[Scan]
initial_time=2016-01-28T21:46:16
final_time=2016-01-28T21:46:36
ip_count=19
run=1026
dataset=9
scan=648
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.83626E-6
ql1_vset=
ql1_vmon=-8.79984E1
ql1_imon=-1.11601E-9
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.44005E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-3.34151E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.64397E-8
mult1=-7.6092E-9
mult2=-2.82041E-9
rf_tmon=-8.51392E-3
rf_agc=2.79562E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.56493E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62433E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20402E1
lens5a_imon=2.0035E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12436E2
lens4a_imon=2.05242E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.16326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02528E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.07264E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09613E0
lens1_imon=1.43188E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03307E1
cs_ea2_imon=1.4149E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83956E1
cs_ef1a_imon=3.02379E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.13103E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.32374E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.4661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63894E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=9.47342E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91918E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=1.97179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.88554E-8
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25311E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.5993E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.8172E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=8.59211E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.17658E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41019E0
os_ea2_imon=-2.91808E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70999E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10631E1
os_restr2_imon=3.35427E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.3191E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02031E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.75659E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.11152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.83335E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.12096E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.06619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.44372E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.25421E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.42599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.23651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53844E0
defgridb_imon=6.43661E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33186E1
os_fil1_imon=9.41201E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0775E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59995E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3176E1
cs_fil1_imon=6.86052E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.72257E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61916E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.56289E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.71285E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21733E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.41583E-1
res40_imon=-2.24829E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.40967E-2	-8.79983E1	-4.52995E-4	-8.80006E1	2.14577E-4	4.74453E-3	9.37223E-2	2.73742E1	-3.26741E1	-3.26164E1	2.68178E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9943E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.41738E-2	-8.79984E1	-4.05312E-4	-8.80005E1	2.6226E-4	4.93526E-3	9.34839E-2	2.72859E1	-3.26609E1	-3.26236E1	2.6798E1	1.20069E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.02922E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.79986E1	-1.90735E-4	-8.80007E1	4.29153E-4	4.74453E-3	9.40561E-2	2.7301E1	-3.26484E1	-3.26119E1	2.68314E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.79982E1	-9.53674E-5	-8.80007E1	4.52995E-4	5.29289E-3	9.38654E-2	2.73177E1	-3.26627E1	-3.26404E1	2.67908E1	1.198E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.79982E1	-9.53674E-5	-8.80007E1	4.29153E-4	4.91142E-3	9.38416E-2	2.72795E1	-3.26562E1	-3.26163E1	2.6807E1	1.20055E-7	2.52008E-3	2.52008E-3	6.31817E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.79982E1	-4.05312E-4	-8.80006E1	3.33786E-4	5.19753E-3	9.38892E-2	2.72577E1	-3.26708E1	-3.26208E1	2.68296E1	1.19895E-7	2.51411E-3	2.51411E-3	6.32483E-3	3.00916E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.79987E1	-5.00679E-4	-8.80005E1	2.86102E-4	4.98295E-3	9.39846E-2	2.73098E1	-3.2649E1	-3.26626E1	2.67908E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.79986E1	-2.14577E-4	-8.80005E1	9.53674E-5	4.93526E-3	9.408E-2	2.73123E1	-3.26524E1	-3.26212E1	2.67607E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.79988E1	-4.52995E-4	-8.80004E1	3.09944E-4	4.8399E-3	9.377E-2	2.73364E1	-3.26266E1	-3.25953E1	2.68214E1	1.20004E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.79986E1	-3.8147E-4	-8.80007E1	4.29153E-4	4.79221E-3	9.38654E-2	2.73782E1	-3.26785E1	-3.26113E1	2.67788E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.9892E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.79986E1	-4.76837E-4	-8.80009E1	4.52995E-4	4.8399E-3	9.36747E-2	2.72261E1	-3.26438E1	-3.26272E1	2.68124E1	1.19965E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.79986E1	-4.52995E-4	-8.80007E1	4.52995E-4	4.8399E-3	9.40561E-2	2.73454E1	-3.26855E1	-3.26128E1	2.67878E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.79986E1	-4.76837E-4	-8.80008E1	4.05312E-4	4.88758E-3	9.38416E-2	2.73123E1	-3.26518E1	-3.26314E1	2.67944E1	1.20244E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.03349E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.79986E1	-5.00679E-4	-8.80006E1	2.38419E-5	4.81606E-3	9.408E-2	2.72378E1	-3.265E1	-3.2632E1	2.68599E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.79987E1	-1.90735E-4	-8.8001E1	1.90735E-4	4.55379E-3	9.37939E-2	2.73381E1	-3.2649E1	-3.26402E1	2.67914E1	1.20069E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.79987E1	1.19209E-4	-8.80006E1	3.57628E-4	4.64916E-3	9.39131E-2	2.73688E1	-3.26543E1	-3.26368E1	2.68028E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99175E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.79985E1	-4.29153E-4	-8.80003E1	2.86102E-4	4.95911E-3	9.377E-2	2.72288E1	-3.26248E1	-3.26392E1	2.68058E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34588E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44059E-2	-8.79987E1	-1.19209E-4	-8.80008E1	3.33786E-4	5.10216E-3	9.38892E-2	2.72979E1	-3.26663E1	-3.26272E1	2.67848E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.79986E1	-3.57628E-4	-8.80008E1	1.43051E-4	4.52995E-3	9.41038E-2	2.72721E1	-3.26723E1	-3.25978E1	2.68058E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.03185E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.79984E1	-3.09944E-4	-8.8001E1	7.15256E-5	4.64916E-3	9.38654E-2	2.75659E1	-3.26699E1	-3.25311E1	2.68058E1	1.20069E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.9926E-1
