[Scan]
initial_time=2016-01-28T21:48:03
final_time=2016-01-28T21:48:22
ip_count=19
run=1026
dataset=9
scan=652
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.80004E-6
ql1_vset=
ql1_vmon=-8.79992E1
ql1_imon=-8.70824E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.45301E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.67209E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.63693E-8
mult1=-8.68082E-9
mult2=-2.65274E-9
rf_tmon=-5.75613E-3
rf_agc=3.16212E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.28634E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67755E0
bslens_imon=2.74684E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.17623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04742E1
cs_ea1_imon=1.08255E-5
lens1_vset=-2.7E0
lens1_vmon=-3.075E0
lens1_imon=1.6257E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.40376E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.12761E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10979E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=2.46253E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=9.53857E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=1.96638E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.88334E-8
tplens_vset=1.4E-1
tplens_vmon=1.65766E0
tplens_imon=-1.62358E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26098E1
iondef3_imon=1.48991E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.5907E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=8.70222E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74856E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46239E0
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.21011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11523E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=3.37373E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.10513E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74289E1
iondef1_imon=1.11103E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.83674E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.10436E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10011E0
cs_ionaccel_imon=-9.50867E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02116E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55973E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.87197E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.77575E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.41525E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52788E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.39429E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0778E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60342E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31745E1
cs_fil1_imon=7.1188E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01642E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61732E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.25752E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65609E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-1.789E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40651E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21688E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.10659E-1
res40_imon=-2.24469E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.79994E1	-1.43051E-4	-8.80008E1	2.86102E-4	4.74453E-3	9.39608E-2	2.73252E1	-3.26697E1	-3.26178E1	2.68028E1	1.19705E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.98222E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.79993E1	-3.33786E-4	-8.80008E1	3.8147E-4	4.45843E-3	9.38416E-2	2.73847E1	-3.26395E1	-3.26125E1	2.68112E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.79993E1	-2.38419E-4	-8.80007E1	4.29153E-4	4.81606E-3	9.408E-2	2.7348E1	-3.26758E1	-3.26318E1	2.67972E1	1.20031E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.98554E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.79993E1	-2.86102E-4	-8.80008E1	5.00679E-4	4.79221E-3	9.41992E-2	2.71639E1	-3.26524E1	-3.26362E1	2.67674E1	1.20344E-7	2.51709E-3	2.51709E-3	6.34982E-3	3.00097E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.79993E1	-1.90735E-4	-8.80009E1	6.91414E-4	4.79221E-3	9.41753E-2	2.72868E1	-3.26703E1	-3.26089E1	2.681E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.79993E1	-2.6226E-4	-8.80008E1	2.14577E-4	4.81606E-3	9.4223E-2	2.75028E1	-3.26573E1	-3.26669E1	2.6774E1	1.20055E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.03545E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.79994E1	-9.53674E-5	-8.80007E1	1.43051E-4	4.62532E-3	9.42945E-2	2.72162E1	-3.26575E1	-3.26255E1	2.68128E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.79997E1	-2.14577E-4	-8.80007E1	5.72205E-4	4.72069E-3	9.41277E-2	2.74433E1	-3.26512E1	-3.2644E1	2.6795E1	1.19981E-7	2.5199E-3	2.5199E-3	6.30311E-3	2.99667E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.79998E1	-2.6226E-4	-8.80004E1	5.24521E-4	4.48227E-3	9.40084E-2	2.74431E1	-3.26602E1	-3.26219E1	2.68034E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9892E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.79995E1	-3.09944E-4	-8.80006E1	5.72205E-4	4.48227E-3	9.40323E-2	2.7385E1	-3.26567E1	-3.26434E1	2.68028E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.99E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.79997E1	-5.48363E-4	-8.80009E1	4.05312E-4	4.62532E-3	9.39369E-2	2.74697E1	-3.26633E1	-3.26032E1	2.67956E1	1.2033E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.79996E1	-6.67572E-4	-8.80008E1	2.38419E-4	4.64916E-3	9.40084E-2	2.74986E1	-3.26313E1	-3.26425E1	2.68134E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.79997E1	-5.00679E-4	-8.80008E1	2.38419E-5	5.19753E-3	9.37939E-2	2.74805E1	-3.26627E1	-3.26404E1	2.68016E1	1.198E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.03545E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.79994E1	-5.72205E-4	-8.80007E1	3.8147E-4	4.72069E-3	9.38416E-2	2.75045E1	-3.26384E1	-3.26278E1	2.67698E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.79995E1	-7.15256E-4	-8.80009E1	1.66893E-4	5.03063E-3	9.39131E-2	2.74667E1	-3.2682E1	-3.26231E1	2.68256E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.79992E1	-4.29153E-4	-8.80009E1	2.14577E-4	4.62532E-3	9.37939E-2	2.74277E1	-3.26591E1	-3.2602E1	2.67842E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.79994E1	-5.96046E-4	-8.8001E1	1.43051E-4	4.81606E-3	9.37223E-2	2.74119E1	-3.26697E1	-3.26236E1	2.67914E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.79994E1	-7.86781E-4	-8.80008E1	3.33786E-4	4.05312E-3	9.33886E-2	2.74066E1	-3.26621E1	-3.26248E1	2.68286E1	1.19749E-7	2.51417E-3	2.51417E-3	6.34518E-3	2.98665E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.79992E1	-5.24521E-4	-8.80006E1	3.57628E-4	4.45843E-3	9.39369E-2	2.74791E1	-3.26679E1	-3.26673E1	2.67822E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.79992E1	-4.76837E-4	-8.80007E1	3.09944E-4	4.33922E-3	9.377E-2	2.74289E1	-3.26561E1	-3.26098E1	2.68088E1	1.19697E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01738E-1
