[Scan]
initial_time=2016-01-28T22:00:02
final_time=2016-01-28T22:00:22
ip_count=19
run=1026
dataset=9
scan=679
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.57198E-2
qbias_imon=-3.83249E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-6.34098E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.43324E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.75494E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.64208E-8
mult1=-9.68019E-9
mult2=-2.78049E-9
rf_tmon=-4.06181E-3
rf_agc=3.32975E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.36561E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6438E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=1.98687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.18849E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04554E2
lens23_imon=1.0245E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05277E1
cs_ea1_imon=1.09246E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07784E0
lens1_imon=1.56284E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.40074E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.04217E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.12477E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=2.4707E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.09803E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21139E0
cs_ionrep_imon=9.49112E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93632E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=1.96746E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.88398E-8
tplens_vset=1.4E-1
tplens_vmon=1.66621E0
tplens_imon=-2.56414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27005E1
iondef2_imon=1.56497E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=8.83889E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.258E0
ionrepsh_imon=8.46469E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44087E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.19966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83609E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.36652E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72198E1
iondef1_imon=1.08963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.81116E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.08575E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.76577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.88611E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53844E0
defgridb_imon=6.2384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33158E1
os_fil1_imon=9.40961E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59972E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31846E1
cs_fil1_imon=7.64738E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.6656E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61613E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57554E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.11937E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21647E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.96843E-1
res40_imon=-2.33119E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80011E1	-6.67572E-4	-8.80005E1	2.38419E-5	5.00679E-3	9.36031E-2	2.73057E1	-3.26561E1	-3.26032E1	2.6813E1	1.198E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01738E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80015E1	-4.05312E-4	-8.80004E1	-4.76837E-5	4.55379E-3	9.37939E-2	2.73009E1	-3.26801E1	-3.26591E1	2.6781E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80016E1	-4.05312E-4	-8.80007E1	-2.38419E-5	4.76837E-3	9.36508E-2	2.7337E1	-3.26961E1	-3.26318E1	2.68292E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00041E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.48695E-2	-8.80008E1	-5.00679E-4	-8.80002E1	3.57628E-4	4.52995E-3	9.3627E-2	2.72933E1	-3.26626E1	-3.26301E1	2.68279E1	1.20192E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.43285E-2	-8.80009E1	-4.29153E-4	-8.80007E1	4.05312E-4	4.88758E-3	9.36985E-2	2.73033E1	-3.26909E1	-3.26158E1	2.68124E1	1.20158E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.8001E1	-3.33786E-4	-8.80005E1	0.0E0	4.79221E-3	9.36747E-2	2.72336E1	-3.26554E1	-3.26296E1	2.68112E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.8001E1	-3.09944E-4	-8.80008E1	7.15256E-5	5.07832E-3	9.39131E-2	2.73664E1	-3.26579E1	-3.2593E1	2.68142E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80009E1	-2.14577E-4	-8.80007E1	0.0E0	5.17368E-3	9.39608E-2	2.72823E1	-3.26452E1	-3.26428E1	2.67884E1	1.20017E-7	2.51443E-3	2.51443E-3	6.28006E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.8001E1	-4.76837E-4	-8.80004E1	2.38419E-4	4.673E-3	9.36985E-2	2.72246E1	-3.26476E1	-3.26056E1	2.68022E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.8001E1	-5.96046E-4	-8.80005E1	2.6226E-4	4.79221E-3	9.43422E-2	2.73267E1	-3.26597E1	-3.26266E1	2.68142E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.8001E1	-8.34465E-4	-8.80008E1	4.76837E-5	4.55379E-3	9.39608E-2	2.72606E1	-3.26434E1	-3.26717E1	2.681E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.8001E1	-5.00679E-4	-8.80004E1	5.00679E-4	4.91142E-3	9.39369E-2	2.738E1	-3.26885E1	-3.26449E1	2.68082E1	1.20137E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.01209E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.8001E1	-7.86781E-4	-8.80005E1	4.76837E-4	5.05447E-3	9.39369E-2	2.737E1	-3.26271E1	-3.26232E1	2.68007E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00966E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-7.44059E-2	-8.80008E1	-8.34465E-4	-8.80004E1	4.76837E-5	5.26905E-3	9.41277E-2	2.71327E1	-3.26661E1	-3.26279E1	2.68166E1	1.1993E-7	2.51472E-3	2.51472E-3	6.33341E-3	3.01485E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80008E1	-6.19888E-4	-8.80006E1	1.43051E-4	5.07832E-3	9.39369E-2	2.73257E1	-3.26472E1	-3.26331E1	2.67792E1	1.19785E-7	2.52106E-3	2.52106E-3	6.31321E-3	2.99811E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.43285E-2	-8.80009E1	-4.05312E-4	-8.80005E1	4.76837E-5	5.17368E-3	9.39846E-2	2.7242E1	-3.26789E1	-3.26116E1	2.67649E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00966E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80006E1	-4.76837E-4	-8.80007E1	2.38419E-4	5.00679E-3	9.37223E-2	2.72516E1	-3.26579E1	-3.26218E1	2.68106E1	1.19913E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44831E-2	-8.80003E1	-6.67572E-4	-8.80008E1	3.09944E-4	5.26905E-3	9.40323E-2	2.73116E1	-3.26732E1	-3.26054E1	2.68343E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.45602E-2	-8.80006E1	-6.19888E-4	-8.80005E1	2.86102E-4	5.22137E-3	9.377E-2	2.71771E1	-3.26107E1	-3.26419E1	2.6789E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.57198E-2	-8.80006E1	-3.8147E-4	-8.80005E1	1.43051E-4	4.93526E-3	9.40084E-2	2.72198E1	-3.27005E1	-3.2611E1	2.6804E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0148E-1
