[Scan]
initial_time=2016-01-28T22:06:42
final_time=2016-01-28T22:07:01
ip_count=19
run=1026
dataset=9
scan=694
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.81548E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.22916E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.39903E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.56366E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.63745E-8
mult1=-9.6763E-9
mult2=-2.77418E-9
rf_tmon=-3.35593E-3
rf_agc=3.3521E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.05078E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6727E0
bslens_imon=2.67422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.96917E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05181E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.17574E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0455E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05094E1
cs_ea1_imon=1.10166E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06663E0
lens1_imon=1.37525E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64243E1
os_ef1alow_imon=2.97418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04103E1
cs_ea2_imon=1.41561E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84724E1
cs_ef1a_imon=3.05342E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.12143E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11239E1
os_restr1_imon=4.29825E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=2.47778E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63728E1
os_ef1bup_imon=3.08435E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=9.58668E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01636E1
cs_anode1_imon=1.97087E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.86973E-8
tplens_vset=1.4E-1
tplens_vmon=1.66739E0
tplens_imon=-1.46693E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26339E1
iondef3_imon=1.49312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26496E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.50809E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=8.45053E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75075E1
cs_ef2b_imon=3.14725E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42435E0
os_ea2_imon=-6.28052E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70777E1
cs_ef2a_imon=3.17852E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0841E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53414E-1
os_ef2bup_imon=-5.2262E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11013E1
os_restr2_imon=3.37522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.28973E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.09842E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73679E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68119E1
iondef4_imon=1.07982E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.80271E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.07151E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06469E0
cs_ionaccel_imon=-8.36956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47515E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.81295E-6
window_vset=0.0E0
window_vmon=2.34483E-1
window_imon=-1.08717E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39369E-4
mask2_vset=0.0E0
mask2_vmon=-1.87062E1
mask2_imon=-7.01421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.60815E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.78347E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.3073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.06497E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.40086E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59952E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31829E1
cs_fil1_imon=7.04415E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.46524E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61587E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.28112E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21354E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62616E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.19423E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.74439E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21965E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.59206E-1
res40_imon=-2.42167E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80014E1	-8.82149E-4	-8.80007E1	3.57628E-4	4.52995E-3	9.37223E-2	2.72732E1	-3.26703E1	-3.26254E1	2.68046E1	1.20092E-7	2.51287E-3	2.51287E-3	6.31269E-3	2.99594E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80012E1	-8.82149E-4	-8.80006E1	3.09944E-4	4.673E-3	9.36985E-2	2.7321E1	-3.26603E1	-3.26113E1	2.67988E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.8001E1	-6.4373E-4	-8.80005E1	5.96046E-4	4.62532E-3	9.39369E-2	2.72947E1	-3.26521E1	-3.25918E1	2.68008E1	1.19829E-7	2.51952E-3	2.51952E-3	6.30171E-3	2.99981E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.8001E1	-5.48363E-4	-8.80007E1	4.29153E-4	4.86374E-3	9.35316E-2	2.72775E1	-3.26398E1	-3.26518E1	2.68041E1	1.19941E-7	2.51077E-3	2.51077E-3	6.32858E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80013E1	-2.86102E-4	-8.80006E1	4.52995E-4	5.00679E-3	9.37223E-2	2.72925E1	-3.26843E1	-3.26464E1	2.67734E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80009E1	-1.66893E-4	-8.80005E1	2.6226E-4	4.86374E-3	9.37223E-2	2.7357E1	-3.26531E1	-3.26349E1	2.68196E1	1.20004E-7	2.50882E-3	2.50882E-3	6.31278E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.8001E1	-5.24521E-4	-8.80006E1	3.8147E-4	4.55379E-3	9.377E-2	2.72178E1	-3.26614E1	-3.26649E1	2.67728E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80007E1	-3.8147E-4	-8.80003E1	3.33786E-4	4.60148E-3	9.38892E-2	2.73461E1	-3.26474E1	-3.26168E1	2.67932E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.8001E1	-5.00679E-4	-8.80006E1	2.6226E-4	4.29153E-3	9.36031E-2	2.73291E1	-3.26386E1	-3.26549E1	2.68208E1	1.19913E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80012E1	-5.00679E-4	-8.80006E1	5.00679E-4	4.76837E-3	9.38892E-2	2.72793E1	-3.26242E1	-3.26284E1	2.6804E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80011E1	-6.19888E-4	-8.80006E1	3.57628E-4	4.91142E-3	9.39131E-2	2.72949E1	-3.26897E1	-3.26615E1	2.68322E1	1.2005E-7	2.52063E-3	2.52063E-3	6.31294E-3	3.01014E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80011E1	-2.6226E-4	-8.80006E1	5.48363E-4	4.673E-3	9.39846E-2	2.71939E1	-3.26879E1	-3.26212E1	2.68178E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80011E1	-5.72205E-4	-8.80006E1	3.57628E-4	4.55379E-3	9.38892E-2	2.73163E1	-3.26549E1	-3.26425E1	2.67821E1	1.19697E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80012E1	-8.10623E-4	-8.80004E1	3.57628E-4	4.57764E-3	9.37462E-2	2.73161E1	-3.26811E1	-3.26389E1	2.67795E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80014E1	-5.00679E-4	-8.80002E1	4.05312E-4	4.62532E-3	9.39369E-2	2.73417E1	-3.26726E1	-3.26166E1	2.67734E1	1.20278E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.80012E1	-5.24521E-4	-8.80003E1	-2.38419E-5	4.26769E-3	9.38892E-2	2.73088E1	-3.26682E1	-3.26285E1	2.67637E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80017E1	-8.82149E-4	-8.80002E1	-4.76837E-5	4.55379E-3	9.36985E-2	2.72148E1	-3.2659E1	-3.26248E1	2.67866E1	1.20137E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.01475E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80015E1	-6.91414E-4	-8.80005E1	0.0E0	4.64916E-3	9.377E-2	2.73664E1	-3.26669E1	-3.26549E1	2.68047E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80014E1	-4.05312E-4	-8.80005E1	-4.76837E-5	4.88758E-3	9.37462E-2	2.72573E1	-3.2744E1	-3.2567E1	2.68016E1	1.19809E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80014E1	-5.96046E-4	-8.80006E1	7.15256E-5	4.86374E-3	9.36985E-2	2.73679E1	-3.26496E1	-3.26339E1	2.68119E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
