[Scan]
initial_time=2016-01-28T21:52:03
final_time=2016-01-28T21:52:22
ip_count=19
run=1026
dataset=9
scan=661
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.79303E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-7.24649E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.47541E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.03092E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.63391E-8
mult1=-9.93304E-9
mult2=-2.83838E-9
rf_tmon=-4.59654E-3
rf_agc=3.25165E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.16522E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66107E0
bslens_imon=2.80928E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20234E1
lens5a_imon=1.97419E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05152E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53968E1
cs_ef1b_imon=3.18165E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04548E1
cs_ea1_imon=1.08741E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10202E0
lens1_imon=1.58913E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0387E1
cs_ea2_imon=1.4173E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.04125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.11997E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=4.31528E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14952E1
os_ea1_imon=2.46155E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63664E1
os_ef1bup_imon=3.10311E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23124E0
cs_ionrep_imon=9.47317E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=1.95906E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.87288E-8
tplens_vset=1.4E-1
tplens_vmon=1.65766E0
tplens_imon=-2.32397E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.49969E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.56782E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98582E-4
ql6_vset=1.0E-1
ql6_vmon=9.42469E-2
ql6_imon=8.43585E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27006E0
ionrepsh_imon=8.52416E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74449E1
cs_ef2b_imon=3.13717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44966E0
os_ea2_imon=-6.3216E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00588E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.19104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0534E-1
os_ef2bup_imon=-5.32698E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=3.36584E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.31771E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.09077E-5
iondef1_vset=2.763E1
iondef1_vmon=2.70828E1
iondef1_imon=1.09784E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.10554E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.79745E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.08914E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11277E0
cs_ionaccel_imon=-8.09154E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.78167E-6
window_vset=0.0E0
window_vmon=2.28112E-1
window_imon=-8.96035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86715E1
mask2_imon=-7.08371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.56821E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.72001E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.33183E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50221E0
defgridb_imon=6.16034E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33178E1
os_fil1_imon=9.40822E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07908E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59869E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31753E1
cs_fil1_imon=7.9593E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.37836E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61602E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06589E-2
os_fil2_imon=-2.40854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0977E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57617E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.28691E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21731E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21692E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.55934E-1
res40_imon=-2.446E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80002E1	-6.4373E-4	-8.80007E1	-1.90735E-4	4.8399E-3	9.40561E-2	2.74207E1	-3.26608E1	-3.26531E1	2.68007E1	1.20042E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.01356E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80001E1	-5.00679E-4	-8.80008E1	-4.76837E-5	4.79221E-3	9.37939E-2	2.71965E1	-3.26716E1	-3.26079E1	2.68032E1	1.19953E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00966E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.79999E1	-4.76837E-4	-8.80007E1	-2.38419E-4	5.03063E-3	9.35793E-2	2.7185E1	-3.2663E1	-3.26015E1	2.6807E1	1.20154E-7	2.52179E-3	2.52179E-3	6.3245E-3	2.9917E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.79999E1	-3.57628E-4	-8.80008E1	9.53674E-5	5.29289E-3	9.40561E-2	2.74073E1	-3.26187E1	-3.26523E1	2.68208E1	1.19841E-7	2.51498E-3	2.51498E-3	6.29684E-3	2.97843E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.79999E1	-3.33786E-4	-8.80007E1	3.33786E-4	4.86374E-3	9.37462E-2	2.74396E1	-3.26826E1	-3.26183E1	2.67962E1	1.20069E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80002E1	-3.8147E-4	-8.80007E1	3.33786E-4	4.74453E-3	9.34362E-2	2.72973E1	-3.26663E1	-3.26206E1	2.68022E1	1.19913E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.43285E-2	-8.80002E1	-4.76837E-4	-8.80004E1	2.6226E-4	5.03063E-3	9.33647E-2	2.72258E1	-3.26506E1	-3.26302E1	2.6813E1	1.19953E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80002E1	-4.52995E-4	-8.80007E1	5.48363E-4	4.72069E-3	9.3627E-2	2.73922E1	-3.26795E1	-3.26206E1	2.6825E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.79999E1	-5.72205E-4	-8.80007E1	3.57628E-4	4.91142E-3	9.38177E-2	2.72444E1	-3.26687E1	-3.25767E1	2.68124E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80003E1	-4.29153E-4	-8.80006E1	7.15256E-5	5.05447E-3	9.36747E-2	2.73333E1	-3.26651E1	-3.25906E1	2.67994E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.97704E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80005E1	-1.90735E-4	-8.80007E1	5.00679E-4	4.74453E-3	9.37223E-2	2.73629E1	-3.26779E1	-3.26384E1	2.68047E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80004E1	-4.76837E-5	-8.80007E1	4.76837E-4	5.34058E-3	9.37462E-2	2.72518E1	-3.26572E1	-3.26223E1	2.68101E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80004E1	-4.52995E-4	-8.80008E1	3.09944E-4	5.22137E-3	9.36508E-2	2.72474E1	-3.25846E1	-3.26975E1	2.67914E1	1.20244E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.0201E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80004E1	-6.4373E-4	-8.80009E1	5.00679E-4	4.88758E-3	9.37939E-2	2.74089E1	-3.26638E1	-3.26366E1	2.67872E1	1.19913E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.98481E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.43285E-2	-8.80005E1	-5.24521E-4	-8.80008E1	4.76837E-4	4.60148E-3	9.39369E-2	2.73111E1	-3.26771E1	-3.2608E1	2.67986E1	1.19953E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.9841E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.46377E-2	-8.80005E1	-4.29153E-4	-8.80008E1	4.29153E-4	4.8399E-3	9.40561E-2	2.74679E1	-3.26585E1	-3.2593E1	2.68016E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.48695E-2	-8.80007E1	-4.52995E-4	-8.80008E1	3.33786E-4	5.24521E-3	9.41753E-2	2.74201E1	-3.26579E1	-3.26119E1	2.67752E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80004E1	-9.53674E-5	-8.80006E1	4.52995E-4	4.8399E-3	9.40323E-2	2.71411E1	-3.26667E1	-3.26166E1	2.67914E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.47149E-2	-8.80003E1	-5.00679E-4	-8.80005E1	7.15256E-5	5.14984E-3	9.42469E-2	2.72288E1	-3.26729E1	-3.2638E1	2.67968E1	1.20069E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.80001E1	-5.72205E-4	-8.80004E1	3.09944E-4	4.72069E-3	9.42469E-2	2.70828E1	-3.26554E1	-3.26074E1	2.68274E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9943E-1
