[Scan]
initial_time=2016-01-28T22:00:29
final_time=2016-01-28T22:00:48
ip_count=19
run=1026
dataset=9
scan=680
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.84778E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-6.52993E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.36412E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.77734E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.64412E-8
mult1=-9.84875E-9
mult2=-2.73658E-9
rf_tmon=-4.69868E-3
rf_agc=3.24624E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.44214E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65849E0
bslens_imon=2.66836E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19638E1
lens5a_imon=1.99339E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05081E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53823E1
cs_ef1b_imon=3.17302E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04857E1
cs_ea1_imon=1.10466E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06276E0
lens1_imon=1.66133E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64577E1
os_ef1alow_imon=2.98664E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.39029E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84132E1
cs_ef1a_imon=3.03716E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.12091E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11335E1
os_restr1_imon=4.31712E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15087E1
os_ea1_imon=2.47631E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63654E1
os_ef1bup_imon=3.09218E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23712E0
cs_ionrep_imon=9.62024E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93349E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=1.96978E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.8747E-8
tplens_vset=1.4E-1
tplens_vmon=1.66701E0
tplens_imon=-2.89086E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.49249E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.59095E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98488E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=8.43036E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28205E0
ionrepsh_imon=8.43726E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33833E1
lens5b_imon=2.18356E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74564E1
cs_ef2b_imon=3.13522E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44489E0
os_ea2_imon=-5.77343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71227E1
cs_ef2a_imon=3.18649E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07514E0
os_ef2alow_imon=-2.47701E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98879E-1
os_ef2bup_imon=-5.26523E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.36239E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.32399E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01796E1
cs_anode2_imon=2.08804E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.08332E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68032E1
iondef4_imon=1.09925E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.77711E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.07987E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11143E0
cs_ionaccel_imon=-1.00243E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02023E2
cs_ionfocb_imon=1.47312E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56299E1
einzel_imon=7.71029E-6
window_vset=0.0E0
window_vmon=2.21963E-1
window_imon=-9.53778E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86799E1
mask2_imon=-5.53322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.59495E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.16115E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.11202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58364E0
defgridb_imon=6.20607E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33188E1
os_fil1_imon=9.40337E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07254E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59775E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31864E1
cs_fil1_imon=7.66702E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.83148E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61671E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.17495E-2
os_fil2_imon=-2.40052E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24651E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.63239E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.25706E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58533E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21822E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.018E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80006E1	-1.0252E-3	-8.80003E1	-2.38419E-5	4.64916E-3	9.38654E-2	2.73098E1	-3.2688E1	-3.26225E1	2.68302E1	1.19775E-7	2.51725E-3	2.51725E-3	6.31879E-3	2.99981E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80006E1	-7.86781E-4	-8.80006E1	2.6226E-4	4.76837E-3	9.39131E-2	2.73124E1	-3.27142E1	-3.25874E1	2.68032E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03286E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80005E1	-7.15256E-4	-8.80004E1	3.09944E-4	4.86374E-3	9.40323E-2	2.72877E1	-3.26724E1	-3.26179E1	2.68047E1	1.19985E-7	2.51647E-3	2.51647E-3	6.31283E-3	3.00766E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80007E1	-5.24521E-4	-8.80004E1	1.90735E-4	4.72069E-3	9.41277E-2	2.72053E1	-3.2675E1	-3.26125E1	2.67956E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80007E1	-7.15256E-4	-8.80007E1	2.86102E-4	4.91142E-3	9.39608E-2	2.74217E1	-3.26524E1	-3.26338E1	2.6798E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80008E1	-5.72205E-4	-8.80006E1	2.38419E-4	4.86374E-3	9.36747E-2	2.72144E1	-3.26543E1	-3.25954E1	2.68226E1	1.20031E-7	2.51248E-3	2.51248E-3	6.33538E-3	3.02545E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80007E1	-5.24521E-4	-8.80004E1	-2.38419E-5	4.72069E-3	9.41038E-2	2.7367E1	-3.26437E1	-3.26284E1	2.68262E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80007E1	-6.67572E-4	-8.80006E1	1.43051E-4	4.81606E-3	9.41038E-2	2.72282E1	-3.26561E1	-3.26128E1	2.6792E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80007E1	-3.09944E-4	-8.80005E1	3.57628E-4	5.05447E-3	9.39846E-2	2.7346E1	-3.26482E1	-3.26194E1	2.68208E1	1.19861E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80009E1	-5.72205E-4	-8.80008E1	1.19209E-4	4.60148E-3	9.39131E-2	2.72138E1	-3.26579E1	-3.26536E1	2.68142E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80007E1	-4.76837E-4	-8.80007E1	7.15256E-5	4.79221E-3	9.377E-2	2.73293E1	-3.26809E1	-3.26307E1	2.68105E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80007E1	-2.6226E-4	-8.80007E1	4.76837E-5	4.62532E-3	9.377E-2	2.73327E1	-3.26669E1	-3.25966E1	2.68346E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.8001E1	-5.24521E-4	-8.80007E1	3.09944E-4	4.72069E-3	9.37462E-2	2.73051E1	-3.26597E1	-3.26383E1	2.67908E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80008E1	-5.24521E-4	-8.80005E1	4.05312E-4	4.64916E-3	9.34839E-2	2.72666E1	-3.26663E1	-3.26615E1	2.68028E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.98481E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80006E1	-4.05312E-4	-8.80006E1	3.09944E-4	4.57764E-3	9.35555E-2	2.7265E1	-3.26708E1	-3.26024E1	2.67896E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80007E1	-7.86781E-4	-8.80005E1	5.00679E-4	4.55379E-3	9.37939E-2	2.72624E1	-3.26639E1	-3.25882E1	2.68154E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80007E1	-6.19888E-4	-8.80005E1	3.09944E-4	4.55379E-3	9.36508E-2	2.73782E1	-3.26455E1	-3.26531E1	2.6801E1	1.19882E-7	2.51755E-3	2.51755E-3	6.32644E-3	3.00766E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80009E1	-5.24521E-4	-8.80005E1	4.76837E-4	4.55379E-3	9.39608E-2	2.73499E1	-3.26579E1	-3.26136E1	2.6796E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80007E1	-5.48363E-4	-8.80006E1	-2.38419E-5	4.76837E-3	9.41277E-2	2.72644E1	-3.26903E1	-3.26183E1	2.67972E1	1.20124E-7	2.52096E-3	2.52096E-3	6.31007E-3	2.99513E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80005E1	-5.24521E-4	-8.80006E1	4.52995E-4	4.8399E-3	9.39131E-2	2.73045E1	-3.26609E1	-3.2644E1	2.68032E1					
