[Scan]
initial_time=2016-01-28T22:08:28
final_time=2016-01-28T22:08:48
ip_count=19
run=1026
dataset=9
scan=698
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.54105E-2
qbias_imon=-3.89915E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.8254E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.42879E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.54172E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.63864E-8
mult1=-9.84219E-9
mult2=-2.78401E-9
rf_tmon=-4.64515E-3
rf_agc=3.25127E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.28371E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=1.99571E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05291E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.17587E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=1.09954E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08492E0
lens1_imon=1.56638E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6429E1
os_ef1alow_imon=2.96288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.388E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.0537E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.11804E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11958E1
os_restr1_imon=4.32121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15164E1
os_ea1_imon=2.46186E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63353E1
os_ef1bup_imon=3.06379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22909E0
cs_ionrep_imon=9.48404E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01599E1
cs_anode1_imon=1.97719E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.86977E-8
tplens_vset=1.4E-1
tplens_vmon=1.6314E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26343E1
iondef3_imon=1.52143E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26343E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=8.11064E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=8.67705E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75006E1
cs_ef2b_imon=3.15461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44323E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01972E0
os_ef2alow_imon=-2.76727E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.41873E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.38418E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02115E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72679E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67775E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.78457E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.06767E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.05986E0
cs_ionaccel_imon=-9.79699E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4759E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56796E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.47376E-1
window_imon=-1.19233E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39376E-4
mask2_vset=0.0E0
mask2_vmon=-1.87437E1
mask2_imon=-2.91341E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.23651E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.68791E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.7108E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56206E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.41165E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08098E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59858E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=6.56619E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.83068E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61408E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05368E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.67172E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.03527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.79094E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21884E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-1.61074E-1
res40_imon=-2.23388E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.42513E-2	-8.80014E1	-4.52995E-4	-8.8E1	4.05312E-4	4.57764E-3	9.39608E-2	2.72976E1	-3.26486E1	-3.26104E1	2.68094E1	1.2026E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.0148E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80011E1	-5.72205E-4	-8.80004E1	2.38419E-4	4.64916E-3	9.39846E-2	2.73149E1	-3.26782E1	-3.26196E1	2.68024E1	1.19891E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.80011E1	-4.05312E-4	-8.80005E1	-3.09944E-4	4.72069E-3	9.41992E-2	2.72937E1	-3.26609E1	-3.26368E1	2.68094E1	1.19646E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00966E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.47149E-2	-8.80013E1	-2.38419E-4	-8.80004E1	-4.76837E-4	4.57764E-3	9.41992E-2	2.7275E1	-3.26408E1	-3.26343E1	2.67931E1	1.20088E-7	2.51972E-3	2.51972E-3	6.31827E-3	3.00249E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80011E1	-4.29153E-4	-8.80002E1	7.15256E-5	4.69685E-3	9.408E-2	2.73321E1	-3.26825E1	-3.25876E1	2.68026E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80009E1	-3.57628E-4	-8.80004E1	9.53674E-5	4.69685E-3	9.40084E-2	2.72943E1	-3.26831E1	-3.2626E1	2.68059E1	1.19705E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80011E1	-5.00679E-4	-8.80007E1	-2.38419E-5	5.00679E-3	9.41277E-2	2.73051E1	-3.26705E1	-3.26194E1	2.68022E1	1.19913E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.80009E1	-6.19888E-4	-8.80005E1	-1.43051E-4	4.673E-3	9.39846E-2	2.73351E1	-3.26392E1	-3.26026E1	2.67914E1	1.19965E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80011E1	-7.62939E-4	-8.80005E1	-2.38419E-5	4.88758E-3	9.41515E-2	2.72931E1	-3.26452E1	-3.26164E1	2.68169E1	1.20122E-7	2.52538E-3	2.52538E-3	6.34037E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80011E1	-6.4373E-4	-8.80003E1	1.43051E-4	5.00679E-3	9.38892E-2	2.73484E1	-3.26879E1	-3.26194E1	2.68166E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.03286E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80013E1	-8.10623E-4	-8.8E1	-4.76837E-5	4.60148E-3	9.39846E-2	2.73574E1	-3.27131E1	-3.25828E1	2.68046E1	1.19809E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.03712E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80012E1	-2.38419E-4	-8.80002E1	-1.66893E-4	4.64916E-3	9.39131E-2	2.73333E1	-3.26861E1	-3.26512E1	2.68262E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.41738E-2	-8.80012E1	-2.6226E-4	-8.80002E1	1.90735E-4	4.93526E-3	9.40323E-2	2.72679E1	-3.26697E1	-3.26006E1	2.68076E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80011E1	-3.57628E-4	-8.80003E1	9.53674E-5	4.74453E-3	9.40084E-2	2.72805E1	-3.26723E1	-3.26248E1	2.67974E1	1.19851E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.03286E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.44059E-2	-8.8001E1	0.0E0	-8.80003E1	1.66893E-4	4.76837E-3	9.377E-2	2.73411E1	-3.26832E1	-3.26384E1	2.67769E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.54877E-2	-8.80011E1	-2.38419E-4	-8.80005E1	5.24521E-4	4.79221E-3	9.40323E-2	2.72763E1	-3.26627E1	-3.2629E1	2.67974E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01738E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80013E1	-1.43051E-4	-8.80002E1	6.19888E-4	4.69685E-3	9.40084E-2	2.73586E1	-3.26885E1	-3.26116E1	2.67974E1	1.20122E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.51013E-2	-8.80013E1	-6.19888E-4	-8.80003E1	3.09944E-4	4.57764E-3	9.37939E-2	2.73605E1	-3.26596E1	-3.26242E1	2.67902E1	1.19757E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.46377E-2	-8.80011E1	-4.52995E-4	-8.80003E1	3.57628E-4	4.79221E-3	9.40323E-2	2.7254E1	-3.26392E1	-3.27167E1	2.68112E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.54105E-2	-8.80013E1	-6.4373E-4	-8.80002E1	-1.43051E-4	4.76837E-3	9.39846E-2	2.72679E1	-3.26343E1	-3.26343E1	2.67775E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99686E-1
