2	2.72402E1	-3.26693E1	-3.2608E1	2.68274E1	1.20122E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.46377E-2	-8.79971E1	-2.38419E-4	-8.80014E1	4.05312E-4	4.91142E-3	9.36985E-2	2.72126E1	-3.2626E1	-3.26206E1	2.68112E1	1.19907E-7	2.51593E-3	2.51593E-3	6.31283E-3	2.99991E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.46377E-2	-8.79972E1	-4.05312E-4	-8.80012E1	4.05312E-4	5.22137E-3	9.36985E-2	2.73544E1	-3.26765E1	-3.26248E1	2.68094E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.49466E-2	-8.7997E1	-5.24521E-4	-8.80012E1	0.0E0	4.79221E-3	9.35555E-2	2.71711E1	-3.26308E1	-3.26218E1	2.67902E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.7997E1	-3.33786E-4	-8.80013E1	9.53674E-5	4.69685E-3	9.3627E-2	2.73316E1	-3.26738E1	-3.26154E1	2.68175E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.79972E1	-3.57628E-4	-8.8001E1	2.38419E-4	4.57764E-3	9.36508E-2	2.74284E1	-3.26467E1	-3.26236E1	2.67944E1	1.20278E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.79973E1	-4.76837E-4	-8.80014E1	4.76837E-4	4.72069E-3	9.36508E-2	2.72863E1	-3.26772E1	-3.26186E1	2.68093E1	1.19749E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.79972E1	-5.72205E-4	-8.80013E1	3.33786E-4	5.03063E-3	9.408E-2	2.72326E1	-3.26775E1	-3.26216E1	2.68004E1	1.20177E-7	2.51575E-3	2.51575E-3	6.323E-3	3.02479E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.79971E1	-6.67572E-4	-8.8001E1	3.8147E-4	4.81606E-3	9.377E-2	2.71364E1	-3.26543E1	-3.26048E1	2.67937E1	1.19937E-7	2.52407E-3	2.52407E-3	6.29035E-3	2.99981E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.79972E1	-3.09944E-4	-8.8001E1	6.19888E-4	4.50611E-3	9.39608E-2	2.71507E1	-3.26398E1	-3.26188E1	2.67972E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.47149E-2	-8.79971E1	-4.05312E-4	-8.80013E1	3.57628E-4	4.76837E-3	9.39369E-2	2.72035E1	-3.26621E1	-3.26162E1	2.67813E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.43285E-2	-8.79973E1	-1.43051E-4	-8.80011E1	4.76837E-4	4.74453E-3	9.41038E-2	2.73375E1	-3.26543E1	-3.26272E1	2.68204E1	1.19757E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.79972E1	0.0E0	-8.80011E1	3.8147E-4	4.57764E-3	9.36985E-2	2.75122E1	-3.26826E1	-3.26207E1	2.68082E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.79971E1	-4.76837E-5	-8.80012E1	1.90735E-4	4.62532E-3	9.3627E-2	2.76049E1	-3.265E1	-3.24968E1	2.67986E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.03449E-1
