[Scan]
initial_time=2016-01-28T22:06:15
final_time=2016-01-28T22:06:35
ip_count=19
run=1026
dataset=9
scan=693
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.78937E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.14202E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.46638E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.70151E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.636E-8
mult1=-1.00151E-8
mult2=-2.78701E-9
rf_tmon=-5.10316E-3
rf_agc=3.24775E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=5.55277E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62566E0
bslens_imon=2.71201E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19945E1
lens5a_imon=1.97289E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=3.18092E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04737E2
lens23_imon=1.02246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05055E1
cs_ea1_imon=1.0844E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08124E0
lens1_imon=1.57339E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03507E1
cs_ea2_imon=1.38007E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84833E1
cs_ef1a_imon=3.05874E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.12146E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15251E1
os_ea1_imon=2.47278E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25026E0
cs_ionrep_imon=9.42988E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.87914E-8
tplens_vset=1.4E-1
tplens_vmon=1.65551E0
tplens_imon=-1.74941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.4965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26695E1
iondef2_imon=1.59163E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98361E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.96275E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29128E0
ionrepsh_imon=8.63652E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33872E1
lens5b_imon=2.17784E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40575E0
os_ea2_imon=-7.00176E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00678E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70963E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.37553E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.30369E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.734E1
iondef1_imon=1.10239E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.79288E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=7.07518E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0971E0
cs_ionaccel_imon=-8.31936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.25752E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39329E-4
mask2_vset=0.0E0
mask2_vmon=-1.87029E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.39873E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.46851E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40049E0
defgridb_imon=6.30785E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33193E1
os_fil1_imon=9.40744E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08452E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59799E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=7.31101E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.12501E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61517E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.94903E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55057E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21715E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32483E-3
inlet_lpb_pmon=3.0147E-1
chamber_ion_pmon=1.19895E-7
chamber_cvt_pmon=2.51411E-3
foreline_cvt_pmon=2.51411E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.99226E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80013E1	-7.15256E-5	-8.80004E1	7.15256E-5	4.76837E-3	9.40323E-2	2.72547E1	-3.26695E1	-3.26382E1	2.67734E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01609E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.201E-2	-8.80012E1	-4.76837E-5	-8.80005E1	3.09944E-4	4.79221E-3	9.41992E-2	2.73535E1	-3.26634E1	-3.26119E1	2.67974E1	1.19953E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80013E1	-5.96046E-4	-8.80004E1	5.00679E-4	4.79221E-3	9.377E-2	2.7275E1	-3.26538E1	-3.26179E1	2.68372E1	1.20084E-7	2.52362E-3	2.52362E-3	6.32418E-3	2.98819E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80013E1	-6.67572E-4	-8.8E1	7.15256E-5	4.60148E-3	9.35555E-2	2.73339E1	-3.26308E1	-3.26272E1	2.68058E1	1.19991E-7	2.51498E-3	2.51498E-3	6.32328E-3	2.98342E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80015E1	-2.86102E-4	-8.80001E1	2.38419E-4	4.76837E-3	9.38892E-2	2.73159E1	-3.26627E1	-3.26026E1	2.68058E1	1.20069E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80015E1	-4.29153E-4	-8.80004E1	2.38419E-4	4.55379E-3	9.36985E-2	2.72955E1	-3.26518E1	-3.26386E1	2.6798E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80013E1	-5.72205E-4	-8.80005E1	3.57628E-4	4.72069E-3	9.36031E-2	2.74379E1	-3.26819E1	-3.26326E1	2.68058E1	1.20017E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80012E1	-5.96046E-4	-8.80003E1	1.19209E-4	4.91142E-3	9.40084E-2	2.71585E1	-3.2647E1	-3.26026E1	2.68064E1	1.20017E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80012E1	-4.05312E-4	-8.80003E1	2.6226E-4	4.79221E-3	9.37939E-2	2.73652E1	-3.26849E1	-3.2641E1	2.6786E1	1.20226E-7	2.53087E-3	2.53087E-3	6.31288E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80011E1	-3.09944E-4	-8.80004E1	-2.38419E-5	5.00679E-3	9.38654E-2	2.73275E1	-3.26909E1	-3.2613E1	2.67998E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80012E1	-3.57628E-4	-8.80004E1	5.48363E-4	4.74453E-3	9.39369E-2	2.72445E1	-3.26891E1	-3.25715E1	2.6798E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80007E1	-3.33786E-4	-8.80004E1	2.14577E-4	4.62532E-3	9.377E-2	2.74148E1	-3.26632E1	-3.26225E1	2.68052E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80008E1	-7.86781E-4	-8.80005E1	1.43051E-4	4.43459E-3	9.38654E-2	2.72564E1	-3.26621E1	-3.26212E1	2.67794E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80009E1	-5.72205E-4	-8.80005E1	4.29153E-4	4.57764E-3	9.36985E-2	2.74024E1	-3.26657E1	-3.26236E1	2.68052E1	1.19861E-7	2.52757E-3	2.52757E-3	6.30192E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80012E1	-8.58307E-4	-8.80004E1	2.38419E-4	4.8399E-3	9.36747E-2	2.71194E1	-3.26675E1	-3.25942E1	2.68058E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80009E1	-3.57628E-4	-8.80005E1	1.66893E-4	4.45843E-3	9.40084E-2	2.73081E1	-3.26759E1	-3.26452E1	2.67866E1	1.19757E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02396E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80011E1	-2.86102E-4	-8.80006E1	3.57628E-4	4.55379E-3	9.37939E-2	2.73105E1	-3.26597E1	-3.26392E1	2.68221E1	1.19757E-7	2.51334E-3	2.51334E-3	6.29098E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80012E1	-3.8147E-4	-8.80005E1	6.19888E-4	4.45843E-3	9.37223E-2	2.72855E1	-3.26752E1	-3.25678E1	2.68009E1	1.20435E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80015E1	-5.00679E-4	-8.80007E1	3.33786E-4	4.48227E-3	9.38177E-2	2.72976E1	-3.26173E1	-3.25299E1	2.67887E1	1.20242E-7	2.51623E-3	2.51623E-3	6.3275E-3	2.96968E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80015E1	-3.57628E-4	-8.80007E1	9.53674E-5	4.14848E-3	9.36508E-2	2.734E1	-3.26695E1	-3.26119E1	2.67896E1	1.19895E-7	2.51411E-3	2.51411E-3	6.32483E-3	3.0147E-1
