[Scan]
initial_time=2016-01-28T21:51:36
final_time=2016-01-28T21:51:55
ip_count=19
run=1026
dataset=9
scan=660
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.86485E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-7.35891E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.45898E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.05169E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.6449E-8
mult1=-9.83103E-9
mult2=-2.68939E-9
rf_tmon=-4.49712E-3
rf_agc=3.27591E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.47409E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.65311E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19622E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.19497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=1.10022E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09783E0
lens1_imon=1.34812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03396E1
cs_ea2_imon=1.41854E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.1201E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10985E1
os_restr1_imon=4.31004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=2.46974E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21244E0
cs_ionrep_imon=9.39798E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.88108E-8
tplens_vset=1.4E-1
tplens_vmon=1.59277E0
tplens_imon=-4.47149E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26076E1
iondef3_imon=1.51515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56201E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98678E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=8.94475E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=8.25881E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33592E1
lens5b_imon=2.21163E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44496E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00799E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10583E1
os_restr2_imon=3.36832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01629E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74024E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.85563E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.09231E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-7.995E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-9.18431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86993E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.68563E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.58972E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.50538E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=5.97327E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.42084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08452E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59903E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31761E1
cs_fil1_imon=8.07986E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.17907E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61587E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1184E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60711E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.26674E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56269E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.03185E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.54196E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80002E1	-8.34465E-4	-8.80004E1	5.00679E-4	5.05447E-3	9.38177E-2	2.73399E1	-3.26396E1	-3.26437E1	2.67607E1	1.19902E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.00453E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80003E1	-4.29153E-4	-8.80009E1	4.29153E-4	4.86374E-3	9.34601E-2	2.74012E1	-3.26699E1	-3.26056E1	2.68172E1	1.19851E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.47149E-2	-8.80002E1	-2.38419E-4	-8.80008E1	2.38419E-4	4.88758E-3	9.37223E-2	2.72614E1	-3.26301E1	-3.26703E1	2.68082E1	1.20031E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80005E1	-3.33786E-4	-8.80008E1	4.52995E-4	4.86374E-3	9.38892E-2	2.71297E1	-3.26597E1	-3.26681E1	2.67902E1	1.20166E-7	2.52026E-3	2.52026E-3	6.30197E-3	3.00637E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80001E1	-4.52995E-4	-8.80006E1	1.90735E-4	4.52995E-3	9.377E-2	2.74532E1	-3.26797E1	-3.26012E1	2.67845E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.79999E1	-6.19888E-4	-8.80007E1	-4.76837E-5	4.79221E-3	9.40323E-2	2.73892E1	-3.26621E1	-3.26434E1	2.68106E1	1.19991E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.00097E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.79999E1	-5.24521E-4	-8.80005E1	2.86102E-4	4.98295E-3	9.41038E-2	2.74072E1	-3.26338E1	-3.2641E1	2.67968E1	1.20122E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80001E1	-5.00679E-4	-8.80003E1	1.90735E-4	4.81606E-3	9.40323E-2	2.7242E1	-3.26518E1	-3.26266E1	2.67968E1	1.19757E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80002E1	-3.8147E-4	-8.80005E1	3.57628E-4	4.43459E-3	9.39369E-2	2.72552E1	-3.26747E1	-3.25924E1	2.67926E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.8E1	-6.91414E-4	-8.80004E1	9.53674E-5	4.52995E-3	9.39369E-2	2.73759E1	-3.26697E1	-3.26172E1	2.67992E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.97963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80001E1	-5.48363E-4	-8.80006E1	2.86102E-4	4.673E-3	9.37462E-2	2.71711E1	-3.26392E1	-3.26086E1	2.68118E1	1.19705E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80001E1	-4.76837E-4	-8.80004E1	9.53674E-5	4.98295E-3	9.38177E-2	2.73596E1	-3.26274E1	-3.26448E1	2.68068E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80003E1	-5.00679E-4	-8.80004E1	-4.76837E-5	5.24521E-3	9.3627E-2	2.71957E1	-3.26362E1	-3.26134E1	2.67764E1	1.19696E-7	2.51733E-3	2.51733E-3	6.32888E-3	2.99871E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80004E1	-6.19888E-4	-8.80006E1	2.38419E-4	4.72069E-3	9.38892E-2	2.73642E1	-3.26492E1	-3.26556E1	2.68036E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.04241E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80004E1	-5.00679E-4	-8.80005E1	-7.15256E-5	4.52995E-3	9.38177E-2	2.74482E1	-3.26871E1	-3.26152E1	2.68335E1	1.19979E-7	2.51783E-3	2.51783E-3	6.3074E-3	2.99506E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80003E1	-7.62939E-4	-8.80008E1	-4.76837E-5	4.79221E-3	9.3627E-2	2.72234E1	-3.26759E1	-3.26368E1	2.68088E1	1.20005E-7	2.5199E-3	2.5199E-3	6.33648E-3	2.9871E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80002E1	-6.19888E-4	-8.80007E1	3.57628E-4	4.60148E-3	9.39846E-2	2.73003E1	-3.26506E1	-3.26374E1	2.67866E1	1.20084E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.98819E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80003E1	-9.05991E-4	-8.80007E1	4.52995E-4	4.91142E-3	9.39608E-2	2.73236E1	-3.2644E1	-3.26341E1	2.6803E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9892E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80003E1	-6.67572E-4	-8.80007E1	2.6226E-4	4.95911E-3	9.39131E-2	2.72614E1	-3.27003E1	-3.25953E1	2.67943E1	1.19941E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80002E1	-5.96046E-4	-8.80004E1	3.33786E-4	4.41074E-3	9.408E-2	2.74024E1	-3.26585E1	-3.26076E1	2.68082E1	1.20226E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.03185E-1
