[Scan]
initial_time=2016-01-28T22:02:15
final_time=2016-01-28T22:02:35
ip_count=19
run=1026
dataset=9
scan=684
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.81688E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.24776E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.44312E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.72011E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.63568E-8
mult1=-1.01259E-8
mult2=-2.80361E-9
rf_tmon=-4.19683E-3
rf_agc=3.35864E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.35023E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68193E0
bslens_imon=2.55552E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19793E1
lens5a_imon=1.98705E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53557E1
cs_ef1b_imon=3.18826E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=1.10305E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06957E0
lens1_imon=1.68299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.978E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03899E1
cs_ea2_imon=1.42147E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=3.03986E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.11918E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11228E1
os_restr1_imon=4.31389E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.46433E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63728E1
os_ef1bup_imon=3.09408E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23703E0
cs_ionrep_imon=9.48012E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=1.96323E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.87539E-8
tplens_vset=1.4E-1
tplens_vmon=1.6675E0
tplens_imon=-2.73007E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.48474E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98554E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.57234E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25094E0
ionrepsh_imon=8.41293E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.19458E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.1323E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42823E0
os_ea2_imon=-6.70399E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00696E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71142E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07889E0
os_ef2alow_imon=-2.43905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86805E-1
os_ef2bup_imon=-5.19492E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.35785E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.09564E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73818E1
iondef1_imon=1.09262E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.83354E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.08468E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12087E0
cs_ionaccel_imon=-9.20362E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02016E2
cs_ionfocb_imon=1.4731E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56127E1
einzel_imon=7.70522E-6
window_vset=0.0E0
window_vmon=2.24636E-1
window_imon=-9.02986E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39188E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-3.95599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.36311E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.68525E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.36311E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50221E0
defgridb_imon=6.24377E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.40051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08354E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59843E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31808E1
cs_fil1_imon=7.93613E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.25093E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61496E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00371E-2
os_fil2_imon=-2.40275E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.23092E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.63086E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.30428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0725E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21686E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03805E-1
res40_imon=-2.39734E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80011E1	-2.38419E-4	-8.80009E1	-9.53674E-5	4.8399E-3	9.36031E-2	2.73134E1	-3.26484E1	-3.26667E1	2.68208E1					
2.0E0	0.0E0	1.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80012E1	-3.57628E-4	-8.80005E1	0.0E0	4.673E-3	9.38892E-2	2.73126E1	-3.26691E1	-3.26547E1	2.68013E1	1.19851E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80009E1	-5.00679E-4	-8.80008E1	3.09944E-4	4.48227E-3	9.36985E-2	2.73016E1	-3.26735E1	-3.26173E1	2.68287E1	1.19721E-7	2.51271E-3	2.51271E-3	6.33592E-3	2.99981E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80008E1	-2.38419E-4	-8.80009E1	4.52995E-4	4.86374E-3	9.39846E-2	2.73535E1	-3.26596E1	-3.26366E1	2.67758E1	1.19841E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.8001E1	-5.96046E-4	-8.80005E1	7.15256E-5	5.126E-3	9.37939E-2	2.72979E1	-3.26488E1	-3.26404E1	2.67794E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80008E1	-4.52995E-4	-8.80002E1	2.86102E-4	4.8399E-3	9.36508E-2	2.72997E1	-3.26512E1	-3.2599E1	2.6822E1	1.19953E-7	2.51632E-3	2.51632E-3	6.35059E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80008E1	-7.15256E-4	-8.80003E1	1.90735E-4	4.91142E-3	9.41038E-2	2.73187E1	-3.26573E1	-3.26242E1	2.68142E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80009E1	-6.67572E-4	-8.80003E1	2.6226E-4	4.88758E-3	9.38892E-2	2.72308E1	-3.26602E1	-3.26284E1	2.67897E1	1.20278E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.8001E1	-7.15256E-4	-8.80005E1	3.33786E-4	4.91142E-3	9.40323E-2	2.73039E1	-3.26506E1	-3.25647E1	2.6822E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.8001E1	-2.6226E-4	-8.80006E1	4.52995E-4	4.673E-3	9.37223E-2	2.73225E1	-3.26933E1	-3.2629E1	2.678E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.97963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80011E1	-3.09944E-4	-8.80007E1	0.0E0	4.76837E-3	9.37223E-2	2.73838E1	-3.26633E1	-3.25761E1	2.67992E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.8001E1	-4.52995E-4	-8.80007E1	1.43051E-4	4.60148E-3	9.37939E-2	2.72886E1	-3.26767E1	-3.26531E1	2.67974E1	1.198E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.97901E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80012E1	-9.53674E-5	-8.80006E1	2.38419E-5	4.33922E-3	9.36985E-2	2.72715E1	-3.2647E1	-3.26452E1	2.68004E1	1.20017E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.50241E-2	-8.80008E1	-1.66893E-4	-8.80006E1	1.90735E-4	4.43459E-3	9.37223E-2	2.73345E1	-3.26561E1	-3.2629E1	2.68169E1	1.19646E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.8001E1	-1.19209E-4	-8.80006E1	7.15256E-5	4.41074E-3	9.35316E-2	2.72691E1	-3.26868E1	-3.26531E1	2.67932E1	1.19757E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80009E1	-3.8147E-4	-8.80006E1	3.33786E-4	4.3869E-3	9.38892E-2	2.73069E1	-3.26675E1	-3.26182E1	2.6807E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80009E1	-3.8147E-4	-8.80004E1	1.19209E-4	4.74453E-3	9.41038E-2	2.73311E1	-3.26484E1	-3.2636E1	2.68232E1	1.19601E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80007E1	-5.24521E-4	-8.80004E1	3.09944E-4	4.8399E-3	9.37223E-2	2.73105E1	-3.27041E1	-3.26008E1	2.68082E1	1.20122E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.8001E1	-7.39098E-4	-8.80002E1	3.09944E-4	4.57764E-3	9.38892E-2	2.72342E1	-3.26212E1	-3.26903E1	2.67812E1	1.19697E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.8001E1	-7.39098E-4	-8.80002E1	4.29153E-4	4.88758E-3	9.36508E-2	2.73818E1	-3.26779E1	-3.2616E1	2.68076E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00041E-1
