[Scan]
initial_time=2016-01-28T21:56:29
final_time=2016-01-28T21:56:49
ip_count=19
run=1026
dataset=9
scan=671
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.80466E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-6.74212E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.43955E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.84724E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.63984E-8
mult1=-1.02702E-8
mult2=-2.77251E-9
rf_tmon=-4.44033E-3
rf_agc=3.27928E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.55372E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63495E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19736E1
lens5a_imon=2.00598E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04867E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.18524E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02365E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=1.09529E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06192E0
lens1_imon=1.38587E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.42339E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.04325E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.12357E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.45301E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.639E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=9.50527E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=1.96386E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.87698E-8
tplens_vset=1.4E-1
tplens_vmon=1.63435E0
tplens_imon=-2.10402E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26422E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98495E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.57484E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28572E0
ionrepsh_imon=8.56379E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.14596E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43733E0
os_ea2_imon=-4.51082E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.2029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.37157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73339E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.8064E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.08938E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-9.47263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0204E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.90768E-6
window_vset=0.0E0
window_vmon=2.22749E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86999E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.75327E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.30211E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=6.88257E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62407E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.4054E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08002E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59995E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31727E1
cs_fil1_imon=7.25095E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.08296E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61754E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20564E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61224E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.71285E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21682E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32458E-3
inlet_lpb_pmon=2.99667E-1
chamber_ion_pmon=1.20022E-7
chamber_cvt_pmon=2.52161E-3
foreline_cvt_pmon=2.52161E-3
chamber_tmon=1.40034E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.77022E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80004E1	-3.57628E-4	-8.8E1	4.52995E-4	4.69685E-3	9.39131E-2	2.72998E1	-3.26797E1	-3.26136E1	2.67968E1	1.19913E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00041E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80002E1	-4.29153E-4	-8.80003E1	3.33786E-4	4.81606E-3	9.38892E-2	2.73075E1	-3.26687E1	-3.26452E1	2.6804E1	1.19891E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80003E1	-5.24521E-4	-8.80005E1	1.43051E-4	4.55379E-3	9.37462E-2	2.73257E1	-3.26319E1	-3.26402E1	2.6796E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9926E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80006E1	-2.38419E-4	-8.80004E1	1.90735E-4	4.8399E-3	9.408E-2	2.7255E1	-3.26785E1	-3.25906E1	2.67914E1	1.19953E-7	2.51096E-3	2.51096E-3	6.30202E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80003E1	-5.48363E-4	-8.80003E1	3.8147E-4	4.74453E-3	9.39369E-2	2.73472E1	-3.26729E1	-3.26398E1	2.68076E1	1.2033E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80004E1	-4.29153E-4	-8.80003E1	3.33786E-4	4.45843E-3	9.37223E-2	2.72528E1	-3.26416E1	-3.26446E1	2.682E1	1.20055E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80006E1	-3.33786E-4	-8.80005E1	4.52995E-4	4.81606E-3	9.38416E-2	2.73255E1	-3.26699E1	-3.26056E1	2.68117E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.01742E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80006E1	-5.96046E-4	-8.80004E1	3.09944E-4	4.64916E-3	9.38177E-2	2.7219E1	-3.26785E1	-3.26408E1	2.68124E1	1.20004E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99941E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80006E1	-3.8147E-4	-8.80004E1	3.57628E-4	4.72069E-3	9.37939E-2	2.74325E1	-3.26408E1	-3.26083E1	2.67902E1	1.19861E-7	2.51007E-3	2.51007E-3	6.28006E-3	2.97963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80004E1	-3.33786E-4	-8.80004E1	3.8147E-4	4.3869E-3	9.38177E-2	2.73069E1	-3.26777E1	-3.26122E1	2.67818E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9892E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80008E1	-5.00679E-4	-8.80005E1	3.09944E-4	4.52995E-3	9.38892E-2	2.72744E1	-3.26537E1	-3.26425E1	2.67839E1	1.198E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80006E1	-4.05312E-4	-8.80002E1	5.72205E-4	4.60148E-3	9.40084E-2	2.73772E1	-3.26849E1	-3.26284E1	2.68064E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80007E1	-6.67572E-4	-8.80007E1	4.52995E-4	4.31538E-3	9.39131E-2	2.72809E1	-3.26667E1	-3.26124E1	2.6786E1	1.20017E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80006E1	-6.19888E-4	-8.80003E1	2.38419E-4	4.45843E-3	9.39131E-2	2.72366E1	-3.26573E1	-3.26272E1	2.68166E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80005E1	-3.57628E-4	-8.80005E1	6.4373E-4	4.31538E-3	9.38416E-2	2.73532E1	-3.26615E1	-3.26272E1	2.67986E1	1.19705E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80007E1	-2.6226E-4	-8.80005E1	2.38419E-4	4.24385E-3	9.38892E-2	2.71873E1	-3.26609E1	-3.25882E1	2.68046E1	1.20174E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9874E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80009E1	-3.8147E-4	-8.80004E1	4.52995E-4	4.76837E-3	9.40084E-2	2.74193E1	-3.26765E1	-3.26248E1	2.67561E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80008E1	-4.76837E-4	-8.80003E1	4.29153E-4	4.48227E-3	9.39608E-2	2.72166E1	-3.26968E1	-3.26543E1	2.68064E1	1.20414E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80005E1	-4.29153E-4	-8.80004E1	6.4373E-4	4.24385E-3	9.39846E-2	2.74071E1	-3.26631E1	-3.25977E1	2.67924E1	1.20209E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.03545E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80005E1	-3.8147E-4	-8.80004E1	2.14577E-4	4.45843E-3	9.38654E-2	2.73339E1	-3.26579E1	-3.26422E1	2.68028E1	1.20022E-7	2.52161E-3	2.52161E-3	6.32458E-3	2.99667E-1
