[Scan]
initial_time=2016-01-28T21:50:16
final_time=2016-01-28T21:50:35
ip_count=19
run=1026
dataset=9
scan=657
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.81981E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-8.25405E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.46716E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.19642E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.64473E-8
mult1=-9.72835E-9
mult2=-2.89227E-9
rf_tmon=-6.14066E-3
rf_agc=3.13749E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.54442E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.64944E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=2.00846E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=3.18165E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05189E1
cs_ea1_imon=1.09954E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04304E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03437E1
cs_ea2_imon=1.388E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83815E1
cs_ef1a_imon=3.03569E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.12271E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11349E1
os_restr1_imon=4.31215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.48132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.08574E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27156E0
cs_ionrep_imon=9.60792E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93314E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01856E1
cs_anode1_imon=1.95732E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.87215E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-3.20124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25749E1
iondef3_imon=1.52497E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26789E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=8.53264E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27746E0
ionrepsh_imon=8.46823E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33386E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.14099E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42258E0
os_ea2_imon=-8.40417E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00732E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.19312E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.56068E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6885E-1
os_ef2bup_imon=-5.14974E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10706E1
os_restr2_imon=3.37175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.09633E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74541E1
iondef1_imon=1.08361E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.08538E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.83354E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.09277E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-8.16104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47407E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56527E1
einzel_imon=7.8477E-6
window_vset=0.0E0
window_vmon=2.40275E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.86784E1
mask2_imon=-5.20708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92699E3
multa_neg_imon=7.54444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.8401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.36393E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37603E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.41181E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08204E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59993E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31735E1
cs_fil1_imon=7.31058E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.62742E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61539E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20564E-2
os_fil2_imon=-2.55334E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.72994E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2703E-1
cs_fil2_imon=-2.368E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5127E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21734E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.23295E-1
res40_imon=-2.36259E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.8E1	-4.76837E-4	-8.80005E1	2.6226E-4	4.76837E-3	9.40084E-2	2.71279E1	-3.2644E1	-3.26008E1	2.68214E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01347E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80001E1	-5.24521E-4	-8.80006E1	-4.76837E-5	4.88758E-3	9.40561E-2	2.71417E1	-3.26608E1	-3.26054E1	2.6813E1	1.20069E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.8E1	-6.91414E-4	-8.80005E1	3.57628E-4	4.31538E-3	9.38654E-2	2.71818E1	-3.267E1	-3.26302E1	2.67929E1	1.20055E-7	2.52384E-3	2.52384E-3	6.33436E-3	3.00966E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.79999E1	-5.72205E-4	-8.80006E1	2.6226E-4	4.41074E-3	9.36508E-2	2.7142E1	-3.27242E1	-3.2626E1	2.67809E1	1.20011E-7	2.5154E-3	2.5154E-3	6.29051E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.8E1	-5.00679E-4	-8.80005E1	3.57628E-4	4.55379E-3	9.38177E-2	2.71627E1	-3.26518E1	-3.26506E1	2.67908E1	1.20028E-7	2.51265E-3	2.51265E-3	6.323E-3	3.00865E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80003E1	-5.00679E-4	-8.80005E1	0.0E0	4.43459E-3	9.377E-2	2.73922E1	-3.2647E1	-3.26554E1	2.67782E1	1.20311E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.8E1	-7.39098E-4	-8.80005E1	2.14577E-4	4.60148E-3	9.41515E-2	2.7242E1	-3.26549E1	-3.26207E1	2.68238E1	1.19809E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.79999E1	-6.19888E-4	-8.80005E1	1.90735E-4	4.81606E-3	9.35555E-2	2.7156E1	-3.26266E1	-3.26123E1	2.6803E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.79997E1	-4.52995E-4	-8.80006E1	2.38419E-4	4.91142E-3	9.38654E-2	2.71492E1	-3.26515E1	-3.26349E1	2.68144E1	1.20078E-7	2.51162E-3	2.51162E-3	6.3126E-3	3.0223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.79997E1	-1.66893E-4	-8.80007E1	0.0E0	4.79221E-3	9.39369E-2	2.72361E1	-3.26738E1	-3.26089E1	2.68112E1	1.20005E-7	2.52222E-3	2.52222E-3	6.31902E-3	3.0147E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.8E1	-1.43051E-4	-8.80005E1	9.53674E-5	4.60148E-3	9.39846E-2	2.72733E1	-3.26765E1	-3.26026E1	2.67674E1	1.20311E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.79998E1	-3.57628E-4	-8.80007E1	3.09944E-4	4.81606E-3	9.39846E-2	2.73635E1	-3.26762E1	-3.26278E1	2.67816E1	1.20017E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.79999E1	-9.53674E-5	-8.80005E1	2.14577E-4	4.72069E-3	9.38654E-2	2.72246E1	-3.26385E1	-3.26603E1	2.68107E1	1.19902E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.79999E1	-2.14577E-4	-8.80005E1	4.76837E-5	4.95911E-3	9.38177E-2	2.72414E1	-3.26756E1	-3.26408E1	2.681E1	1.19819E-7	2.52809E-3	2.52809E-3	6.29067E-3	3.01475E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.8E1	4.76837E-5	-8.80006E1	1.90735E-4	4.95911E-3	9.36985E-2	2.74685E1	-3.26434E1	-3.26308E1	2.67696E1	1.20209E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.79999E1	-4.76837E-4	-8.80007E1	-2.38419E-5	4.55379E-3	9.408E-2	2.74832E1	-3.26915E1	-3.25995E1	2.68163E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.99083E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.79999E1	-2.14577E-4	-8.80005E1	1.90735E-4	4.48227E-3	9.38177E-2	2.74066E1	-3.2695E1	-3.26366E1	2.67938E1	1.20311E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80002E1	-1.43051E-4	-8.8001E1	-7.15256E-5	4.673E-3	9.38177E-2	2.72148E1	-3.26697E1	-3.26502E1	2.67926E1	1.19902E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80002E1	4.76837E-5	-8.80009E1	4.76837E-5	4.62532E-3	9.37223E-2	2.73435E1	-3.26422E1	-3.26302E1	2.68154E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.79998E1	-2.14577E-4	-8.80007E1	1.19209E-4	4.673E-3	9.41277E-2	2.74541E1	-3.26789E1	-3.25749E1	2.68028E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00966E-1
