[Scan]
initial_time=2016-01-28T21:51:09
final_time=2016-01-28T21:51:29
ip_count=19
run=1026
dataset=9
scan=659
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.53334E-2
qbias_imon=-3.7975E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-7.02572E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.41792E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.10272E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.6388E-8
mult1=-1.03304E-8
mult2=-2.89028E-9
rf_tmon=-4.93901E-3
rf_agc=3.24143E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=5.42033E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.18344E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02018E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=1.09387E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06546E0
lens1_imon=1.39295E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64428E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0418E1
cs_ea2_imon=1.39579E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.04721E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.1234E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.30536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=2.4792E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=9.39909E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93562E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=1.96242E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.87251E-8
tplens_vset=1.4E-1
tplens_vmon=1.66149E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25803E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27041E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02881E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=8.53074E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23853E0
ionrepsh_imon=8.44345E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44441E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.3485E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74968E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.83953E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.09291E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86855E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.36393E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.96044E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4469E0
defgridb_imon=6.2561E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.40804E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0793E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59906E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31744E1
cs_fil1_imon=6.83649E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.55748E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61606E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.24363E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.2114E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.66286E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21771E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.14553E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.8E1	-7.15256E-4	-8.80007E1	4.29153E-4	4.64916E-3	9.3627E-2	2.72048E1	-3.26554E1	-3.26452E1	2.68157E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.23189E-2	-8.8E1	-5.72205E-4	-8.80005E1	4.29153E-4	4.95911E-3	9.3627E-2	2.72482E1	-3.26689E1	-3.26291E1	2.67932E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.8E1	-6.4373E-4	-8.80004E1	1.43051E-4	4.74453E-3	9.37939E-2	2.71139E1	-3.26892E1	-3.26335E1	2.6814E1	1.20031E-7	2.5147E-3	2.5147E-3	6.29067E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80002E1	-4.29153E-4	-8.80004E1	2.38419E-4	5.07832E-3	9.40084E-2	2.72426E1	-3.26549E1	-3.26543E1	2.68142E1	1.19991E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.97843E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.79999E1	-2.6226E-4	-8.80004E1	2.14577E-4	4.74453E-3	9.36508E-2	2.72066E1	-3.26638E1	-3.26207E1	2.68094E1	1.19809E-7	2.51334E-3	2.51334E-3	6.34588E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.8E1	-5.72205E-4	-8.80004E1	9.53674E-5	4.76837E-3	9.38177E-2	2.7141E1	-3.26927E1	-3.26083E1	2.68038E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.79998E1	-5.00679E-4	-8.80005E1	3.09944E-4	4.43459E-3	9.38654E-2	2.71818E1	-3.2649E1	-3.25942E1	2.68088E1	1.19809E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.8E1	-5.96046E-4	-8.80005E1	1.43051E-4	5.14984E-3	9.40084E-2	2.71417E1	-3.26425E1	-3.26071E1	2.68136E1	1.20017E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.8E1	-6.4373E-4	-8.80004E1	3.57628E-4	4.98295E-3	9.38416E-2	2.73623E1	-3.26301E1	-3.26467E1	2.68047E1	1.198E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80003E1	-3.33786E-4	-8.80005E1	7.15256E-5	5.07832E-3	9.38416E-2	2.74721E1	-3.26374E1	-3.26398E1	2.68202E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00966E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80002E1	-6.19888E-4	-8.80009E1	1.19209E-4	4.8399E-3	9.38654E-2	2.73571E1	-3.26432E1	-3.26395E1	2.67857E1	1.19757E-7	2.50898E-3	2.50898E-3	6.32936E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80001E1	-7.15256E-4	-8.80005E1	2.6226E-4	4.86374E-3	9.36508E-2	2.73375E1	-3.26608E1	-3.26886E1	2.67868E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80002E1	-9.53674E-4	-8.80004E1	5.00679E-4	4.88758E-3	9.37939E-2	2.74331E1	-3.26597E1	-3.27738E1	2.68058E1	1.20293E-7	2.52131E-3	2.52131E-3	6.3074E-3	2.99343E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80004E1	-6.19888E-4	-8.80005E1	3.8147E-4	4.93526E-3	9.377E-2	2.73976E1	-3.26789E1	-3.2647E1	2.68034E1	1.20191E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99348E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80004E1	-3.57628E-4	-8.80005E1	5.00679E-4	4.31538E-3	9.377E-2	2.73249E1	-3.26759E1	-3.26621E1	2.67962E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80006E1	-2.86102E-4	-8.80005E1	6.67572E-4	4.48227E-3	9.39131E-2	2.73877E1	-3.26596E1	-3.26236E1	2.67885E1	1.20069E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01609E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80005E1	-3.33786E-4	-8.80006E1	2.86102E-4	4.72069E-3	9.39131E-2	2.74104E1	-3.26658E1	-3.26064E1	2.6802E1	1.20004E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.48695E-2	-8.80006E1	-3.8147E-4	-8.80008E1	4.52995E-4	4.79221E-3	9.408E-2	2.74944E1	-3.26585E1	-3.26404E1	2.67887E1	1.19601E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80004E1	-4.52995E-4	-8.80005E1	5.72205E-4	5.03063E-3	9.40084E-2	2.74248E1	-3.26626E1	-3.26012E1	2.68076E1	1.20278E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.53334E-2	-8.80001E1	-4.76837E-4	-8.80006E1	5.24521E-4	5.17368E-3	9.408E-2	2.74968E1	-3.27041E1	-3.25803E1	2.6795E1	1.20311E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1
