[Scan]
initial_time=2016-01-28T21:44:57
final_time=2016-01-28T21:45:16
ip_count=19
run=1026
dataset=9
scan=645
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.84413E-6
ql1_vset=
ql1_vmon=-8.79974E1
ql1_imon=-1.767E-9
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.53017E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-5.22064E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.66854E-8
mult1=-5.96669E-9
mult2=-3.05953E-9
rf_tmon=-7.99869E-3
rf_agc=2.82413E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=6.2741E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.73963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.98091E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=3.18416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04543E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=1.08688E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0696E0
lens1_imon=1.4815E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04039E1
cs_ea2_imon=1.41818E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.04469E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.13479E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.4701E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.6323E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.88847E-8
tplens_vset=1.4E-1
tplens_vmon=1.66066E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24577E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27607E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98375E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=9.10997E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=8.63373E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45878E0
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.2029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.36832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7512E1
iondef1_imon=1.0703E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67932E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.8791E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.14627E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-8.49956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.20346E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86903E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.40804E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52187E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.41627E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07305E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60276E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31757E1
cs_fil1_imon=7.40712E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40131E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62205E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49497E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.69483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21813E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.578E-1
res40_imon=-2.25911E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.79972E1	-6.4373E-4	-8.8001E1	0.0E0	5.14984E-3	9.38654E-2	2.7247E1	-3.26545E1	-3.26334E1	2.67949E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37874E-2	-8.79973E1	-3.33786E-4	-8.80013E1	2.86102E-4	5.126E-3	9.39846E-2	2.73906E1	-3.26616E1	-3.26322E1	2.67845E1	1.20092E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.79972E1	-5.00679E-4	-8.80013E1	5.48363E-4	5.03063E-3	9.40561E-2	2.71886E1	-3.26764E1	-3.26167E1	2.6796E1	1.20137E-7	2.5225E-3	2.5225E-3	6.34661E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.79972E1	-5.00679E-4	-8.80013E1	5.72205E-4	4.88758E-3	9.38892E-2	2.74229E1	-3.26879E1	-3.2641E1	2.68052E1	1.20209E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.79971E1	-6.67572E-4	-8.80015E1	5.00679E-4	4.93526E-3	9.41277E-2	2.73327E1	-3.26807E1	-3.26356E1	2.67968E1	1.19902E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.79973E1	-6.4373E-4	-8.80014E1	5.24521E-4	4.88758E-3	9.39369E-2	2.71609E1	-3.26368E1	-3.26446E1	2.68112E1	1.20122E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44831E-2	-8.79974E1	-4.76837E-4	-8.80013E1	3.09944E-4	4.81606E-3	9.408E-2	2.71423E1	-3.26337E1	-3.26207E1	2.68106E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03449E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.79973E1	-5.24521E-4	-8.80015E1	3.8147E-4	4.64916E-3	9.4223E-2	2.70942E1	-3.26693E1	-3.26224E1	2.68146E1	1.19913E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.44059E-2	-8.7997E1	-4.76837E-4	-8.80015E1	5.48363E-4	4.88758E-3	9.39369E-2	2.71927E1	-3.2632E1	-3.262E1	2.68046E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.79972E1	-4.29153E-4	-8.80013E1	5.72205E-4	4.79221E-3	9.408E-2	2.71527E1	-3.26921E1	-3.25642E1	2.68045E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.79973E1	-9.29832E-4	-8.80011E1	2.86102E-4	4.86374E-3	9.39369E-2	2.72786E1	-3.26585E1	-3.26307E1	2.67769E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.99879E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.79975E1	-7.86781E-4	-8.80012E1	6.19888E-4	4.62532E-3	9.36508E-2	2.73556E1	-3.26795E1	-3.26272E1	2.6795E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.79975E1	-9.29832E-4	-8.80014E1	6.67572E-4	4.72069E-3	9.3627E-2	2.72907E1	-3.26657E1	-3.26134E1	2.67789E1	1.198E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.79975E1	-4.05312E-4	-8.80012E1	5.96046E-4	4.95911E-3	9.37939E-2	2.74649E1	-3.26639E1	-3.26332E1	2.67908E1	1.20084E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.03349E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.79972E1	-5.24521E-4	-8.80012E1	7.86781E-4	4.69685E-3	9.37939E-2	2.7248E1	-3.26615E1	-3.26422E1	2.68022E1	1.20414E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.79972E1	-3.57628E-4	-8.80012E1	5.48363E-4	4.79221E-3	9.39608E-2	2.72588E1	-3.26524E1	-3.26152E1	2.68256E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9874E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.79973E1	-7.62939E-4	-8.80012E1	5.72205E-4	4.81606E-3	9.35555E-2	2.73796E1	-3.26723E1	-3.2635E1	2.68064E1	1.19809E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.79972E1	-6.67572E-4	-8.8001E1	2.86102E-4	4.88758E-3	9.36031E-2	2.72207E1	-3.26667E1	-3.26071E1	2.68142E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.79972E1	-5.72205E-4	-8.80011E1	3.57628E-4	4.72069E-3	9.38177E-2	2.74732E1	-3.26862E1	-3.26296E1	2.67955E1	1.19953E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.79974E1	-6.19888E-4	-8.80009E1	2.86102E-4	4.3869E-3	9.38416E-2	2.7512E1	-3.27607E1	-3.24577E1	2.67932E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
