[Scan]
initial_time=2016-01-28T21:52:56
final_time=2016-01-28T21:53:15
ip_count=19
run=1026
dataset=9
scan=663
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.85752E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-7.13241E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.45884E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.95684E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.6399E-8
mult1=-9.63202E-9
mult2=-2.69067E-9
rf_tmon=-4.88494E-3
rf_agc=3.2907E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.42712E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.05203E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.18164E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04558E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=1.08467E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06487E0
lens1_imon=1.40003E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.39685E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=3.04433E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.12198E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.32734E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=2.45478E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24266E0
cs_ionrep_imon=9.49466E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=1.95305E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.87658E-8
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.49383E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.58444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=8.52871E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=8.73014E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43202E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.20218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.08101E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.35535E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.31486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.09685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.86863E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.08955E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-9.76095E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.04128E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86975E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.49843E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.54987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54139E0
defgridb_imon=6.19239E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3319E1
os_fil1_imon=9.4051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07642E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60037E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.318E1
cs_fil1_imon=7.68943E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.002E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61846E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07901E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22341E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55403E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21865E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01338E-1
res40_imon=-2.33839E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80003E1	-1.19209E-4	-8.80001E1	3.09944E-4	4.31538E-3	9.377E-2	2.73099E1	-3.26567E1	-3.26434E1	2.67878E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9841E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80001E1	-9.53674E-5	-8.80007E1	2.38419E-5	4.41074E-3	9.36985E-2	2.73793E1	-3.26561E1	-3.26266E1	2.68198E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80004E1	-4.76837E-4	-8.80003E1	-1.19209E-4	4.93526E-3	9.36747E-2	2.73351E1	-3.26597E1	-3.26278E1	2.6816E1	1.20192E-7	2.51709E-3	2.51709E-3	6.30212E-3	3.00348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80003E1	-4.76837E-4	-8.80005E1	1.19209E-4	4.69685E-3	9.36747E-2	2.73195E1	-3.26699E1	-3.26362E1	2.68286E1	1.20278E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80004E1	-5.24521E-4	-8.80004E1	4.76837E-5	4.69685E-3	9.36031E-2	2.72642E1	-3.26452E1	-3.26422E1	2.67956E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80001E1	-4.52995E-4	-8.80003E1	-2.38419E-5	4.95911E-3	9.39846E-2	2.72402E1	-3.26585E1	-3.26464E1	2.68034E1	1.19861E-7	2.51552E-3	2.51552E-3	6.28552E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.8E1	-5.48363E-4	-8.80003E1	-7.15256E-5	4.60148E-3	9.36508E-2	2.70874E1	-3.26549E1	-3.26201E1	2.68047E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9926E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.49466E-2	-8.80003E1	-4.52995E-4	-8.80002E1	7.15256E-5	4.57764E-3	9.38654E-2	2.71807E1	-3.2638E1	-3.2635E1	2.67944E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.43285E-2	-8.80003E1	-2.14577E-4	-8.80002E1	4.52995E-4	4.64916E-3	9.41753E-2	2.71843E1	-3.26717E1	-3.26182E1	2.67812E1	1.20363E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.52559E-2	-8.80003E1	-4.76837E-4	-8.80004E1	4.05312E-4	4.64916E-3	9.36031E-2	2.71151E1	-3.26526E1	-3.26307E1	2.67992E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.02922E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.80004E1	-3.8147E-4	-8.80004E1	5.00679E-4	4.72069E-3	9.39131E-2	2.7149E1	-3.26719E1	-3.26523E1	2.68058E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80007E1	-5.48363E-4	-8.80005E1	3.33786E-4	4.64916E-3	9.39131E-2	2.72504E1	-3.26554E1	-3.26104E1	2.681E1	1.20191E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.99348E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80004E1	-2.14577E-4	-8.80005E1	2.14577E-4	4.91142E-3	9.38416E-2	2.72282E1	-3.26915E1	-3.26008E1	2.67962E1	1.19913E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.42513E-2	-8.80005E1	-4.29153E-4	-8.80009E1	3.57628E-4	5.03063E-3	9.3627E-2	2.73219E1	-3.26666E1	-3.26162E1	2.68256E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80003E1	-3.09944E-4	-8.80005E1	2.14577E-4	4.79221E-3	9.38177E-2	2.74049E1	-3.2656E1	-3.26211E1	2.67926E1	1.20142E-7	2.51603E-3	2.51603E-3	6.33388E-3	3.00348E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.39421E-2	-8.8E1	2.38419E-5	-8.80002E1	3.33786E-4	5.05447E-3	9.39846E-2	2.72915E1	-3.26691E1	-3.26248E1	2.67804E1	1.20244E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.0201E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80003E1	-5.48363E-4	-8.80004E1	2.14577E-4	5.03063E-3	9.38177E-2	2.72684E1	-3.26428E1	-3.262E1	2.67908E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.03286E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.8E1	-3.57628E-4	-8.80005E1	4.52995E-4	4.88758E-3	9.41277E-2	2.71411E1	-3.26638E1	-3.26189E1	2.67902E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80003E1	-3.57628E-4	-8.80005E1	6.67572E-4	4.673E-3	9.40323E-2	2.72408E1	-3.26992E1	-3.25741E1	2.67931E1	1.19953E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80002E1	-2.14577E-4	-8.8E1	3.57628E-4	4.673E-3	9.40323E-2	2.73129E1	-3.26518E1	-3.2638E1	2.68094E1	1.19851E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.9943E-1
