[Scan]
initial_time=2016-01-28T21:45:23
final_time=2016-01-28T21:45:43
ip_count=19
run=1026
dataset=9
scan=646
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.82E-6
ql1_vset=
ql1_vmon=-8.79976E1
ql1_imon=-1.37509E-9
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.49773E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-4.29639E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.6607E-8
mult1=-1.42753E-8
mult2=-3.48562E-9
rf_tmon=5.76661E-3
rf_agc=4.62633E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=5.87702E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6427E0
bslens_imon=2.67114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.99821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.17634E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04678E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=1.08436E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02093E0
lens1_imon=1.43824E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64629E1
os_ef1alow_imon=2.97995E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.40448E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84061E1
cs_ef1a_imon=3.04011E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.13517E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11112E1
os_restr1_imon=4.30828E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=2.47226E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63697E1
os_ef1bup_imon=3.08752E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=9.53136E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01909E1
cs_anode1_imon=1.96159E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.8946E-8
tplens_vset=1.4E-1
tplens_vmon=1.63663E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27369E1
iondef3_imon=1.51226E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27051E1
iondef2_imon=1.58256E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=8.85653E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=8.69141E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74566E1
cs_ef2b_imon=3.13812E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46119E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71116E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0867E0
os_ef2alow_imon=-2.50994E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32415E-1
os_ef2bup_imon=-5.27346E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.36388E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.09251E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73517E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.09609E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.90553E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.12498E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11068E0
cs_ionaccel_imon=-9.2826E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56334E1
einzel_imon=7.7763E-6
window_vset=0.0E0
window_vmon=2.18992E-1
window_imon=-9.03491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39219E-4
mask2_vset=0.0E0
mask2_vmon=-1.8694E1
mask2_imon=-5.53186E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.31432E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.97185E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.33594E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.40958E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08361E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6027E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31747E1
cs_fil1_imon=7.99489E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.36309E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62087E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.36684E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20365E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44083E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27554E-1
cs_fil2_imon=-2.2194E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54903E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21752E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.92235E-1
res40_imon=-2.44271E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.7998E1	-1.43051E-4	-8.80011E1	1.19209E-4	4.8399E-3	9.39131E-2	2.72909E1	-3.26856E1	-3.26272E1	2.6822E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.40192E-2	-8.79975E1	-5.24521E-4	-8.8001E1	1.43051E-4	5.03063E-3	9.39131E-2	2.71134E1	-3.26639E1	-3.26266E1	2.6801E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.79976E1	-6.91414E-4	-8.80012E1	2.86102E-4	5.24521E-3	9.38654E-2	2.72496E1	-3.26779E1	-3.26207E1	2.67968E1	1.20174E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01347E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.79978E1	-4.05312E-4	-8.80013E1	9.53674E-5	5.17368E-3	9.408E-2	2.71239E1	-3.26364E1	-3.26419E1	2.6801E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.79977E1	-3.33786E-4	-8.80012E1	2.38419E-4	5.126E-3	9.40323E-2	2.71542E1	-3.26604E1	-3.26009E1	2.67935E1	1.20069E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.79977E1	-4.52995E-4	-8.8001E1	2.14577E-4	5.17368E-3	9.37462E-2	2.71969E1	-3.26134E1	-3.26338E1	2.68076E1	1.20141E-7	2.52348E-3	2.52348E-3	6.30292E-3	2.9841E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.79977E1	-3.33786E-4	-8.80008E1	1.90735E-4	4.93526E-3	9.38177E-2	2.72739E1	-3.26416E1	-3.26585E1	2.6801E1	1.19705E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.79977E1	-2.14577E-4	-8.80008E1	7.15256E-5	5.14984E-3	9.38654E-2	2.73868E1	-3.26609E1	-3.26428E1	2.68064E1	1.19925E-7	2.51025E-3	2.51025E-3	6.30182E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.79975E1	-4.29153E-4	-8.80009E1	1.66893E-4	4.86374E-3	9.41038E-2	2.71736E1	-3.26266E1	-3.26176E1	2.68322E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01738E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.79978E1	-4.76837E-5	-8.80008E1	-2.38419E-5	4.95911E-3	9.38892E-2	2.72837E1	-3.26559E1	-3.26331E1	2.67693E1	1.19979E-7	2.51472E-3	2.51472E-3	6.323E-3	2.98276E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.79976E1	-4.29153E-4	-8.80007E1	3.8147E-4	4.673E-3	9.36508E-2	2.72066E1	-3.26651E1	-3.26278E1	2.68082E1	1.1984E-7	2.51642E-3	2.51642E-3	6.31902E-3	2.99535E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.79978E1	-2.86102E-4	-8.80009E1	4.29153E-4	4.86374E-3	9.38177E-2	2.737E1	-3.26452E1	-3.26549E1	2.68196E1	1.19809E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.79978E1	-4.05312E-4	-8.80007E1	4.52995E-4	4.86374E-3	9.39369E-2	2.73045E1	-3.26703E1	-3.26301E1	2.67763E1	1.19731E-7	2.51607E-3	2.51607E-3	6.31288E-3	3.02265E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.79979E1	-3.57628E-4	-8.80008E1	1.90735E-4	4.88758E-3	9.38654E-2	2.72121E1	-3.2675E1	-3.26254E1	2.68169E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.79978E1	-2.86102E-4	-8.80007E1	1.90735E-4	4.86374E-3	9.37223E-2	2.737E1	-3.26212E1	-3.26368E1	2.67842E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.79982E1	-2.86102E-4	-8.80008E1	3.09944E-4	4.76837E-3	9.37223E-2	2.72255E1	-3.26384E1	-3.26567E1	2.68111E1	1.20278E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.79982E1	-4.05312E-4	-8.80011E1	5.48363E-4	4.52995E-3	9.39846E-2	2.74307E1	-3.26632E1	-3.26449E1	2.6804E1	1.19851E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.79979E1	-5.48363E-4	-8.80012E1	4.76837E-4	4.98295E-3	9.39369E-2	2.71807E1	-3.26735E1	-3.25972E1	2.6798E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.79979E1	-3.8147E-4	-8.80008E1	4.52995E-4	4.45843E-3	9.39608E-2	2.73847E1	-3.26992E1	-3.2626E1	2.67868E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.79976E1	-3.57628E-4	-8.80005E1	2.38419E-4	4.50611E-3	9.38892E-2	2.73517E1	-3.27051E1	-3.27369E1	2.68028E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99686E-1
