[Scan]
initial_time=2016-01-28T22:07:08
final_time=2016-01-28T22:07:28
ip_count=19
run=1026
dataset=9
scan=695
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.80053E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-5.97131E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.44093E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.6396E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.63652E-8
mult1=-9.523E-9
mult2=-2.78009E-9
rf_tmon=-4.64515E-3
rf_agc=3.30849E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.29647E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=3.21444E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04575E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=1.09012E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09964E0
lens1_imon=1.55721E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=2.95495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.036E1
cs_ea2_imon=1.39546E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=3.04613E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.1215E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.50146E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64194E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=9.31506E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93676E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01431E1
cs_anode1_imon=1.9426E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.88023E-8
tplens_vset=1.4E-1
tplens_vmon=1.67147E0
tplens_imon=-2.05617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25959E1
iondef3_imon=1.50794E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02886E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=8.61895E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=8.76711E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.16254E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47561E0
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.20254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.73843E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.35643E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.3256E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.06765E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72909E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.75163E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.07425E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08689E0
cs_ionaccel_imon=-1.00853E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.01993E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=8.1924E-6
window_vset=0.0E0
window_vmon=2.06531E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82571E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.87359E1
mask2_imon=-4.60728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.36118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.45634E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.35757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50984E0
defgridb_imon=6.33737E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33215E1
os_fil1_imon=9.41603E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08248E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59745E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=6.7584E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.0289E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61652E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1442E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68058E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21861E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.51193E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80014E1	-5.96046E-4	-8.80011E1	-3.09944E-4	4.24385E-3	9.35555E-2	2.73069E1	-3.26422E1	-3.26338E1	2.67523E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80013E1	-8.34465E-4	-8.80008E1	-7.15256E-5	4.41074E-3	9.35793E-2	2.73853E1	-3.26548E1	-3.26438E1	2.68016E1	1.20209E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80012E1	-5.72205E-4	-8.80008E1	-4.76837E-5	4.41074E-3	9.36508E-2	2.72727E1	-3.2681E1	-3.26214E1	2.6792E1	1.19766E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.02545E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80014E1	-4.52995E-4	-8.80006E1	-1.43051E-4	4.22001E-3	9.377E-2	2.73147E1	-3.26735E1	-3.26158E1	2.68232E1	1.198E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80015E1	-4.76837E-4	-8.80008E1	3.57628E-4	4.12464E-3	9.39131E-2	2.73116E1	-3.26685E1	-3.25871E1	2.67974E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80013E1	-6.67572E-4	-8.80009E1	2.14577E-4	4.69685E-3	9.36031E-2	2.73033E1	-3.26645E1	-3.2641E1	2.68142E1	1.20278E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80013E1	-4.52995E-4	-8.80006E1	2.86102E-4	4.48227E-3	9.40323E-2	2.74637E1	-3.26488E1	-3.25942E1	2.67746E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80012E1	-8.34465E-4	-8.80003E1	2.38419E-5	4.62532E-3	9.37939E-2	2.72473E1	-3.2652E1	-3.26207E1	2.68142E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80012E1	-7.39098E-4	-8.80004E1	-2.38419E-5	4.45843E-3	9.36747E-2	2.72865E1	-3.26687E1	-3.26446E1	2.68128E1	1.19902E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80009E1	-6.4373E-4	-8.80004E1	2.38419E-4	4.55379E-3	9.36508E-2	2.73523E1	-3.26425E1	-3.26242E1	2.67764E1	1.19705E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80012E1	-3.8147E-4	-8.80006E1	4.52995E-4	5.05447E-3	9.36747E-2	2.7239E1	-3.26958E1	-3.26646E1	2.68022E1	1.19804E-7	2.5143E-3	2.5143E-3	6.31555E-3	3.01414E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80011E1	-5.72205E-4	-8.80006E1	1.90735E-4	4.45843E-3	9.38177E-2	2.72642E1	-3.26687E1	-3.26392E1	2.67998E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80011E1	-4.05312E-4	-8.80007E1	2.6226E-4	4.62532E-3	9.38177E-2	2.73994E1	-3.26434E1	-3.26272E1	2.68118E1	1.19925E-7	2.51915E-3	2.51915E-3	6.34099E-3	2.99348E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80011E1	-5.00679E-4	-8.80006E1	1.19209E-4	4.45843E-3	9.377E-2	2.72829E1	-3.2638E1	-3.26505E1	2.68065E1	1.19902E-7	2.52169E-3	2.52169E-3	6.29128E-3	2.9892E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-7.51013E-2	-8.8001E1	-4.05312E-4	-8.80005E1	3.57628E-4	4.52995E-3	9.35555E-2	2.7307E1	-3.26641E1	-3.26229E1	2.68026E1	1.19782E-7	2.51575E-3	2.51575E-3	6.3126E-3	2.98276E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.47149E-2	-8.8001E1	-3.09944E-4	-8.80007E1	1.43051E-4	4.29153E-3	9.34124E-2	2.72803E1	-3.26797E1	-3.26195E1	2.68058E1	1.19978E-7	2.51414E-3	2.51414E-3	6.32418E-3	2.99481E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80009E1	-3.8147E-4	-8.80007E1	0.0E0	4.43459E-3	9.37462E-2	2.72883E1	-3.26639E1	-3.2647E1	2.68128E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80011E1	-2.14577E-4	-8.80007E1	1.43051E-4	4.86374E-3	9.38892E-2	2.7308E1	-3.26644E1	-3.26107E1	2.68166E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.8001E1	-2.6226E-4	-8.80006E1	-1.43051E-4	4.72069E-3	9.38654E-2	2.7397E1	-3.26909E1	-3.25551E1	2.68064E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80009E1	-4.05312E-4	-8.80007E1	4.05312E-4	4.8399E-3	9.38892E-2	2.72909E1	-3.26661E1	-3.25959E1	2.68214E1	1.20017E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.01085E-1
