[Scan]
initial_time=2016-01-28T22:04:55
final_time=2016-01-28T22:05:15
ip_count=19
run=1026
dataset=9
scan=690
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.78812E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.37043E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.44109E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.6609E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.63322E-8
mult1=-9.96916E-9
mult2=-2.79047E-9
rf_tmon=-5.18535E-3
rf_agc=3.24684E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.96459E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63249E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=1.97406E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53867E1
cs_ef1b_imon=3.19285E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04728E2
lens23_imon=1.02492E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=1.07318E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09183E0
lens1_imon=1.56081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64827E1
os_ef1alow_imon=2.9683E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03925E1
cs_ea2_imon=1.39727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84163E1
cs_ef1a_imon=3.03492E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.11981E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11479E1
os_restr1_imon=4.31338E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15059E1
os_ea1_imon=2.47082E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63567E1
os_ef1bup_imon=3.07421E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=9.39437E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01703E1
cs_anode1_imon=1.9709E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.87962E-8
tplens_vset=1.4E-1
tplens_vmon=1.65766E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.5119E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26302E1
iondef2_imon=1.59374E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98508E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=8.4554E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=8.60128E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74776E1
cs_ef2b_imon=3.14719E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42994E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71395E1
cs_ef2a_imon=3.19922E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0583E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16345E-1
os_ef2bup_imon=-5.19412E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11036E1
os_restr2_imon=3.37587E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.09927E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74018E1
iondef1_imon=1.09157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.09514E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.69049E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.06883E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10519E0
cs_ionaccel_imon=-1.00243E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02044E2
cs_ionfocb_imon=1.47234E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56343E1
einzel_imon=7.80386E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-1.00243E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39294E-4
mask2_vset=0.0E0
mask2_vmon=-1.87005E1
mask2_imon=-4.44787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.56088E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55796E0
defgridb_imon=6.24364E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.41622E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08321E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59918E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31844E1
cs_fil1_imon=7.87286E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.88762E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61538E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.45042E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54137E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3019E-1
cs_fil2_imon=-2.28824E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21666E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.11157E-1
res40_imon=-2.43958E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80008E1	-9.53674E-4	-8.80005E1	1.43051E-4	4.93526E-3	9.39369E-2	2.74107E1	-3.26543E1	-3.26378E1	2.67926E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80011E1	-9.77516E-4	-8.80003E1	4.76837E-4	4.86374E-3	9.38177E-2	2.72708E1	-3.26829E1	-3.26248E1	2.68294E1	1.20004E-7	2.52599E-3	2.52599E-3	6.31817E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80013E1	-8.34465E-4	-8.80003E1	3.57628E-4	4.64916E-3	9.41753E-2	2.73511E1	-3.26596E1	-3.26343E1	2.68018E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.01209E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.8001E1	-3.8147E-4	-8.8E1	2.14577E-4	4.60148E-3	9.37462E-2	2.72822E1	-3.264E1	-3.26529E1	2.68144E1	1.198E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80011E1	-5.72205E-4	-8.80004E1	1.43051E-4	4.33922E-3	9.38177E-2	2.74089E1	-3.26805E1	-3.25812E1	2.68153E1	1.20016E-7	2.5216E-3	2.5216E-3	6.3074E-3	2.97972E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80011E1	-6.91414E-4	-8.80003E1	3.57628E-4	4.31538E-3	9.39608E-2	2.71477E1	-3.26374E1	-3.26122E1	2.68094E1	1.19514E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.99634E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80009E1	-5.96046E-4	-8.80002E1	1.90735E-4	4.69685E-3	9.37939E-2	2.74012E1	-3.26464E1	-3.26296E1	2.68022E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80009E1	-5.48363E-4	-8.80004E1	3.33786E-4	4.74453E-3	9.36508E-2	2.72949E1	-3.26458E1	-3.26536E1	2.6801E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.03712E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80013E1	-5.96046E-4	-8.80008E1	1.90735E-4	4.72069E-3	9.36985E-2	2.71591E1	-3.26428E1	-3.26254E1	2.68058E1	1.20487E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80012E1	-6.91414E-4	-8.80006E1	2.38419E-4	4.79221E-3	9.408E-2	2.72763E1	-3.25978E1	-3.26801E1	2.67872E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02659E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80009E1	-7.86781E-4	-8.80002E1	1.90735E-4	4.55379E-3	9.36031E-2	2.74054E1	-3.26738E1	-3.26012E1	2.67972E1	1.19913E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80009E1	-7.86781E-4	-8.80001E1	7.15256E-5	4.50611E-3	9.3627E-2	2.72438E1	-3.26855E1	-3.2632E1	2.67932E1	1.2026E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.00966E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80011E1	-6.67572E-4	-8.80001E1	-4.76837E-5	4.45843E-3	9.377E-2	2.73598E1	-3.26567E1	-3.2602E1	2.68058E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80009E1	-5.24521E-4	-8.80002E1	5.00679E-4	4.36306E-3	9.36508E-2	2.73582E1	-3.26284E1	-3.25906E1	2.67794E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.97704E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.8001E1	-6.91414E-4	-8.80003E1	2.86102E-4	4.36306E-3	9.36508E-2	2.72137E1	-3.2708E1	-3.25918E1	2.67998E1	1.20106E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80011E1	-6.19888E-4	-8.80001E1	7.15256E-5	4.45843E-3	9.36508E-2	2.73183E1	-3.26855E1	-3.2605E1	2.67607E1	1.19953E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00966E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80011E1	-8.10623E-4	-8.80007E1	4.29153E-4	4.29153E-3	9.36985E-2	2.73431E1	-3.26572E1	-3.26248E1	2.67974E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.8001E1	-7.15256E-4	-8.80004E1	3.57628E-4	5.00679E-3	9.37223E-2	2.73897E1	-3.26532E1	-3.26417E1	2.68082E1	1.20031E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.00942E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80006E1	-8.34465E-4	-8.80006E1	1.66893E-4	4.43459E-3	9.39846E-2	2.73183E1	-3.27233E1	-3.25161E1	2.68046E1	1.1979E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80011E1	-8.82149E-4	-8.80007E1	4.52995E-4	4.74453E-3	9.38177E-2	2.74018E1	-3.26302E1	-3.26284E1	2.68106E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
