[Scan]
initial_time=2016-01-28T21:59:36
final_time=2016-01-28T21:59:55
ip_count=19
run=1026
dataset=9
scan=678
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.83182E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.24788E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.43199E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.79752E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.64165E-8
mult1=-1.04989E-8
mult2=-2.95016E-9
rf_tmon=-4.53045E-3
rf_agc=3.27748E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.7044E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68745E0
bslens_imon=2.91844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.99925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.20398E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02383E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=1.08432E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06074E0
lens1_imon=1.4425E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.39295E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84136E1
cs_ef1a_imon=3.05154E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.12431E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.47177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=9.51235E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.88392E-8
tplens_vset=1.4E-1
tplens_vmon=1.63848E0
tplens_imon=-1.28996E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.47471E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.68416E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25033E0
ionrepsh_imon=8.75846E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.16702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74423E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43674E0
os_ea2_imon=-5.00633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00665E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.20254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.36112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01533E1
cs_anode2_imon=2.09324E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.8472E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.09871E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-7.74273E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.1494E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39322E-4
mask2_vset=0.0E0
mask2_vmon=-1.86945E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.45596E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.83302E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51777E0
defgridb_imon=6.03311E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33197E1
os_fil1_imon=9.42552E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0841E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60067E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31806E1
cs_fil1_imon=7.08276E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68963E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6154E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53125E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.26933E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21733E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.98554E-1
chamber_ion_pmon=1.19819E-7
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.9413E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.43285E-2	-8.80007E1	-5.96046E-4	-8.80003E1	3.09944E-4	4.48227E-3	9.41515E-2	2.73333E1	-3.2667E1	-3.26034E1	2.68184E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.46377E-2	-8.8001E1	-9.53674E-4	-8.80002E1	5.72205E-4	4.50611E-3	9.41038E-2	2.73742E1	-3.26747E1	-3.26236E1	2.67932E1	1.19766E-7	2.52027E-3	2.52027E-3	6.35223E-3	3.00144E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.47923E-2	-8.80009E1	-8.82149E-4	-8.80003E1	3.33786E-4	4.673E-3	9.39608E-2	2.72396E1	-3.26868E1	-3.25947E1	2.67989E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02659E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.80008E1	-7.86781E-4	-8.80005E1	2.38419E-4	4.41074E-3	9.39846E-2	2.74196E1	-3.26652E1	-3.26229E1	2.67758E1	1.19933E-7	2.51647E-3	2.51647E-3	6.30469E-3	3.02454E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80006E1	-6.4373E-4	-8.80003E1	1.19209E-4	4.69685E-3	9.39846E-2	2.73057E1	-3.26614E1	-3.26063E1	2.67974E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.43285E-2	-8.8001E1	-7.15256E-4	-8.80008E1	5.48363E-4	4.76837E-3	9.39846E-2	2.73039E1	-3.2641E1	-3.26194E1	2.68105E1	1.20092E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.01862E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.53334E-2	-8.80009E1	-7.15256E-4	-8.80004E1	5.72205E-4	4.88758E-3	9.38892E-2	2.72618E1	-3.26699E1	-3.26494E1	2.68026E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.57198E-2	-8.80012E1	-6.19888E-4	-8.80004E1	5.24521E-4	5.05447E-3	9.377E-2	2.73167E1	-3.26768E1	-3.26297E1	2.68016E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.44059E-2	-8.80011E1	-6.19888E-4	-8.80003E1	4.52995E-4	5.10216E-3	9.39131E-2	2.73777E1	-3.26296E1	-3.26661E1	2.68034E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.48695E-2	-8.80009E1	-4.76837E-4	-8.80004E1	3.57628E-4	4.95911E-3	9.39608E-2	2.73237E1	-3.26723E1	-3.26314E1	2.68088E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.44059E-2	-8.80008E1	-3.57628E-4	-8.80003E1	5.48363E-4	4.95911E-3	9.38892E-2	2.72907E1	-3.2638E1	-3.26212E1	2.67866E1	1.2033E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80008E1	-6.4373E-4	-8.8E1	3.09944E-4	4.57764E-3	9.38654E-2	2.72312E1	-3.26681E1	-3.26669E1	2.67986E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02922E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.47923E-2	-8.80011E1	-6.67572E-4	-8.80005E1	3.8147E-4	4.64916E-3	9.41038E-2	2.72414E1	-3.26254E1	-3.26567E1	2.67989E1	1.19731E-7	2.5199E-3	2.5199E-3	6.33211E-3	3.01216E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80011E1	-7.86781E-4	-8.80004E1	1.90735E-4	4.72069E-3	9.39846E-2	2.73291E1	-3.26645E1	-3.26086E1	2.68101E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80011E1	-7.15256E-4	-8.80004E1	4.76837E-4	4.62532E-3	9.39369E-2	2.73252E1	-3.2649E1	-3.26301E1	2.67914E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.8001E1	-7.62939E-4	-8.80002E1	4.76837E-4	4.88758E-3	9.39131E-2	2.73117E1	-3.26554E1	-3.26152E1	2.67956E1	1.20092E-7	2.52131E-3	2.52131E-3	6.3074E-3	2.99845E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80011E1	-1.00136E-3	-8.80003E1	5.48363E-4	5.00679E-3	9.39846E-2	2.73965E1	-3.2662E1	-3.2629E1	2.67974E1	1.19819E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80011E1	-8.82149E-4	-8.80006E1	4.52995E-4	4.79221E-3	9.38177E-2	2.72856E1	-3.26455E1	-3.2636E1	2.68036E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80009E1	-9.77516E-4	-8.80003E1	2.86102E-4	4.79221E-3	9.36508E-2	2.73231E1	-3.26957E1	-3.2638E1	2.6807E1	1.1979E-7	2.52448E-3	2.52448E-3	6.31798E-3	2.99594E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80013E1	-1.04904E-3	-8.80005E1	4.52995E-4	4.76837E-3	9.36747E-2	2.73195E1	-3.26675E1	-3.26056E1	2.67812E1	1.19819E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.98554E-1
