[Scan]
initial_time=2016-01-28T22:03:08
final_time=2016-01-28T22:03:28
ip_count=19
run=1026
dataset=9
scan=686
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.79401E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-5.64528E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.46086E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.62752E-9
ql4_vset=
ql4_vmon=-2.38419E-4
ql4_imon=1.63081E-8
mult1=-1.00414E-8
mult2=-2.80844E-9
rf_tmon=-5.64198E-3
rf_agc=3.26246E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.06973E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.97334E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.20362E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02363E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=1.09337E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06659E0
lens1_imon=1.44906E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.95351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04111E1
cs_ea2_imon=1.41457E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.0591E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.11815E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.29671E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.45893E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.11569E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=9.44845E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=1.94512E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.87473E-8
tplens_vset=1.4E-1
tplens_vmon=1.64384E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.50145E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.58905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.47554E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28935E0
ionrepsh_imon=8.50756E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3403E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74964E1
cs_ef2b_imon=3.15641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42934E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10622E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.35751E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.08495E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.08111E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.10972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.81474E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.07502E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08209E0
cs_ionaccel_imon=-9.47263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47554E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.87143E1
mask2_imon=-4.60728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.80819E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.58972E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.12686E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50382E0
defgridb_imon=6.21841E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33197E1
os_fil1_imon=9.40366E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0832E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59833E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31807E1
cs_fil1_imon=7.27497E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03924E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61491E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02812E-2
os_fil2_imon=-2.28154E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4679E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-1.783E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21788E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.572E-1
res40_imon=-2.31677E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.40192E-2	-8.80007E1	-3.33786E-4	-8.80002E1	-2.6226E-4	4.88758E-3	9.40084E-2	2.72466E1	-3.26498E1	-3.25982E1	2.68059E1	1.19601E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80007E1	-2.86102E-4	-8.80004E1	4.76837E-5	4.62532E-3	9.38654E-2	2.73051E1	-3.26772E1	-3.2631E1	2.68469E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80009E1	-2.14577E-4	-8.80003E1	1.19209E-4	4.45843E-3	9.4223E-2	2.73283E1	-3.26492E1	-3.26451E1	2.67966E1	1.19991E-7	2.51826E-3	2.51826E-3	6.32661E-3	2.9939E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80011E1	-2.14577E-4	-8.80006E1	2.38419E-5	4.74453E-3	9.37939E-2	2.7255E1	-3.26891E1	-3.26266E1	2.6816E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80007E1	-4.29153E-4	-8.80003E1	4.76837E-5	4.8399E-3	9.377E-2	2.72591E1	-3.26762E1	-3.26124E1	2.67966E1	1.20055E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80006E1	-4.76837E-4	-8.80004E1	2.14577E-4	4.60148E-3	9.377E-2	2.734E1	-3.26474E1	-3.26462E1	2.68124E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.02769E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80009E1	-5.24521E-4	-8.80005E1	1.43051E-4	4.79221E-3	9.38416E-2	2.72668E1	-3.26714E1	-3.26402E1	2.68382E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80007E1	-4.29153E-4	-8.80003E1	3.09944E-4	4.45843E-3	9.377E-2	2.73249E1	-3.26436E1	-3.26282E1	2.68076E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80011E1	-5.72205E-4	-8.80004E1	3.57628E-4	4.41074E-3	9.41277E-2	2.73288E1	-3.26709E1	-3.2611E1	2.68082E1	1.20051E-7	2.51523E-3	2.51523E-3	6.29237E-3	2.99577E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80011E1	-4.05312E-4	-8.80004E1	2.38419E-4	4.52995E-3	9.38892E-2	2.74283E1	-3.26801E1	-3.26687E1	2.6819E1	1.19883E-7	2.51725E-3	2.51725E-3	6.33021E-3	3.00794E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.8001E1	-7.39098E-4	-8.80005E1	-4.76837E-5	4.76837E-3	9.40084E-2	2.73273E1	-3.26999E1	-3.26176E1	2.68117E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80011E1	-3.8147E-4	-8.80003E1	1.19209E-4	4.91142E-3	9.42945E-2	2.73279E1	-3.26783E1	-3.2623E1	2.67901E1	1.20004E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.0071E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.8001E1	-7.62939E-4	-8.80007E1	2.6226E-4	4.91142E-3	9.40561E-2	2.73333E1	-3.26482E1	-3.26561E1	2.6831E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80009E1	-8.10623E-4	-8.80003E1	3.09944E-4	4.57764E-3	9.38654E-2	2.7358E1	-3.26356E1	-3.26242E1	2.6828E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.8001E1	-5.96046E-4	-8.80006E1	2.14577E-4	4.43459E-3	9.40323E-2	2.73577E1	-3.26878E1	-3.26254E1	2.67625E1	1.19653E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80009E1	-9.29832E-4	-8.80005E1	3.33786E-4	4.26769E-3	9.35793E-2	2.72426E1	-3.26862E1	-3.25829E1	2.68022E1	1.19978E-7	2.52027E-3	2.52027E-3	6.34661E-3	3.0201E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80014E1	-7.86781E-4	-8.80007E1	5.00679E-4	4.673E-3	9.38654E-2	2.7355E1	-3.26597E1	-3.26218E1	2.68007E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.8001E1	-7.62939E-4	-8.80007E1	1.90735E-4	4.55379E-3	9.38177E-2	2.73257E1	-3.26018E1	-3.26425E1	2.68244E1	1.19646E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.8001E1	-8.10623E-4	-8.80007E1	1.90735E-4	4.74453E-3	9.38416E-2	2.72786E1	-3.2708E1	-3.25906E1	2.67812E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80012E1	-5.72205E-4	-8.80003E1	-2.38419E-4	4.74453E-3	9.37939E-2	2.73195E1	-3.26717E1	-3.26212E1	2.6807E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0148E-1
