[Scan]
initial_time=2016-01-28T21:53:49
final_time=2016-01-28T21:54:09
ip_count=19
run=1026
dataset=9
scan=665
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.79653E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-7.59459E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.45607E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.93582E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.63474E-8
mult1=-1.00896E-8
mult2=-2.84437E-9
rf_tmon=-3.9116E-3
rf_agc=3.26847E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.47302E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62228E0
bslens_imon=2.50531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20217E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.18416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0457E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=1.09806E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05217E0
lens1_imon=1.39138E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.40664E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=1.12388E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15197E1
os_ea1_imon=2.46794E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=9.49171E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.96818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.87253E-8
tplens_vset=1.4E-1
tplens_vmon=1.64804E0
tplens_imon=-4.36334E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26086E1
iondef3_imon=1.51551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.59554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.52191E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=8.4643E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43355E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.3676E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.32307E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74823E1
iondef1_imon=1.08147E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.85907E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.09658E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-8.46352E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39297E-4
mask2_vset=0.0E0
mask2_vmon=-1.86993E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.79738E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.04394E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33185E1
os_fil1_imon=9.41225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08206E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59895E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31792E1
cs_fil1_imon=7.26296E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.19108E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61559E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.77339E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27321E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44856E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21736E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25965E-1
res40_imon=-2.29515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80005E1	-8.10623E-4	-8.80004E1	2.86102E-4	4.55379E-3	9.38416E-2	2.74138E1	-3.26434E1	-3.2623E1	2.67938E1	1.20122E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00563E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80004E1	-5.24521E-4	-8.80007E1	2.14577E-4	4.76837E-3	9.38892E-2	2.72323E1	-3.26474E1	-3.26542E1	2.68028E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80004E1	-4.52995E-4	-8.80004E1	5.72205E-4	4.48227E-3	9.39846E-2	2.73109E1	-3.26585E1	-3.26324E1	2.67992E1	1.19978E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.01209E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80004E1	-3.09944E-4	-8.80006E1	4.52995E-4	4.55379E-3	9.40323E-2	2.73225E1	-3.26609E1	-3.26554E1	2.67902E1	1.20142E-7	2.51182E-3	2.51182E-3	6.27577E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80003E1	-2.86102E-4	-8.80004E1	4.29153E-4	4.36306E-3	9.40323E-2	2.73057E1	-3.26997E1	-3.26048E1	2.68238E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.39421E-2	-8.80004E1	-1.66893E-4	-8.80002E1	2.38419E-4	4.64916E-3	9.39131E-2	2.72794E1	-3.26713E1	-3.26083E1	2.67944E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80004E1	-4.76837E-4	-8.80002E1	5.48363E-4	4.74453E-3	9.38654E-2	2.72552E1	-3.26693E1	-3.26128E1	2.68188E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99613E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80006E1	-6.67572E-4	-8.80008E1	5.24521E-4	4.43459E-3	9.38654E-2	2.72979E1	-3.26434E1	-3.26272E1	2.68172E1	1.20148E-7	2.51771E-3	2.51771E-3	6.30466E-3	3.02527E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80006E1	-8.10623E-4	-8.80006E1	3.33786E-4	4.76837E-3	9.39608E-2	2.72984E1	-3.26548E1	-3.26162E1	2.67848E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80002E1	-5.24521E-4	-8.80005E1	4.52995E-4	4.52995E-3	9.36031E-2	2.73153E1	-3.26885E1	-3.26152E1	2.68178E1	1.19872E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01209E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80005E1	-8.34465E-4	-8.80005E1	1.43051E-4	4.43459E-3	9.37462E-2	2.72931E1	-3.26651E1	-3.25912E1	2.68046E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80007E1	-6.67572E-4	-8.80007E1	2.38419E-5	4.50611E-3	9.38654E-2	2.7399E1	-3.26874E1	-3.26127E1	2.68076E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80007E1	-7.15256E-4	-8.80006E1	3.8147E-4	4.3869E-3	9.36508E-2	2.72805E1	-3.26422E1	-3.26567E1	2.68172E1	1.19891E-7	2.51393E-3	2.51393E-3	6.3445E-3	2.99343E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80006E1	-5.96046E-4	-8.80004E1	2.14577E-4	4.3869E-3	9.38177E-2	2.72166E1	-3.26809E1	-3.26331E1	2.68364E1	1.20435E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80006E1	-3.57628E-4	-8.80007E1	5.48363E-4	4.43459E-3	9.36985E-2	2.73862E1	-3.27029E1	-3.26326E1	2.67776E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80008E1	-3.8147E-4	-8.80007E1	5.00679E-4	4.69685E-3	9.38892E-2	2.72603E1	-3.26752E1	-3.26098E1	2.67812E1	1.19965E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80004E1	-4.52995E-4	-8.80005E1	6.4373E-4	4.60148E-3	9.40323E-2	2.73985E1	-3.26416E1	-3.26267E1	2.67981E1	1.19813E-7	2.51923E-3	2.51923E-3	6.31242E-3	3.00054E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80004E1	-5.72205E-4	-8.80004E1	5.96046E-4	4.72069E-3	9.37939E-2	2.73092E1	-3.2649E1	-3.26697E1	2.68053E1	1.1992E-7	2.52432E-3	2.52432E-3	6.3074E-3	3.01464E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80006E1	-7.86781E-4	-8.80009E1	5.24521E-4	4.43459E-3	9.377E-2	2.72656E1	-3.26478E1	-3.2649E1	2.67974E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80005E1	-8.82149E-4	-8.80007E1	5.24521E-4	4.60148E-3	9.3627E-2	2.74823E1	-3.26639E1	-3.26086E1	2.6807E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1
