[Scan]
initial_time=2016-01-28T21:56:56
final_time=2016-01-28T21:57:15
ip_count=19
run=1026
dataset=9
scan=672
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.79197E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.7625E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.45029E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.84084E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.64019E-8
mult1=-9.44025E-9
mult2=-2.67622E-9
rf_tmon=-3.50074E-3
rf_agc=3.32088E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.34964E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67755E0
bslens_imon=2.7937E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.97262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.2032E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04682E1
cs_ea1_imon=1.08328E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06419E0
lens1_imon=1.58965E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.96132E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.4052E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.05307E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.12364E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11216E1
os_restr1_imon=4.29999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=2.46758E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63896E1
os_ef1bup_imon=3.10242E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=9.50973E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=1.9528E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.88372E-8
tplens_vset=1.4E-1
tplens_vmon=1.64324E0
tplens_imon=-1.11888E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26083E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.95071E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=8.51116E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33387E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.14203E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45818E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.19382E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11016E0
os_ef2alow_imon=-2.44252E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27929E-1
os_ef2bup_imon=-5.36174E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=3.35924E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30865E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0167E1
cs_anode2_imon=2.08695E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.10762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.70287E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.09216E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11219E0
cs_ionaccel_imon=-9.27312E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.7921E-6
window_vset=0.0E0
window_vmon=1.80037E-1
window_imon=-9.89867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.3932E-4
mask2_vset=0.0E0
mask2_vmon=-1.87392E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.51762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.2278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49781E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.42049E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07682E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59944E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3172E1
cs_fil1_imon=7.11365E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.97494E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61686E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.49542E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.73085E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28403E-1
cs_fil2_imon=-2.13052E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.78493E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21674E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.85271E-1
res40_imon=-2.39039E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=226
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80007E1	-2.86102E-4	-8.80003E1	1.43051E-4	5.00679E-3	9.39608E-2	2.73562E1	-3.26759E1	-3.2608E1	2.68033E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9892E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80007E1	-4.05312E-4	-8.80005E1	9.53674E-5	5.34058E-3	9.408E-2	2.72791E1	-3.26419E1	-3.26502E1	2.67911E1	1.20383E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80006E1	-3.8147E-4	-8.80005E1	0.0E0	5.00679E-3	9.38892E-2	2.73446E1	-3.26573E1	-3.26402E1	2.68065E1	1.19953E-7	2.52008E-3	2.52008E-3	6.31278E-3	3.00838E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80007E1	-4.52995E-4	-8.80004E1	3.8147E-4	5.03063E-3	9.39369E-2	2.74241E1	-3.26452E1	-3.26597E1	2.68028E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80006E1	-5.96046E-4	-8.8E1	3.09944E-4	4.673E-3	9.38416E-2	2.73135E1	-3.26663E1	-3.2611E1	2.67926E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80006E1	-5.00679E-4	-8.79999E1	4.76837E-5	4.48227E-3	9.39131E-2	2.73381E1	-3.26608E1	-3.26549E1	2.67966E1	1.20278E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44059E-2	-8.80005E1	-5.96046E-4	-8.80002E1	2.6226E-4	4.8399E-3	9.39369E-2	2.73045E1	-3.26699E1	-3.26308E1	2.68244E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80004E1	-5.72205E-4	-8.80004E1	4.76837E-4	4.60148E-3	9.37223E-2	2.72204E1	-3.26476E1	-3.26038E1	2.67722E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80003E1	-4.05312E-4	-8.80003E1	9.53674E-5	4.8399E-3	9.4223E-2	2.73862E1	-3.26967E1	-3.26144E1	2.67955E1	1.19653E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80004E1	-4.76837E-5	-8.80003E1	4.05312E-4	4.41074E-3	9.40323E-2	2.72359E1	-3.26425E1	-3.26242E1	2.67789E1	1.19646E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.43285E-2	-8.80002E1	-2.14577E-4	-8.80004E1	1.43051E-4	4.86374E-3	9.39131E-2	2.73484E1	-3.26579E1	-3.26561E1	2.67833E1	1.20017E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80005E1	-6.91414E-4	-8.80004E1	4.29153E-4	4.24385E-3	9.39846E-2	2.72526E1	-3.26661E1	-3.26065E1	2.67878E1	1.19705E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80008E1	-7.15256E-4	-8.80006E1	3.57628E-4	4.79221E-3	9.39846E-2	2.72979E1	-3.26645E1	-3.2629E1	2.68076E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80005E1	-3.33786E-4	-8.80003E1	6.19888E-4	4.62532E-3	9.38416E-2	2.73405E1	-3.2641E1	-3.26224E1	2.68088E1	1.20137E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.01475E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80006E1	-5.24521E-4	-8.80004E1	3.09944E-4	4.69685E-3	9.39846E-2	2.72914E1	-3.2655E1	-3.26249E1	2.68076E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80007E1	-5.48363E-4	-8.80004E1	5.00679E-4	4.55379E-3	9.36747E-2	2.72564E1	-3.26734E1	-3.26472E1	2.67745E1	1.19822E-7	2.51549E-3	2.51549E-3	6.3023E-3	3.00392E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80008E1	-6.67572E-4	-8.80005E1	2.14577E-4	4.52995E-3	9.40323E-2	2.73945E1	-3.26731E1	-3.26413E1	2.67914E1	1.19674E-7	2.51758E-3	2.51758E-3	6.32483E-3	3.00916E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80007E1	-6.19888E-4	-8.80003E1	1.90735E-4	4.41074E-3	9.39369E-2	2.72271E1	-3.26624E1	-3.26209E1	2.67997E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80011E1	-4.52995E-4	-8.80003E1	1.19209E-4	4.41074E-3	9.36985E-2	2.73505E1	-3.26691E1	-3.25971E1	2.68052E1	1.1988E-7	2.52197E-3	2.52197E-3	6.3074E-3	3.01485E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.8001E1	-6.67572E-4	-8.80004E1	4.76837E-4	4.64916E-3	9.38654E-2	2.73027E1	-3.26679E1	-3.26083E1	2.67956E1	1.19913E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.9978E-1
