[Scan]
initial_time=2016-01-28T21:57:22
final_time=2016-01-28T21:57:42
ip_count=19
run=1026
dataset=9
scan=673
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.8152E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-6.58536E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.43623E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.8464E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.64143E-8
mult1=-1.00414E-8
mult2=-2.84437E-9
rf_tmon=-3.31678E-3
rf_agc=3.34718E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.54478E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63967E0
bslens_imon=2.59989E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20161E1
lens5a_imon=1.99571E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.17407E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04575E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=1.07547E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09731E0
lens1_imon=1.42127E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.38623E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.12317E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.31977E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15359E1
os_ea1_imon=2.46893E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=9.62916E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93547E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.96278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.87965E-8
tplens_vset=1.4E-1
tplens_vmon=1.66798E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26308E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.42469E-2
ql6_imon=8.68523E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26567E0
ionrepsh_imon=8.57087E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33528E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74898E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42907E0
os_ea2_imon=-5.14791E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00449E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70975E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.36796E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31521E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.08715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67794E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.84272E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.07906E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-9.36451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02038E2
cs_ionfocb_imon=1.47471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.4197E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86764E1
mask2_imon=-4.89559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.50905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.89673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=6.30565E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33175E1
os_fil1_imon=9.41687E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07455E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60013E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31789E1
cs_fil1_imon=7.17887E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.16105E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6164E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05368E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68691E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.01725E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64077E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21728E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06744E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80006E1	-5.96046E-4	-8.80002E1	2.6226E-4	4.3869E-3	9.39131E-2	2.73966E1	-3.26735E1	-3.26254E1	2.68099E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80008E1	-4.52995E-4	-8.80003E1	4.05312E-4	4.72069E-3	9.41753E-2	2.71857E1	-3.26676E1	-3.26376E1	2.68126E1	1.20142E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.98342E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80008E1	-4.76837E-4	-8.80003E1	3.09944E-4	4.43459E-3	9.36031E-2	2.7403E1	-3.26756E1	-3.26006E1	2.6822E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.98554E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80006E1	-4.76837E-4	-8.80005E1	2.6226E-4	4.62532E-3	9.36747E-2	2.71997E1	-3.26625E1	-3.26086E1	2.68314E1	1.19851E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80006E1	-5.96046E-4	-8.80003E1	1.19209E-4	4.52995E-3	9.36508E-2	2.73886E1	-3.26699E1	-3.2626E1	2.67968E1	1.198E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.43285E-2	-8.80008E1	-2.6226E-4	-8.80002E1	2.38419E-4	4.673E-3	9.40084E-2	2.73063E1	-3.26518E1	-3.2629E1	2.68076E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44059E-2	-8.8001E1	-2.14577E-4	-8.80004E1	1.43051E-4	4.69685E-3	9.40323E-2	2.74078E1	-3.26927E1	-3.259E1	2.68138E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.8001E1	-5.24521E-4	-8.80003E1	2.38419E-4	4.72069E-3	9.40561E-2	2.72516E1	-3.26554E1	-3.26074E1	2.67989E1	1.19713E-7	2.5225E-3	2.5225E-3	6.33538E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80007E1	-1.66893E-4	-8.80002E1	2.6226E-4	4.62532E-3	9.40084E-2	2.72445E1	-3.26278E1	-3.26272E1	2.67901E1	1.20209E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.8001E1	-5.96046E-4	-8.80005E1	1.66893E-4	4.81606E-3	9.38416E-2	2.74096E1	-3.26957E1	-3.26188E1	2.67836E1	1.19872E-7	2.51136E-3	2.51136E-3	6.30182E-3	3.0041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80007E1	-6.91414E-4	-8.80005E1	-4.76837E-5	4.74453E-3	9.39608E-2	2.72544E1	-3.26402E1	-3.26596E1	2.68007E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80007E1	-7.86781E-4	-8.80007E1	1.66893E-4	4.55379E-3	9.41992E-2	2.73736E1	-3.2647E1	-3.26296E1	2.68088E1	1.198E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.9892E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80006E1	-1.04904E-3	-8.80005E1	-7.15256E-5	4.43459E-3	9.41992E-2	2.72498E1	-3.26639E1	-3.25942E1	2.68215E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.97704E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80007E1	-7.39098E-4	-8.80004E1	0.0E0	4.52995E-3	9.40323E-2	2.74361E1	-3.26579E1	-3.26449E1	2.6792E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80008E1	-4.05312E-4	-8.80005E1	4.76837E-5	4.52995E-3	9.36985E-2	2.72402E1	-3.26609E1	-3.25997E1	2.6795E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.02769E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80007E1	-4.29153E-4	-8.80001E1	2.14577E-4	4.72069E-3	9.36508E-2	2.73753E1	-3.26797E1	-3.26077E1	2.68142E1	1.19972E-7	2.51953E-3	2.51953E-3	6.3074E-3	3.00092E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80005E1	-4.76837E-4	-8.80005E1	4.29153E-4	4.45843E-3	9.36031E-2	2.73051E1	-3.26741E1	-3.26326E1	2.67692E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.97901E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44831E-2	-8.80005E1	-6.67572E-4	-8.80003E1	3.09944E-4	4.91142E-3	9.40561E-2	2.73234E1	-3.26478E1	-3.26284E1	2.67788E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80003E1	-5.72205E-4	-8.80005E1	3.09944E-4	4.91142E-3	9.41038E-2	2.71901E1	-3.26296E1	-3.26561E1	2.68123E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80004E1	-5.48363E-4	-8.80006E1	7.15256E-5	4.86374E-3	9.42469E-2	2.72919E1	-3.26723E1	-3.26308E1	2.67794E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01223E-1
