[Scan]
initial_time=2016-01-28T21:45:50
final_time=2016-01-28T21:46:09
ip_count=19
run=1026
dataset=9
scan=647
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.8117E-6
ql1_vset=
ql1_vmon=-8.79981E1
ql1_imon=-1.23379E-9
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.4605E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-3.79022E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.65641E-8
mult1=-9.27898E-9
mult2=-1.97554E-9
rf_tmon=-9.02712E-3
rf_agc=2.98023E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.89907E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.66714E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=1.97908E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05217E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53731E1
cs_ef1b_imon=3.17748E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04554E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.08715E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06899E0
lens1_imon=1.37879E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.40251E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84128E1
cs_ef1a_imon=3.03951E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.12861E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.31041E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14786E1
os_ea1_imon=2.47814E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63867E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=9.68579E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=1.96948E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.88596E-8
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26395E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2525E1
iondef2_imon=1.59116E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.80098E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=8.59919E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.19569E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44087E0
os_ea2_imon=-8.12101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.19694E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09742E0
os_ef2alow_imon=-2.52593E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94335E-1
os_ef2bup_imon=-5.30266E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10984E1
os_restr2_imon=3.37175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.31981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.08834E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72341E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.08329E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.92827E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=7.10872E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11103E0
cs_ionaccel_imon=-8.2653E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02149E2
cs_ionfocb_imon=1.4739E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56388E1
einzel_imon=7.8199E-6
window_vset=0.0E0
window_vmon=1.9973E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82591E2
mask1_imon=2.3939E-4
mask2_vset=0.0E0
mask2_vmon=-1.86877E1
mask2_imon=-6.97946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.39579E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.81178E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.33208E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36717E0
defgridb_imon=6.18885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.41343E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07677E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60052E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31741E1
cs_fil1_imon=7.60598E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.38994E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61724E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.29849E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12666E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.59199E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28778E-1
cs_fil2_imon=-2.06681E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5127E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21641E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.53414E-1
res40_imon=-2.4738E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.79983E1	-2.14577E-4	-8.8001E1	6.4373E-4	4.60148E-3	9.38654E-2	2.71789E1	-3.26416E1	-3.26446E1	2.6816E1	1.20383E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01085E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-7.37874E-2	-8.7998E1	-1.90735E-4	-8.80009E1	5.24521E-4	4.76837E-3	9.38654E-2	2.74289E1	-3.26681E1	-3.26176E1	2.6777E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.79981E1	-2.38419E-4	-8.80009E1	3.09944E-4	4.72069E-3	9.36985E-2	2.7269E1	-3.27191E1	-3.26026E1	2.68018E1	1.19925E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.0041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.7998E1	-2.86102E-4	-8.80009E1	4.52995E-4	4.62532E-3	9.38416E-2	2.73141E1	-3.26615E1	-3.25948E1	2.6792E1	1.20209E-7	2.50989E-3	2.50989E-3	6.32896E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.79977E1	-7.15256E-5	-8.80011E1	6.67572E-4	4.86374E-3	9.38892E-2	2.72853E1	-3.26771E1	-3.26392E1	2.6807E1	1.20069E-7	2.52099E-3	2.52099E-3	6.35692E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.79979E1	-1.90735E-4	-8.80009E1	3.09944E-4	4.69685E-3	9.35793E-2	2.71351E1	-3.26573E1	-3.26128E1	2.68051E1	1.20244E-7	2.51248E-3	2.51248E-3	6.32978E-3	3.01742E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.79981E1	-2.14577E-4	-8.80006E1	7.86781E-4	4.64916E-3	9.3317E-2	2.74571E1	-3.26681E1	-3.26362E1	2.68082E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.7998E1	-6.19888E-4	-8.80008E1	4.05312E-4	4.91142E-3	9.39608E-2	2.73039E1	-3.26646E1	-3.26015E1	2.68253E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.7998E1	-5.48363E-4	-8.80009E1	2.14577E-4	4.43459E-3	9.38892E-2	2.72895E1	-3.26723E1	-3.26002E1	2.67914E1	1.19913E-7	2.52757E-3	2.52757E-3	6.31837E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.79982E1	-1.00136E-3	-8.80007E1	5.24521E-4	4.36306E-3	9.38416E-2	2.72246E1	-3.26266E1	-3.26128E1	2.68076E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.79985E1	-7.39098E-4	-8.80009E1	6.19888E-4	5.00679E-3	9.41277E-2	2.73462E1	-3.26938E1	-3.2637E1	2.67879E1	1.20017E-7	2.51225E-3	2.51225E-3	6.34037E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.79986E1	-5.96046E-4	-8.80008E1	6.4373E-4	4.69685E-3	9.38416E-2	2.7376E1	-3.26488E1	-3.26434E1	2.68238E1	1.20363E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79988E1	-5.96046E-4	-8.80008E1	7.86781E-4	5.05447E-3	9.35316E-2	2.72522E1	-3.26627E1	-3.25731E1	2.6828E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3514E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.79983E1	-6.19888E-4	-8.80009E1	5.72205E-4	4.88758E-3	9.35793E-2	2.73129E1	-3.25906E1	-3.26236E1	2.67872E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.79982E1	-4.52995E-4	-8.80011E1	4.29153E-4	4.86374E-3	9.36747E-2	2.74463E1	-3.26585E1	-3.26645E1	2.68052E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.13915E-2	-8.79987E1	-6.67572E-4	-8.80009E1	3.33786E-4	5.03063E-3	9.39369E-2	2.72042E1	-3.26861E1	-3.25809E1	2.67788E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.02133E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.79987E1	-6.19888E-4	-8.80012E1	6.4373E-4	4.64916E-3	9.38177E-2	2.73812E1	-3.26809E1	-3.2626E1	2.68088E1	1.19749E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.79983E1	-5.72205E-4	-8.8001E1	4.05312E-4	4.76837E-3	9.39608E-2	2.72474E1	-3.26819E1	-3.26236E1	2.68088E1	1.20158E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.79978E1	-7.86781E-4	-8.80009E1	4.05312E-4	4.43459E-3	9.36031E-2	2.73611E1	-3.26431E1	-3.26413E1	2.6804E1	1.20122E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.79981E1	-4.52995E-4	-8.80005E1	3.33786E-4	4.45843E-3	9.35555E-2	2.72341E1	-3.2525E1	-3.26395E1	2.6819E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
