[Scan]
initial_time=2016-01-28T22:05:22
final_time=2016-01-28T22:05:41
ip_count=19
run=1026
dataset=9
scan=691
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.78916E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.10304E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.47811E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.60668E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.64024E-8
mult1=-9.5959E-9
mult2=-2.73059E-9
rf_tmon=-3.90559E-3
rf_agc=3.31113E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.52261E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62197E0
bslens_imon=2.75208E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20119E1
lens5a_imon=1.99076E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05012E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=3.18826E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02443E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=1.09741E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06781E0
lens1_imon=1.67256E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64527E1
os_ef1alow_imon=2.95924E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.3926E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84215E1
cs_ef1a_imon=3.03778E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.11866E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11517E1
os_restr1_imon=4.30972E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.47035E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.08608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.65039E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01751E1
cs_anode1_imon=1.95246E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.88381E-8
tplens_vset=1.4E-1
tplens_vmon=1.6491E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2605E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.59895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.93807E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=8.63458E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.18755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.14516E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4273E0
os_ea2_imon=-4.05069E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00442E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.18235E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0563E0
os_ef2alow_imon=-2.42862E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04761E-1
os_ef2bup_imon=-5.10457E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11019E1
os_restr2_imon=3.37349E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.10224E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72054E1
iondef1_imon=1.08113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.79721E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.07494E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12145E0
cs_ionaccel_imon=-9.41213E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.474E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56336E1
einzel_imon=7.77125E-6
window_vset=0.0E0
window_vmon=2.17686E-1
window_imon=-1.12888E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39289E-4
mask2_vset=0.0E0
mask2_vmon=-1.87068E1
mask2_imon=-4.99856E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.8913E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.34104E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.25775E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57978E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33213E1
os_fil1_imon=9.403E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08383E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60011E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31848E1
cs_fil1_imon=8.04618E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.59846E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61456E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09191E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68438E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28528E-1
cs_fil2_imon=-2.17107E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.97607E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.14607E-1
res40_imon=-2.44252E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80008E1	7.15256E-5	-8.80006E1	5.24521E-4	4.43459E-3	9.37223E-2	2.73434E1	-3.26561E1	-3.26331E1	2.67872E1	1.19646E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.02253E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80011E1	-8.34465E-4	-8.80005E1	4.05312E-4	4.33922E-3	9.38892E-2	2.7266E1	-3.26669E1	-3.26314E1	2.68028E1	1.19902E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.9943E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80012E1	-6.4373E-4	-8.80007E1	4.05312E-4	4.24385E-3	9.35316E-2	2.73772E1	-3.26494E1	-3.26314E1	2.67902E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80009E1	-4.29153E-4	-8.80004E1	3.33786E-4	4.3869E-3	9.40323E-2	2.7084E1	-3.26663E1	-3.26374E1	2.68064E1	1.20055E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01738E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.8001E1	-7.39098E-4	-8.80006E1	5.48363E-4	4.26769E-3	9.37939E-2	2.72597E1	-3.26632E1	-3.26213E1	2.68053E1	1.19705E-7	2.51662E-3	2.51662E-3	6.26916E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80011E1	-7.15256E-4	-8.80002E1	2.38419E-4	4.76837E-3	9.39369E-2	2.74763E1	-3.27011E1	-3.25972E1	2.68064E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80013E1	-5.00679E-4	-8.80005E1	2.86102E-4	4.74453E-3	9.37223E-2	2.73151E1	-3.26561E1	-3.2636E1	2.6804E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80009E1	-5.72205E-4	-8.80003E1	7.15256E-5	4.55379E-3	9.37462E-2	2.72456E1	-3.26296E1	-3.26434E1	2.68262E1	1.20011E-7	2.51701E-3	2.51701E-3	6.32371E-3	3.02324E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.8001E1	-7.15256E-4	-8.80002E1	3.09944E-4	4.50611E-3	9.38416E-2	2.71994E1	-3.26506E1	-3.26098E1	2.68208E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80012E1	-7.62939E-4	-8.80001E1	2.14577E-4	4.48227E-3	9.35793E-2	2.74511E1	-3.26639E1	-3.26296E1	2.67998E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80016E1	-8.82149E-4	-8.80003E1	-7.15256E-5	4.91142E-3	9.40084E-2	2.72198E1	-3.26711E1	-3.2635E1	2.67848E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80014E1	-5.00679E-4	-8.80002E1	4.29153E-4	4.52995E-3	9.38177E-2	2.73853E1	-3.26644E1	-3.25995E1	2.68004E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.8001E1	-5.72205E-4	-8.80006E1	2.38419E-4	4.43459E-3	9.38892E-2	2.72228E1	-3.26771E1	-3.2614E1	2.68022E1	1.20062E-7	2.5208E-3	2.5208E-3	6.31283E-3	2.99732E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80013E1	-9.05991E-4	-8.80003E1	3.33786E-4	4.673E-3	9.38654E-2	2.73688E1	-3.26915E1	-3.26212E1	2.68215E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.8001E1	-7.86781E-4	-8.80003E1	5.72205E-4	4.88758E-3	9.39131E-2	2.73139E1	-3.26602E1	-3.26213E1	2.67938E1	1.19913E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80012E1	-6.19888E-4	-8.80005E1	3.33786E-4	4.72069E-3	9.37939E-2	2.72769E1	-3.26681E1	-3.26134E1	2.681E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.00453E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.8001E1	-3.8147E-4	-8.80003E1	3.09944E-4	4.72069E-3	9.37223E-2	2.74445E1	-3.26561E1	-3.2629E1	2.67674E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80011E1	-4.05312E-4	-8.80003E1	3.09944E-4	4.43459E-3	9.377E-2	2.74921E1	-3.26567E1	-3.26136E1	2.67885E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80011E1	-8.34465E-4	-8.80004E1	5.00679E-4	4.76837E-3	9.38892E-2	2.72314E1	-3.25635E1	-3.27747E1	2.68262E1	1.19927E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80015E1	-6.19888E-4	-8.80005E1	3.33786E-4	4.88758E-3	9.35316E-2	2.72054E1	-3.26801E1	-3.2605E1	2.6825E1					
