[Scan]
initial_time=2016-01-28T21:55:09
final_time=2016-01-28T21:55:29
ip_count=19
run=1026
dataset=9
scan=668
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.86444E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-6.80649E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.41793E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.90482E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.64092E-8
mult1=-9.77126E-9
mult2=-2.94471E-9
rf_tmon=-4.31481E-3
rf_agc=3.40701E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.19514E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67447E0
bslens_imon=2.70253E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=2.00456E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53358E1
cs_ef1b_imon=3.17191E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02404E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04734E1
cs_ea1_imon=1.0829E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07843E0
lens1_imon=1.56992E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65041E1
os_ef1alow_imon=3.00108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.39295E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.02775E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.12052E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.32374E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15589E1
os_ea1_imon=2.46929E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23853E0
cs_ionrep_imon=9.43803E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=1.97719E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.87391E-8
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=-1.32535E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.48321E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2652E1
iondef2_imon=1.57488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.58247E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22614E0
ionrepsh_imon=8.6452E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4562E0
os_ea2_imon=-5.36028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10141E0
os_ef2alow_imon=-2.29154E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10607E1
os_restr2_imon=3.35175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.07847E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.1144E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.86579E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.08582E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-9.50867E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47507E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.46439E-6
window_vset=0.0E0
window_vmon=2.3356E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.43118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.4897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.54444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=6.33043E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.42186E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07906E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59909E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31804E1
cs_fil1_imon=6.45207E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=7.82758E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61666E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14232E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24143E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.67425E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-2.91825E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54467E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21786E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33461E-3
inlet_lpb_pmon=3.0012E-1
chamber_ion_pmon=1.2014E-7
chamber_cvt_pmon=2.51322E-3
foreline_cvt_pmon=2.51322E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.76711E-1
res40_imon=-2.10414E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.44831E-2	-8.80006E1	-7.15256E-5	-8.80006E1	3.8147E-4	4.57764E-3	9.39369E-2	2.73634E1	-3.26561E1	-3.26176E1	2.68148E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.44831E-2	-8.80008E1	-1.90735E-4	-8.80008E1	5.48363E-4	4.673E-3	9.39846E-2	2.72889E1	-3.26837E1	-3.26296E1	2.67836E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80011E1	-2.6226E-4	-8.80003E1	3.33786E-4	5.03063E-3	9.40323E-2	2.74741E1	-3.26536E1	-3.26419E1	2.67914E1	1.20017E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01085E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80007E1	-5.00679E-4	-8.80004E1	2.38419E-4	5.03063E-3	9.40323E-2	2.72101E1	-3.26708E1	-3.26231E1	2.67938E1	1.19713E-7	2.5225E-3	2.5225E-3	6.30182E-3	3.00942E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80007E1	-4.52995E-4	-8.80005E1	3.09944E-4	4.8399E-3	9.36508E-2	2.73228E1	-3.26703E1	-3.26331E1	2.67931E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.80005E1	-4.76837E-4	-8.80006E1	4.05312E-4	4.93526E-3	9.37462E-2	2.73195E1	-3.26813E1	-3.26332E1	2.67914E1	1.20004E-7	2.51578E-3	2.51578E-3	6.31817E-3	3.01352E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80007E1	-4.29153E-4	-8.80003E1	3.8147E-4	4.93526E-3	9.36747E-2	2.70419E1	-3.26561E1	-3.26134E1	2.67824E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80008E1	-3.57628E-4	-8.80007E1	1.19209E-4	4.76837E-3	9.38654E-2	2.72174E1	-3.26735E1	-3.26428E1	2.68052E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.45602E-2	-8.80009E1	-3.8147E-4	-8.80003E1	1.19209E-4	4.93526E-3	9.37462E-2	2.73782E1	-3.26626E1	-3.25841E1	2.68215E1	1.19713E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00942E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80009E1	-4.05312E-4	-8.80007E1	2.6226E-4	5.05447E-3	9.377E-2	2.71747E1	-3.26793E1	-3.25954E1	2.68238E1	1.20243E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.01104E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.8001E1	-4.05312E-4	-8.80007E1	3.8147E-4	5.10216E-3	9.40084E-2	2.73364E1	-3.2659E1	-3.2672E1	2.6777E1	1.20137E-7	2.51136E-3	2.51136E-3	6.29624E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80012E1	-3.33786E-4	-8.80006E1	2.86102E-4	5.07832E-3	9.42707E-2	2.72582E1	-3.26873E1	-3.26092E1	2.68001E1	1.20122E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80007E1	-4.29153E-4	-8.80005E1	4.29153E-4	4.74453E-3	9.39131E-2	2.73105E1	-3.26687E1	-3.26518E1	2.68022E1	1.2026E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.43285E-2	-8.80009E1	-2.6226E-4	-8.80004E1	7.15256E-5	4.3869E-3	9.39369E-2	2.73195E1	-3.26549E1	-3.26446E1	2.67872E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80008E1	-5.72205E-4	-8.80003E1	3.09944E-4	4.76837E-3	9.39846E-2	2.72927E1	-3.26502E1	-3.26396E1	2.68004E1	1.19913E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.45602E-2	-8.80007E1	-8.82149E-4	-8.80003E1	3.09944E-4	4.81606E-3	9.38892E-2	2.73488E1	-3.2649E1	-3.26284E1	2.68136E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.8001E1	-8.58307E-4	-8.80005E1	9.53674E-5	4.55379E-3	9.38416E-2	2.73045E1	-3.26681E1	-3.26302E1	2.68022E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80006E1	-5.96046E-4	-8.80004E1	2.38419E-4	4.673E-3	9.37939E-2	2.73104E1	-3.26543E1	-3.26272E1	2.68076E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.8E1	-7.15256E-4	-8.80004E1	1.43051E-4	4.57764E-3	9.38654E-2	2.72696E1	-3.26663E1	-3.26332E1	2.67902E1	1.20004E-7	2.50775E-3	2.50775E-3	6.29665E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80003E1	-7.15256E-5	-8.80004E1	7.15256E-5	4.76837E-3	9.36985E-2	2.73057E1	-3.2652E1	-3.26089E1	2.6828E1	1.2014E-7	2.51322E-3	2.51322E-3	6.33461E-3	3.0012E-1
