[Scan]
initial_time=2016-01-28T22:08:02
final_time=2016-01-28T22:08:21
ip_count=19
run=1026
dataset=9
scan=697
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.82192E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.24704E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.38172E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.58708E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.63666E-8
mult1=-9.78855E-9
mult2=-2.74855E-9
rf_tmon=-4.40428E-3
rf_agc=3.3658E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.40674E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20103E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12418E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53256E1
cs_ef1b_imon=3.15929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=1.07318E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06479E0
lens1_imon=1.52116E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03588E1
cs_ea2_imon=1.40303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84779E1
cs_ef1a_imon=3.0591E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.11661E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1554E1
os_ea1_imon=2.47623E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63401E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=9.45566E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02103E1
cs_anode1_imon=1.98801E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.86965E-8
tplens_vset=1.4E-1
tplens_vmon=1.64564E0
tplens_imon=-1.15493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26458E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.56057E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98508E-4
ql6_vset=1.0E-1
ql6_vmon=9.41992E-2
ql6_imon=8.51679E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29716E0
ionrepsh_imon=8.40301E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.20189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75096E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42093E0
os_ea2_imon=-5.40878E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00763E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70609E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.28794E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15444E-1
os_ef2bup_imon=-5.0738E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.37697E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.11162E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73868E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.78446E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.05679E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-8.1752E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02159E2
cs_ionfocb_imon=1.47666E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56033E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39452E-4
mask2_vset=0.0E0
mask2_vmon=-1.87113E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.64237E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.5717E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=6.92138E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47375E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.41231E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07798E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59896E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31816E1
cs_fil1_imon=7.99576E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.59042E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61432E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.34762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.67929E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.91107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21831E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.27747E-1
res40_imon=-2.23388E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80015E1	-8.34465E-4	-8.80002E1	3.33786E-4	4.72069E-3	9.40084E-2	2.73422E1	-3.26619E1	-3.25959E1	2.68435E1	1.2026E-7	2.52492E-3	2.52492E-3	6.33436E-3	2.99941E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80015E1	-6.67572E-4	-8.80002E1	3.33786E-4	4.98295E-3	9.42707E-2	2.72831E1	-3.26407E1	-3.26021E1	2.68113E1	1.19991E-7	2.51287E-3	2.51287E-3	6.30212E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80014E1	-4.52995E-4	-8.80005E1	9.53674E-5	5.17368E-3	9.39369E-2	2.73806E1	-3.26779E1	-3.26225E1	2.67665E1	1.201E-7	2.52293E-3	2.52293E-3	6.3131E-3	3.00794E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80015E1	-4.52995E-4	-8.80003E1	4.76837E-5	5.00679E-3	9.40561E-2	2.74427E1	-3.26687E1	-3.26488E1	2.68142E1	1.19991E-7	2.51182E-3	2.51182E-3	6.3074E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80011E1	-4.29153E-4	-8.80006E1	2.6226E-4	5.10216E-3	9.39846E-2	2.72144E1	-3.26771E1	-3.26308E1	2.67944E1	1.20244E-7	2.51248E-3	2.51248E-3	6.33538E-3	3.00144E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.42513E-2	-8.80011E1	-4.52995E-4	-8.80003E1	2.86102E-4	4.57764E-3	9.39131E-2	2.7254E1	-3.26861E1	-3.26296E1	2.68268E1	1.20017E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80012E1	-2.6226E-4	-8.80003E1	2.6226E-4	4.76837E-3	9.37939E-2	2.74066E1	-3.26693E1	-3.2629E1	2.68082E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80011E1	-5.96046E-4	-8.80003E1	1.43051E-4	4.72069E-3	9.39846E-2	2.72558E1	-3.26897E1	-3.26224E1	2.68022E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80013E1	-5.48363E-4	-8.80003E1	-2.38419E-5	4.95911E-3	9.40561E-2	2.74271E1	-3.26711E1	-3.2635E1	2.67974E1	1.19601E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.05035E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80016E1	-6.4373E-4	-8.80005E1	2.6226E-4	5.05447E-3	9.42469E-2	2.71977E1	-3.26537E1	-3.26343E1	2.6818E1	1.20084E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.0041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.45602E-2	-8.80013E1	-6.91414E-4	-8.80003E1	4.29153E-4	4.74453E-3	9.377E-2	2.72612E1	-3.26152E1	-3.26506E1	2.68163E1	1.19902E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80016E1	-6.19888E-4	-8.80006E1	1.43051E-4	4.74453E-3	9.38654E-2	2.73682E1	-3.26765E1	-3.26104E1	2.67998E1	1.19653E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80014E1	-5.48363E-4	-8.80002E1	1.66893E-4	4.62532E-3	9.40323E-2	2.72739E1	-3.26488E1	-3.26428E1	2.68238E1	1.19861E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80013E1	-3.8147E-4	-8.80003E1	3.09944E-4	4.64916E-3	9.40323E-2	2.73021E1	-3.26711E1	-3.26398E1	2.67966E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.03976E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80015E1	-7.15256E-4	-8.80003E1	7.15256E-5	4.95911E-3	9.39131E-2	2.73405E1	-3.26549E1	-3.26188E1	2.68076E1	1.20278E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80015E1	-6.19888E-4	-8.80004E1	4.29153E-4	4.93526E-3	9.39846E-2	2.722E1	-3.26842E1	-3.26352E1	2.68188E1	1.198E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80017E1	-6.19888E-4	-8.80005E1	1.43051E-4	4.64916E-3	9.39369E-2	2.7462E1	-3.26797E1	-3.26266E1	2.67908E1	1.19766E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00144E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80013E1	-6.67572E-4	-8.80004E1	3.8147E-4	4.673E-3	9.39846E-2	2.72698E1	-3.26382E1	-3.26422E1	2.68012E1	1.19902E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80011E1	-1.00136E-3	-8.80003E1	7.15256E-5	4.57764E-3	9.41277E-2	2.72791E1	-3.27086E1	-3.25304E1	2.68016E1	1.1974E-7	2.51919E-3	2.51919E-3	6.33919E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80013E1	-4.29153E-4	-8.80003E1	2.14577E-4	4.45843E-3	9.41992E-2	2.73868E1	-3.2638E1	-3.26458E1	2.68076E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
