[Scan]
initial_time=2016-01-28T21:54:43
final_time=2016-01-28T21:55:02
ip_count=19
run=1026
dataset=9
scan=667
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.77837E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-6.73604E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.42177E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.91842E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.64142E-8
mult1=-9.93304E-9
mult2=-2.71262E-9
rf_tmon=-4.51843E-3
rf_agc=3.33516E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.59938E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.20398E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=1.09373E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0708E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.41926E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.04433E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.12313E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10997E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=2.48416E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=9.52055E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=1.98044E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.88192E-8
tplens_vset=1.4E-1
tplens_vmon=1.65165E0
tplens_imon=-2.02012E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26068E1
iondef3_imon=1.48739E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.58797E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=8.83007E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=8.53639E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41913E0
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00716E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.20939E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.36869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.10297E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.11476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.83642E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.07772E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-9.43659E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0204E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39336E-4
mask2_vset=0.0E0
mask2_vmon=-1.86909E1
mask2_imon=-4.49916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.55585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.53564E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.27466E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.43033E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08014E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60016E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3178E1
cs_fil1_imon=6.78844E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.91478E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61555E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65609E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.91107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21668E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19358E-1
res40_imon=-2.36002E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80005E1	-5.96046E-4	-8.80002E1	7.15256E-5	4.62532E-3	9.37223E-2	2.73169E1	-3.26579E1	-3.26042E1	2.67794E1	1.19913E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01609E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80005E1	-9.53674E-5	-8.80007E1	1.90735E-4	4.74453E-3	9.3627E-2	2.73057E1	-3.26543E1	-3.26506E1	2.68154E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80005E1	4.76837E-5	-8.80003E1	1.43051E-4	5.03063E-3	9.33886E-2	2.73092E1	-3.26614E1	-3.26396E1	2.68128E1	1.20017E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80007E1	0.0E0	-8.80005E1	3.33786E-4	5.17368E-3	9.37223E-2	2.72949E1	-3.26224E1	-3.26554E1	2.68046E1	1.19851E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80003E1	-2.14577E-4	-8.80007E1	-2.38419E-5	4.69685E-3	9.41277E-2	2.72809E1	-3.26248E1	-3.2639E1	2.67986E1	1.20122E-7	2.5199E-3	2.5199E-3	6.28552E-3	2.97704E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80005E1	-4.52995E-4	-8.80007E1	9.53674E-5	5.05447E-3	9.408E-2	2.73039E1	-3.26597E1	-3.26014E1	2.6807E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80003E1	-2.38419E-4	-8.80007E1	3.33786E-4	4.91142E-3	9.36508E-2	2.72745E1	-3.26404E1	-3.26224E1	2.68244E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80004E1	-1.43051E-4	-8.80004E1	3.09944E-4	4.88758E-3	9.38416E-2	2.72931E1	-3.2659E1	-3.26146E1	2.68104E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80004E1	-3.8147E-4	-8.80002E1	3.8147E-4	4.98295E-3	9.38416E-2	2.73953E1	-3.26636E1	-3.25988E1	2.67946E1	1.19979E-7	2.51783E-3	2.51783E-3	6.34385E-3	3.01733E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.47149E-2	-8.80008E1	-1.43051E-4	-8.80004E1	3.33786E-4	4.86374E-3	9.40084E-2	2.72859E1	-3.26675E1	-3.26152E1	2.67986E1	1.2006E-7	2.51527E-3	2.51527E-3	6.33648E-3	3.0147E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.47149E-2	-8.80009E1	-7.15256E-5	-8.80005E1	9.53674E-5	4.79221E-3	9.39608E-2	2.7228E1	-3.26839E1	-3.26474E1	2.67885E1	1.19925E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.00942E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80009E1	2.38419E-5	-8.80007E1	2.14577E-4	4.52995E-3	9.39608E-2	2.74132E1	-3.2653E1	-3.26482E1	2.68052E1	1.20293E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80004E1	-1.43051E-4	-8.80005E1	2.86102E-4	4.98295E-3	9.36508E-2	2.73496E1	-3.26807E1	-3.26002E1	2.67962E1	1.19861E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80004E1	-1.66893E-4	-8.80005E1	1.90735E-4	4.72069E-3	9.36985E-2	2.72853E1	-3.26585E1	-3.26026E1	2.68028E1	1.19705E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02659E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80006E1	-2.86102E-4	-8.80006E1	4.76837E-4	4.74453E-3	9.36747E-2	2.72738E1	-3.26614E1	-3.26113E1	2.68022E1	1.20269E-7	2.51863E-3	2.51863E-3	6.33188E-3	3.03366E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80009E1	-3.33786E-4	-8.80003E1	1.43051E-4	4.88758E-3	9.38416E-2	2.73743E1	-3.2697E1	-3.26174E1	2.67992E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.8001E1	-2.6226E-4	-8.80004E1	2.38419E-4	4.36306E-3	9.38654E-2	2.72066E1	-3.26855E1	-3.2599E1	2.6804E1	1.19757E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80007E1	1.43051E-4	-8.80003E1	2.86102E-4	4.41074E-3	9.41992E-2	2.72408E1	-3.2659E1	-3.26366E1	2.68046E1	1.20226E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80005E1	-1.43051E-4	-8.80002E1	4.29153E-4	4.55379E-3	9.39369E-2	2.73464E1	-3.26921E1	-3.26301E1	2.68007E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80006E1	-2.6226E-4	-8.8E1	4.05312E-4	4.48227E-3	9.38416E-2	2.72931E1	-3.26549E1	-3.26068E1	2.6783E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
