[Scan]
initial_time=2016-01-28T21:56:03
final_time=2016-01-28T21:56:22
ip_count=19
run=1026
dataset=9
scan=670
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.7887E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-7.04825E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.42716E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.82493E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.63898E-8
mult1=-1.00151E-8
mult2=-2.78497E-9
rf_tmon=-4.68689E-3
rf_agc=3.38487E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.37658E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53325E1
cs_ef1b_imon=3.18339E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=1.0914E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08846E0
lens1_imon=1.5593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64736E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.39614E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84718E1
cs_ef1a_imon=3.05481E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.12279E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.32293E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15494E1
os_ea1_imon=2.48061E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.09338E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=9.48758E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=1.95871E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.87225E-8
tplens_vset=1.4E-1
tplens_vmon=1.66149E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26187E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.5855E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98314E-4
ql6_vset=1.0E-1
ql6_vmon=9.41992E-2
ql6_imon=8.36945E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=8.56733E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74692E1
cs_ef2b_imon=3.1396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45325E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00701E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.19208E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08352E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89701E-1
os_ef2bup_imon=-5.1706E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.37105E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01792E1
cs_anode2_imon=2.09494E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72739E1
iondef1_imon=1.07795E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.09581E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.8158E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.08153E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11856E0
cs_ionaccel_imon=-8.64758E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47296E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.85118E-6
window_vset=0.0E0
window_vmon=2.22899E-1
window_imon=-9.79441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39227E-4
mask2_vset=0.0E0
mask2_vmon=-1.87103E1
mask2_imon=-5.76312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.63293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.1728E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.40572E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07671E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6012E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31713E1
cs_fil1_imon=7.65811E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.3494E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61463E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.35641E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.26567E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48949E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28154E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.94132E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21578E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.34522E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80004E1	-4.05312E-4	-8.8001E1	1.66893E-4	4.88758E-3	9.41992E-2	2.74326E1	-3.26364E1	-3.2637E1	2.67926E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9841E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80007E1	-4.52995E-4	-8.80007E1	2.38419E-4	4.74453E-3	9.39369E-2	2.72727E1	-3.265E1	-3.26248E1	2.68082E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31798E-3	2.97843E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80004E1	-4.05312E-4	-8.80007E1	7.15256E-5	4.74453E-3	9.38416E-2	2.72698E1	-3.26648E1	-3.2622E1	2.67943E1	1.20209E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00966E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80005E1	-4.29153E-4	-8.80005E1	-2.38419E-4	4.74453E-3	9.39131E-2	2.74122E1	-3.26682E1	-3.26432E1	2.67957E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80005E1	-4.29153E-4	-8.80003E1	-7.15256E-5	4.48227E-3	9.377E-2	2.72143E1	-3.26726E1	-3.26502E1	2.67966E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.96929E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80006E1	-5.96046E-4	-8.80003E1	7.15256E-5	4.673E-3	9.3627E-2	2.73082E1	-3.26566E1	-3.26297E1	2.68202E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.96414E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80005E1	-5.48363E-4	-8.80002E1	3.09944E-4	5.14984E-3	9.38654E-2	2.73252E1	-3.26431E1	-3.25894E1	2.68088E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.96671E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80003E1	-4.29153E-4	-8.80003E1	2.86102E-4	4.74453E-3	9.39131E-2	2.73063E1	-3.26597E1	-3.26456E1	2.68124E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.97445E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80007E1	-3.09944E-4	-8.80005E1	3.57628E-4	4.91142E-3	9.40561E-2	2.72528E1	-3.26603E1	-3.26344E1	2.68196E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80007E1	-2.86102E-4	-8.80004E1	4.05312E-4	4.81606E-3	9.38177E-2	2.73364E1	-3.2675E1	-3.2613E1	2.68004E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80007E1	-2.38419E-4	-8.80007E1	5.72205E-4	4.93526E-3	9.36747E-2	2.72354E1	-3.26799E1	-3.26322E1	2.67967E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80007E1	-4.76837E-4	-8.80005E1	4.52995E-4	4.81606E-3	9.38892E-2	2.74384E1	-3.26302E1	-3.26084E1	2.68033E1	1.20074E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.03069E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80007E1	-2.14577E-4	-8.80004E1	4.52995E-4	4.76837E-3	9.408E-2	2.72E1	-3.26643E1	-3.26487E1	2.67835E1	1.19961E-7	2.51947E-3	2.51947E-3	6.31384E-3	3.00687E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80008E1	-5.72205E-4	-8.80003E1	1.90735E-4	4.673E-3	9.38177E-2	2.73646E1	-3.26524E1	-3.26248E1	2.6804E1	1.19851E-7	2.52029E-3	2.52029E-3	6.31925E-3	3.01326E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80008E1	-4.76837E-4	-8.80002E1	1.43051E-4	4.57764E-3	9.408E-2	2.72378E1	-3.26404E1	-3.26092E1	2.68058E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80011E1	-4.76837E-4	-8.80004E1	1.19209E-4	4.74453E-3	9.36747E-2	2.72733E1	-3.26711E1	-3.259E1	2.6795E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80007E1	-4.29153E-4	-8.80005E1	5.72205E-4	4.36306E-3	9.36985E-2	2.73423E1	-3.26909E1	-3.26142E1	2.68052E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80008E1	-4.29153E-4	-8.80001E1	2.86102E-4	4.57764E-3	9.39131E-2	2.72678E1	-3.26162E1	-3.26211E1	2.68232E1	1.19653E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80008E1	-4.05312E-4	-8.80003E1	2.6226E-4	4.48227E-3	9.39608E-2	2.72473E1	-3.26419E1	-3.26467E1	2.68028E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3514E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80005E1	-6.19888E-4	-8.80002E1	2.14577E-4	4.72069E-3	9.41992E-2	2.72739E1	-3.26615E1	-3.26187E1	2.67968E1	1.19749E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.0071E-1
