[Scan]
initial_time=2016-01-28T21:49:49
final_time=2016-01-28T21:50:09
ip_count=19
run=1026
dataset=9
scan=656
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79807E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-7.0188E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.43892E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.33003E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.63326E-8
mult1=-9.31897E-9
mult2=-2.7745E-9
rf_tmon=-4.07382E-3
rf_agc=3.35559E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.21946E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.18236E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04563E2
lens23_imon=1.02333E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.09989E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03419E0
lens1_imon=1.5593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04133E1
cs_ea2_imon=1.38835E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.1214E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15329E1
os_ea1_imon=2.47991E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30401E0
cs_ionrep_imon=9.37786E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=1.96963E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.87524E-8
tplens_vset=1.4E-1
tplens_vmon=1.65972E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.5232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.66818E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2987E0
ionrepsh_imon=8.33727E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3341E1
lens5b_imon=2.19463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41786E0
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00817E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.20326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.3676E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71765E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.7876E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.09296E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-9.07619E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.47376E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.87065E1
mask2_imon=-5.25599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.50905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.741E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.52321E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29335E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33215E1
os_fil1_imon=9.4045E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08194E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59878E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31801E1
cs_fil1_imon=8.32613E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.18507E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61687E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.34762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.64135E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21737E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.96533E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.79996E1	-1.90735E-4	-8.80007E1	4.76837E-4	4.74453E-3	9.36031E-2	2.73977E1	-3.26974E1	-3.26166E1	2.67827E1	1.198E-7	2.51096E-3	2.51096E-3	6.28592E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.79996E1	4.76837E-5	-8.80004E1	2.6226E-4	4.69685E-3	9.36747E-2	2.71778E1	-3.26401E1	-3.26168E1	2.67957E1	1.19749E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.79996E1	-2.86102E-4	-8.80008E1	3.33786E-4	4.52995E-3	9.377E-2	2.72992E1	-3.26567E1	-3.25847E1	2.67827E1	1.19766E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.02545E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.79998E1	-1.19209E-4	-8.80004E1	4.29153E-4	4.45843E-3	9.36031E-2	2.73646E1	-3.26458E1	-3.26446E1	2.68016E1	1.20568E-7	2.51203E-3	2.51203E-3	6.33977E-3	3.03286E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.79996E1	4.76837E-5	-8.80008E1	5.24521E-4	4.55379E-3	9.38892E-2	2.74277E1	-3.26711E1	-3.26464E1	2.67986E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.79995E1	-2.38419E-5	-8.80009E1	3.09944E-4	4.22001E-3	9.38416E-2	2.71921E1	-3.26458E1	-3.26194E1	2.68004E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.79997E1	-3.33786E-4	-8.8001E1	4.29153E-4	4.93526E-3	9.38654E-2	2.72859E1	-3.26615E1	-3.26266E1	2.67752E1	1.19766E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.79997E1	-4.29153E-4	-8.80006E1	3.33786E-4	4.64916E-3	9.38416E-2	2.73051E1	-3.26332E1	-3.26212E1	2.6816E1	1.198E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.03027E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.8E1	-5.24521E-4	-8.80003E1	-7.15256E-5	4.72069E-3	9.39846E-2	2.73237E1	-3.26434E1	-3.26188E1	2.68346E1	1.20069E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80002E1	-4.52995E-4	-8.80006E1	3.57628E-4	4.57764E-3	9.41753E-2	2.74644E1	-3.26968E1	-3.26148E1	2.68046E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.39421E-2	-8.79998E1	-1.90735E-4	-8.80005E1	3.09944E-4	4.72069E-3	9.41038E-2	2.73981E1	-3.26334E1	-3.26462E1	2.67914E1	1.19757E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80002E1	-2.6226E-4	-8.80005E1	0.0E0	4.69685E-3	9.39131E-2	2.72066E1	-3.26416E1	-3.26693E1	2.6789E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80002E1	-2.38419E-5	-8.80005E1	7.15256E-5	4.72069E-3	9.40323E-2	2.71735E1	-3.26795E1	-3.262E1	2.68214E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.79999E1	-7.15256E-5	-8.80002E1	4.76837E-5	4.64916E-3	9.39369E-2	2.7275E1	-3.26726E1	-3.26166E1	2.68124E1	1.20137E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.00144E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.79999E1	-1.66893E-4	-8.80004E1	1.43051E-4	4.48227E-3	9.408E-2	2.70878E1	-3.26321E1	-3.26456E1	2.67986E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.8E1	-4.76837E-5	-8.80004E1	2.86102E-4	4.33922E-3	9.40084E-2	2.71849E1	-3.26711E1	-3.26272E1	2.67944E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.79997E1	-1.90735E-4	-8.80001E1	1.19209E-4	4.36306E-3	9.38654E-2	2.74307E1	-3.26597E1	-3.26374E1	2.68184E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.79999E1	-2.14577E-4	-8.80005E1	2.14577E-4	4.62532E-3	9.41515E-2	2.71897E1	-3.26783E1	-3.26236E1	2.67908E1	1.19819E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.99083E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80001E1	-3.33786E-4	-8.80004E1	3.09944E-4	4.64916E-3	9.40084E-2	2.71358E1	-3.26779E1	-3.26242E1	2.68082E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80001E1	-2.14577E-4	-8.80003E1	4.76837E-5	4.48227E-3	9.37462E-2	2.71765E1	-3.26693E1	-3.26206E1	2.68016E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
