[Scan]
initial_time=2016-01-28T21:50:43
final_time=2016-01-28T21:51:02
ip_count=19
run=1026
dataset=9
scan=658
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.79686E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-7.65944E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=1.46319E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.12929E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.63823E-8
mult1=-9.71631E-9
mult2=-2.6747E-9
rf_tmon=-5.57589E-3
rf_agc=3.28049E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.71859E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.96882E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.19497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02386E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05342E1
cs_ea1_imon=1.08963E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06899E0
lens1_imon=1.56992E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64987E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.41384E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84112E1
cs_ef1a_imon=3.04397E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.12535E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.31509E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15359E1
os_ea1_imon=2.46964E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=9.42741E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.96854E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.87884E-8
tplens_vset=1.4E-1
tplens_vmon=1.64438E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.5186E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26206E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=8.76307E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.258E0
ionrepsh_imon=8.53194E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33433E1
lens5b_imon=2.19569E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42907E0
os_ea2_imon=-5.36028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77602E-1
os_ef2bup_imon=-5.10624E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.3604E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.09937E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74908E1
iondef1_imon=1.08113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.84943E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.07902E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-8.89599E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39354E-4
mask2_vset=0.0E0
mask2_vmon=-1.87071E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.24359E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.50032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.38517E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3322E1
os_fil1_imon=9.40246E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07461E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6001E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31753E1
cs_fil1_imon=7.06474E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.56349E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61495E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07901E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48189E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21835E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.97704E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46388E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80002E1	-6.91414E-4	-8.80009E1	3.09944E-4	4.43459E-3	9.41038E-2	2.73157E1	-3.26449E1	-3.26213E1	2.68012E1	1.198E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.99686E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.13143E-2	-8.80003E1	-5.24521E-4	-8.80007E1	1.90735E-4	4.43459E-3	9.40323E-2	2.71481E1	-3.26405E1	-3.26214E1	2.6803E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80003E1	-6.4373E-4	-8.80009E1	3.09944E-4	4.14848E-3	9.38654E-2	2.72883E1	-3.26242E1	-3.26218E1	2.6804E1	1.1988E-7	2.5199E-3	2.5199E-3	6.3282E-3	3.01237E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80003E1	-1.43051E-4	-8.80006E1	4.05312E-4	4.43459E-3	9.38892E-2	2.72955E1	-3.26579E1	-3.26434E1	2.67926E1	1.1966E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01209E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80001E1	-5.96046E-4	-8.80005E1	3.09944E-4	4.36306E-3	9.39846E-2	2.73286E1	-3.26767E1	-3.26146E1	2.68168E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80002E1	-4.29153E-4	-8.80007E1	2.14577E-4	4.43459E-3	9.38654E-2	2.71759E1	-3.26629E1	-3.26187E1	2.68116E1	1.1991E-7	2.51389E-3	2.51389E-3	6.31675E-3	3.00939E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.8E1	-2.14577E-4	-8.80006E1	0.0E0	4.64916E-3	9.38416E-2	2.70285E1	-3.26353E1	-3.26492E1	2.67952E1	1.20177E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.02479E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.8E1	-4.52995E-4	-8.80007E1	2.38419E-4	4.57764E-3	9.40084E-2	2.71462E1	-3.26613E1	-3.26199E1	2.67953E1	1.19544E-7	2.519E-3	2.519E-3	6.34789E-3	3.03545E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80002E1	-2.6226E-4	-8.80006E1	1.43051E-4	4.55379E-3	9.41277E-2	2.7244E1	-3.26807E1	-3.26502E1	2.67945E1	1.20226E-7	2.52301E-3	2.52301E-3	6.3074E-3	3.02728E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80001E1	-3.57628E-4	-8.80006E1	2.14577E-4	4.52995E-3	9.408E-2	2.71639E1	-3.26573E1	-3.26579E1	2.67986E1	1.20171E-7	2.52106E-3	2.52106E-3	6.31321E-3	2.98161E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.79999E1	-7.15256E-4	-8.80005E1	1.43051E-4	4.52995E-3	9.41277E-2	2.71194E1	-3.26326E1	-3.26518E1	2.67962E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.98665E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80003E1	-4.29153E-4	-8.80007E1	-2.6226E-4	4.62532E-3	9.40084E-2	2.72823E1	-3.26735E1	-3.26338E1	2.68046E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.97704E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80002E1	-7.86781E-4	-8.80008E1	7.15256E-5	4.79221E-3	9.40084E-2	2.72791E1	-3.26272E1	-3.25723E1	2.6789E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80003E1	-5.72205E-4	-8.80007E1	1.19209E-4	4.57764E-3	9.38892E-2	2.71387E1	-3.26374E1	-3.262E1	2.68018E1	1.19965E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.43285E-2	-8.80004E1	-4.76837E-4	-8.80007E1	-4.76837E-5	4.79221E-3	9.40323E-2	2.74608E1	-3.26596E1	-3.26354E1	2.68124E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80003E1	-2.14577E-4	-8.80008E1	4.52995E-4	4.43459E-3	9.40561E-2	2.74599E1	-3.26545E1	-3.26493E1	2.68138E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.8E1	-1.90735E-4	-8.80008E1	4.29153E-4	4.31538E-3	9.39608E-2	2.7359E1	-3.26695E1	-3.26272E1	2.67876E1	1.19822E-7	2.5165E-3	2.5165E-3	6.32273E-3	3.00392E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80004E1	-4.76837E-5	-8.80005E1	1.19209E-4	4.673E-3	9.39131E-2	2.74083E1	-3.26567E1	-3.26278E1	2.6801E1	1.19937E-7	2.51498E-3	2.51498E-3	6.31879E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80003E1	-2.38419E-5	-8.80005E1	7.15256E-5	4.673E-3	9.41038E-2	2.75322E1	-3.26809E1	-3.2662E1	2.67972E1	1.20344E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.01356E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80003E1	-1.19209E-4	-8.80005E1	2.6226E-4	4.33922E-3	9.40084E-2	2.74908E1	-3.26206E1	-3.26326E1	2.6789E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.97704E-1
