[Scan]
initial_time=2016-01-28T21:49:23
final_time=2016-01-28T21:49:42
ip_count=19
run=1026
dataset=9
scan=655
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.77427E-6
ql1_vset=
ql1_vmon=-8.79996E1
ql1_imon=-8.13031E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.45996E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.44883E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.6476E-8
mult1=-1.00887E-8
mult2=-2.86022E-9
rf_tmon=-4.23389E-3
rf_agc=3.26489E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=5.15521E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.76486E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19749E1
lens5a_imon=1.9755E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05273E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53418E1
cs_ef1b_imon=3.16903E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02377E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04916E1
cs_ea1_imon=1.09914E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06899E0
lens1_imon=1.43464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04093E1
cs_ea2_imon=1.4189E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=3.02991E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.1234E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11604E1
os_restr1_imon=4.32698E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14927E1
os_ea1_imon=2.46217E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26532E0
cs_ionrep_imon=9.38356E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02151E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.86784E-8
tplens_vset=1.4E-1
tplens_vmon=1.67808E0
tplens_imon=-7.22339E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26505E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98522E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=9.02629E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31699E0
ionrepsh_imon=8.42464E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74459E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44797E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.21047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5778E-1
os_ef2bup_imon=-4.98731E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.30325E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02085E1
cs_anode2_imon=2.10946E-5
iondef1_vset=2.763E1
iondef1_vmon=2.75163E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.86399E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.07728E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-8.89599E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.01987E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.8875E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.68705E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.01871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33219E1
os_fil1_imon=9.41093E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0796E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59927E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31798E1
cs_fil1_imon=8.69253E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.41933E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61516E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5968E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21759E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47589E-1
res40_imon=-2.31317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.23189E-2	-8.79997E1	-4.05312E-4	-8.80007E1	5.00679E-4	4.673E-3	9.43661E-2	2.73351E1	-3.26549E1	-3.26344E1	2.67782E1	1.20226E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.17779E-2	-8.79999E1	-1.66893E-4	-8.80003E1	3.57628E-4	4.50611E-3	9.44853E-2	2.72072E1	-3.26753E1	-3.26428E1	2.6819E1	1.198E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80001E1	-4.29153E-4	-8.80003E1	4.05312E-4	4.52995E-3	9.41277E-2	2.7286E1	-3.26741E1	-3.2626E1	2.68157E1	1.20244E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01475E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80001E1	-4.05312E-4	-8.80003E1	4.05312E-4	4.673E-3	9.38416E-2	2.72626E1	-3.26832E1	-3.26354E1	2.6759E1	1.20078E-7	2.52093E-3	2.52093E-3	6.33863E-3	2.98522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80001E1	-7.15256E-5	-8.80008E1	5.00679E-4	4.45843E-3	9.36508E-2	2.72955E1	-3.26603E1	-3.2644E1	2.68166E1	1.19749E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80001E1	-5.24521E-4	-8.80008E1	3.33786E-4	4.55379E-3	9.36031E-2	2.73163E1	-3.26655E1	-3.25942E1	2.6801E1	1.20084E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.79996E1	-2.6226E-4	-8.8001E1	2.14577E-4	4.69685E-3	9.34839E-2	2.73522E1	-3.2645E1	-3.26217E1	2.68064E1	1.19891E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.00097E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.79997E1	-3.09944E-4	-8.80008E1	2.38419E-5	4.72069E-3	9.35793E-2	2.74307E1	-3.26443E1	-3.26396E1	2.68232E1	1.20045E-7	2.51158E-3	2.51158E-3	6.3131E-3	3.02972E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.79998E1	-5.24521E-4	-8.80005E1	1.90735E-4	4.62532E-3	9.40323E-2	2.73231E1	-3.26651E1	-3.26038E1	2.67956E1	1.20192E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.01356E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.79999E1	-4.29153E-4	-8.80003E1	9.53674E-5	4.79221E-3	9.41038E-2	2.72962E1	-3.26732E1	-3.2629E1	2.67873E1	1.19809E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80001E1	-2.38419E-5	-8.80004E1	1.43051E-4	4.57764E-3	9.40323E-2	2.7248E1	-3.26308E1	-3.26218E1	2.68166E1	1.20174E-7	2.51662E-3	2.51662E-3	6.26916E-3	2.97445E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80001E1	-7.15256E-5	-8.80007E1	0.0E0	4.55379E-3	9.37462E-2	2.72754E1	-3.27155E1	-3.26227E1	2.68116E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.97445E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.8E1	-3.09944E-4	-8.80005E1	9.53674E-5	4.76837E-3	9.39369E-2	2.72854E1	-3.26273E1	-3.26139E1	2.67939E1	1.20016E-7	2.52364E-3	2.52364E-3	6.3074E-3	2.97731E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.79999E1	-2.38419E-4	-8.80007E1	2.6226E-4	4.93526E-3	9.41277E-2	2.74166E1	-3.26667E1	-3.26231E1	2.681E1	1.19937E-7	2.52179E-3	2.52179E-3	6.3245E-3	3.00522E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.36328E-2	-8.79996E1	-5.96046E-4	-8.80008E1	4.29153E-4	4.95911E-3	9.37462E-2	2.72222E1	-3.26597E1	-3.2638E1	2.6792E1	1.20122E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.79997E1	-5.00679E-4	-8.80008E1	4.76837E-4	5.34058E-3	9.37939E-2	2.73134E1	-3.26543E1	-3.25818E1	2.68154E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.03976E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80001E1	-4.52995E-4	-8.80009E1	3.33786E-4	5.10216E-3	9.39369E-2	2.74409E1	-3.26573E1	-3.26002E1	2.68028E1	1.20055E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.02769E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.79998E1	-1.19209E-4	-8.80005E1	5.00679E-4	4.76837E-3	9.36747E-2	2.73257E1	-3.2685E1	-3.26172E1	2.67989E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.8E1	-1.66893E-4	-8.80006E1	4.05312E-4	4.76837E-3	9.34601E-2	2.74325E1	-3.26443E1	-3.26502E1	2.681E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.79996E1	-2.14577E-4	-8.80007E1	6.4373E-4	5.00679E-3	9.39846E-2	2.75163E1	-3.26505E1	-3.26554E1	2.68202E1	1.198E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.9892E-1
