[Scan]
initial_time=2016-01-28T21:48:56
final_time=2016-01-28T21:49:16
ip_count=19
run=1026
dataset=9
scan=654
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.85106E-6
ql1_vset=
ql1_vmon=-8.79997E1
ql1_imon=-8.00467E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.43062E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.48362E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.63973E-8
mult1=-8.68082E-9
mult2=-2.75454E-9
rf_tmon=-6.36297E-3
rf_agc=3.10745E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.47934E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19524E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.17623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05236E1
cs_ea1_imon=1.07653E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06487E0
lens1_imon=1.61593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03814E1
cs_ea2_imon=1.38411E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83739E1
cs_ef1a_imon=3.03171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.1229E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.30968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.46716E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6393E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=9.42387E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91849E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=1.96458E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.87299E-8
tplens_vset=1.4E-1
tplens_vmon=1.66503E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25858E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=8.65579E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=8.53194E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74934E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45856E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.1073E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74421E1
iondef1_imon=1.10697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.11152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.81229E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.07879E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.06531E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86891E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.8276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.65959E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.33916E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.08621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33214E1
os_fil1_imon=9.41447E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07617E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60023E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3178E1
cs_fil1_imon=7.07075E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.69564E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61529E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2183E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57554E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56869E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21722E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.51193E-1
res40_imon=-2.33479E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.79998E1	-7.15256E-5	-8.80008E1	3.57628E-4	4.86374E-3	9.377E-2	2.74823E1	-3.26452E1	-3.26705E1	2.68238E1	1.19913E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.9952E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.8E1	-5.00679E-4	-8.80005E1	2.6226E-4	4.62532E-3	9.3627E-2	2.72924E1	-3.26527E1	-3.26086E1	2.67792E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.79998E1	0.0E0	-8.80003E1	3.09944E-4	4.74453E-3	9.38416E-2	2.70857E1	-3.2652E1	-3.26012E1	2.68175E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00838E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.79999E1	2.38419E-5	-8.80009E1	4.76837E-4	4.62532E-3	9.40084E-2	2.7091E1	-3.26632E1	-3.26183E1	2.67848E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.8E1	4.76837E-5	-8.80006E1	7.15256E-5	4.72069E-3	9.39369E-2	2.72282E1	-3.26693E1	-3.26062E1	2.6804E1	1.19991E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.01862E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80001E1	-2.86102E-4	-8.80007E1	2.38419E-4	4.81606E-3	9.38416E-2	2.71134E1	-3.26573E1	-3.26136E1	2.68204E1	1.20191E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.79998E1	-1.66893E-4	-8.80009E1	4.05312E-4	4.81606E-3	9.40323E-2	2.7055E1	-3.26478E1	-3.26585E1	2.68292E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99686E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.79999E1	2.14577E-4	-8.80006E1	0.0E0	4.69685E-3	9.38892E-2	2.71635E1	-3.26331E1	-3.26408E1	2.67984E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.79998E1	-1.19209E-4	-8.80006E1	-7.15256E-5	4.45843E-3	9.37939E-2	2.7229E1	-3.26638E1	-3.2616E1	2.67674E1	1.198E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.79997E1	2.38419E-5	-8.80005E1	3.33786E-4	4.91142E-3	9.37939E-2	2.71597E1	-3.26621E1	-3.26044E1	2.67878E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.79998E1	-4.76837E-4	-8.80008E1	-2.38419E-5	5.00679E-3	9.40323E-2	2.72101E1	-3.2662E1	-3.26024E1	2.68192E1	1.19653E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.79998E1	1.66893E-4	-8.80007E1	-2.38419E-4	4.673E-3	9.40323E-2	2.72715E1	-3.26873E1	-3.26236E1	2.68154E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.79997E1	-9.53674E-5	-8.80008E1	1.90735E-4	4.88758E-3	9.36985E-2	2.73598E1	-3.26621E1	-3.25906E1	2.68034E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.79998E1	-7.15256E-5	-8.80006E1	5.24521E-4	4.69685E-3	9.41515E-2	2.74355E1	-3.26425E1	-3.26708E1	2.68214E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.8E1	-3.57628E-4	-8.80007E1	3.09944E-4	4.72069E-3	9.39608E-2	2.72829E1	-3.2652E1	-3.26352E1	2.67904E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.98156E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80001E1	-7.15256E-5	-8.80005E1	7.15256E-5	4.673E-3	9.38892E-2	2.73567E1	-3.26929E1	-3.25916E1	2.68024E1	1.20118E-7	2.51474E-3	2.51474E-3	6.32197E-3	3.01261E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80002E1	1.90735E-4	-8.80006E1	-4.76837E-5	5.00679E-3	9.38892E-2	2.71925E1	-3.26621E1	-3.26156E1	2.67477E1	1.19977E-7	2.52674E-3	2.52674E-3	6.32555E-3	3.00312E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.79999E1	4.76837E-5	-8.80006E1	-1.43051E-4	4.8399E-3	9.39608E-2	2.73257E1	-3.2659E1	-3.2616E1	2.6792E1	1.20262E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.02426E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.8E1	-4.76837E-5	-8.80004E1	9.53674E-5	4.673E-3	9.408E-2	2.71339E1	-3.26524E1	-3.26224E1	2.67872E1	1.20414E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.79997E1	-1.66893E-4	-8.80006E1	1.43051E-4	4.91142E-3	9.40084E-2	2.74421E1	-3.26627E1	-3.25858E1	2.68142E1	1.20017E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9978E-1
